3/11/2011	12:14:57 AM	H2 valve closed
3/11/2011	12:14:57 AM	BCl3 valve closed
3/11/2011	12:14:57 AM	PH3 valve closed
3/11/2011	12:14:57 AM	SiCl4 pre valve closed
3/11/2011	12:14:57 AM	SiCl4 post valve closed
3/11/2011	12:14:57 AM	Main Vac valve closed
3/11/2011	12:14:57 AM	Bypass valve closed
3/11/2011	12:14:57 AM	Helium valve opened
3/11/2011	12:14:57 AM	Bubbler valve opened
3/11/2011	12:14:57 AM	Helium MFC set to  500.000000
3/11/2011	12:14:57 AM	H2 MFC set to  0.000000
3/11/2011	12:14:57 AM	BCl3 MFC set to  0.000000
3/11/2011	12:14:57 AM	PHl3 MFC set to  0.000000
3/11/2011	12:14:57 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:14:57 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:14:57 AM	Tube furnace set to 0
3/11/2011	12:34:57 AM	Helium valve closed
3/11/2011	12:34:57 AM	H2 valve closed
3/11/2011	12:34:57 AM	BCl3 valve closed
3/11/2011	12:34:57 AM	PH3 valve closed
3/11/2011	12:34:57 AM	SiCl4 pre valve closed
3/11/2011	12:34:57 AM	SiCl4 post valve closed
3/11/2011	12:34:57 AM	Main Vac valve closed
3/11/2011	12:34:57 AM	Bypass valve closed
3/11/2011	12:34:57 AM	Bubbler valve closed
3/11/2011	12:34:57 AM	Helium MFC set to  0.000000
3/11/2011	12:34:57 AM	H2 MFC set to  0.000000
3/11/2011	12:34:57 AM	BCl3 MFC set to  0.000000
3/11/2011	12:34:57 AM	PHl3 MFC set to  0.000000
3/11/2011	12:34:57 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:34:57 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:34:57 AM	Tube furnace set to 0
3/11/2011	12:34:58 AM	Run finished at 12:34 AM
3/11/2011	12:40:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2011	12:41:00 AM	Recipe started at 12:41 AM
3/11/2011	12:41:00 AM	H2 valve closed
3/11/2011	12:41:00 AM	BCl3 valve closed
3/11/2011	12:41:00 AM	PH3 valve closed
3/11/2011	12:41:00 AM	SiCl4 pre valve closed
3/11/2011	12:41:00 AM	SiCl4 post valve closed
3/11/2011	12:41:00 AM	Main Vac valve closed
3/11/2011	12:41:00 AM	Bypass valve closed
3/11/2011	12:41:00 AM	Bubbler valve closed
3/11/2011	12:41:00 AM	Helium valve opened
3/11/2011	12:41:00 AM	Helium MFC set to  500.000000
3/11/2011	12:41:00 AM	H2 MFC set to  0.000000
3/11/2011	12:41:00 AM	BCl3 MFC set to  0.000000
3/11/2011	12:41:00 AM	PHl3 MFC set to  0.000000
3/11/2011	12:41:00 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:41:00 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:41:00 AM	Tube furnace set to 0
3/11/2011	12:41:03 AM	Helium valve closed
3/11/2011	12:41:03 AM	H2 valve closed
3/11/2011	12:41:03 AM	BCl3 valve closed
3/11/2011	12:41:03 AM	PH3 valve closed
3/11/2011	12:41:03 AM	SiCl4 pre valve closed
3/11/2011	12:41:03 AM	SiCl4 post valve closed
3/11/2011	12:41:03 AM	Main Vac valve closed
3/11/2011	12:41:03 AM	Bypass valve closed
3/11/2011	12:41:03 AM	Bubbler valve closed
3/11/2011	12:41:03 AM	Helium MFC set to  0.000000
3/11/2011	12:41:03 AM	H2 MFC set to  0.000000
3/11/2011	12:41:03 AM	BCl3 MFC set to  0.000000
3/11/2011	12:41:03 AM	PHl3 MFC set to  0.000000
3/11/2011	12:41:03 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:41:03 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:41:03 AM	Tube furnace set to 0
3/11/2011	12:41:04 AM	Run finished at 12:41 AM
3/11/2011	12:41:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2011	12:44:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2011	12:44:49 AM	Recipe started at 12:44 AM
3/11/2011	12:44:49 AM	Helium valve closed
3/11/2011	12:44:49 AM	H2 valve closed
3/11/2011	12:44:49 AM	BCl3 valve closed
3/11/2011	12:44:49 AM	PH3 valve closed
3/11/2011	12:44:49 AM	SiCl4 pre valve closed
3/11/2011	12:44:49 AM	SiCl4 post valve closed
3/11/2011	12:44:49 AM	Main Vac valve closed
3/11/2011	12:44:49 AM	Bubbler valve closed
3/11/2011	12:44:49 AM	Bypass valve opened
3/11/2011	12:44:49 AM	Helium MFC set to  0.000000
3/11/2011	12:44:49 AM	H2 MFC set to  0.000000
3/11/2011	12:44:49 AM	BCl3 MFC set to  0.000000
3/11/2011	12:44:49 AM	PHl3 MFC set to  0.000000
3/11/2011	12:44:49 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:44:49 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:44:49 AM	Tube furnace set to 0
3/11/2011	12:45:20 AM	Helium valve closed
3/11/2011	12:45:20 AM	H2 valve closed
3/11/2011	12:45:20 AM	BCl3 valve closed
3/11/2011	12:45:20 AM	PH3 valve closed
3/11/2011	12:45:20 AM	SiCl4 pre valve closed
3/11/2011	12:45:20 AM	SiCl4 post valve closed
3/11/2011	12:45:20 AM	Bubbler valve closed
3/11/2011	12:45:20 AM	Main Vac valve opened
3/11/2011	12:45:20 AM	Bypass valve opened
3/11/2011	12:45:20 AM	Helium MFC set to  0.000000
3/11/2011	12:45:20 AM	H2 MFC set to  0.000000
3/11/2011	12:45:20 AM	BCl3 MFC set to  0.000000
3/11/2011	12:45:20 AM	PHl3 MFC set to  0.000000
3/11/2011	12:45:20 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:45:20 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:45:20 AM	Tube furnace set to 0
3/11/2011	12:45:20 AM	Run finished at 12:45 AM
3/11/2011	12:45:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2011	12:45:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	12:46:11 AM	Recipe started at 12:46 AM
3/11/2011	12:46:11 AM	Helium valve closed
3/11/2011	12:46:11 AM	H2 valve closed
3/11/2011	12:46:11 AM	BCl3 valve closed
3/11/2011	12:46:11 AM	PH3 valve closed
3/11/2011	12:46:11 AM	SiCl4 pre valve closed
3/11/2011	12:46:11 AM	SiCl4 post valve closed
3/11/2011	12:46:11 AM	Main Vac valve closed
3/11/2011	12:46:11 AM	Bubbler valve closed
3/11/2011	12:46:11 AM	Bypass valve opened
3/11/2011	12:46:11 AM	Helium MFC set to  0.000000
3/11/2011	12:46:11 AM	H2 MFC set to  0.000000
3/11/2011	12:46:11 AM	BCl3 MFC set to  0.000000
3/11/2011	12:46:11 AM	PHl3 MFC set to  0.000000
3/11/2011	12:46:11 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:46:11 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:46:12 AM	Tube furnace set to 0
3/11/2011	12:46:12 AM	Helium valve closed
3/11/2011	12:46:12 AM	H2 valve closed
3/11/2011	12:46:12 AM	BCl3 valve closed
3/11/2011	12:46:12 AM	PH3 valve closed
3/11/2011	12:46:12 AM	SiCl4 pre valve closed
3/11/2011	12:46:12 AM	SiCl4 post valve closed
3/11/2011	12:46:12 AM	Bubbler valve closed
3/11/2011	12:46:12 AM	Main Vac valve opened
3/11/2011	12:46:12 AM	Bypass valve opened
3/11/2011	12:46:12 AM	Helium MFC set to  0.000000
3/11/2011	12:46:12 AM	H2 MFC set to  0.000000
3/11/2011	12:46:12 AM	BCl3 MFC set to  0.000000
3/11/2011	12:46:12 AM	PHl3 MFC set to  0.000000
3/11/2011	12:46:12 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:46:12 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:46:12 AM	Tube furnace set to 0
3/11/2011	12:47:12 AM	H2 valve closed
3/11/2011	12:47:12 AM	BCl3 valve closed
3/11/2011	12:47:12 AM	PH3 valve closed
3/11/2011	12:47:12 AM	SiCl4 pre valve closed
3/11/2011	12:47:12 AM	SiCl4 post valve closed
3/11/2011	12:47:12 AM	Bubbler valve closed
3/11/2011	12:47:12 AM	Helium valve opened
3/11/2011	12:47:12 AM	Main Vac valve opened
3/11/2011	12:47:12 AM	Bypass valve opened
3/11/2011	12:47:12 AM	Helium MFC set to  100.000000
3/11/2011	12:47:12 AM	H2 MFC set to  0.000000
3/11/2011	12:47:12 AM	BCl3 MFC set to  0.000000
3/11/2011	12:47:12 AM	PHl3 MFC set to  0.000000
3/11/2011	12:47:12 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:47:12 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:47:12 AM	Tube furnace set to 0
3/11/2011	12:48:12 AM	Helium valve closed
3/11/2011	12:48:12 AM	H2 valve closed
3/11/2011	12:48:12 AM	BCl3 valve closed
3/11/2011	12:48:12 AM	PH3 valve closed
3/11/2011	12:48:12 AM	SiCl4 pre valve closed
3/11/2011	12:48:12 AM	SiCl4 post valve closed
3/11/2011	12:48:12 AM	Bubbler valve closed
3/11/2011	12:48:12 AM	Main Vac valve opened
3/11/2011	12:48:12 AM	Bypass valve opened
3/11/2011	12:48:12 AM	Helium MFC set to  0.000000
3/11/2011	12:48:12 AM	H2 MFC set to  0.000000
3/11/2011	12:48:12 AM	BCl3 MFC set to  0.000000
3/11/2011	12:48:12 AM	PHl3 MFC set to  0.000000
3/11/2011	12:48:12 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:48:12 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:48:12 AM	Tube furnace set to 0
3/11/2011	12:49:12 AM	H2 valve closed
3/11/2011	12:49:12 AM	BCl3 valve closed
3/11/2011	12:49:12 AM	PH3 valve closed
3/11/2011	12:49:12 AM	SiCl4 pre valve closed
3/11/2011	12:49:12 AM	SiCl4 post valve closed
3/11/2011	12:49:12 AM	Bubbler valve closed
3/11/2011	12:49:12 AM	Helium valve opened
3/11/2011	12:49:12 AM	Main Vac valve opened
3/11/2011	12:49:12 AM	Bypass valve opened
3/11/2011	12:49:12 AM	Helium MFC set to  100.000000
3/11/2011	12:49:12 AM	H2 MFC set to  0.000000
3/11/2011	12:49:12 AM	BCl3 MFC set to  0.000000
3/11/2011	12:49:12 AM	PHl3 MFC set to  0.000000
3/11/2011	12:49:12 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:49:12 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:49:13 AM	Tube furnace set to 0
3/11/2011	12:50:13 AM	Helium valve closed
3/11/2011	12:50:13 AM	H2 valve closed
3/11/2011	12:50:13 AM	BCl3 valve closed
3/11/2011	12:50:13 AM	PH3 valve closed
3/11/2011	12:50:13 AM	SiCl4 pre valve closed
3/11/2011	12:50:13 AM	SiCl4 post valve closed
3/11/2011	12:50:13 AM	Bubbler valve closed
3/11/2011	12:50:13 AM	Main Vac valve opened
3/11/2011	12:50:13 AM	Bypass valve opened
3/11/2011	12:50:13 AM	Helium MFC set to  0.000000
3/11/2011	12:50:13 AM	H2 MFC set to  0.000000
3/11/2011	12:50:13 AM	BCl3 MFC set to  0.000000
3/11/2011	12:50:13 AM	PHl3 MFC set to  0.000000
3/11/2011	12:50:13 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:50:13 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:50:13 AM	Tube furnace set to 0
3/11/2011	12:51:13 AM	H2 valve closed
3/11/2011	12:51:13 AM	BCl3 valve closed
3/11/2011	12:51:13 AM	PH3 valve closed
3/11/2011	12:51:13 AM	SiCl4 pre valve closed
3/11/2011	12:51:13 AM	SiCl4 post valve closed
3/11/2011	12:51:13 AM	Bubbler valve closed
3/11/2011	12:51:13 AM	Helium valve opened
3/11/2011	12:51:13 AM	Main Vac valve opened
3/11/2011	12:51:13 AM	Bypass valve opened
3/11/2011	12:51:13 AM	Helium MFC set to  100.000000
3/11/2011	12:51:13 AM	H2 MFC set to  0.000000
3/11/2011	12:51:13 AM	BCl3 MFC set to  0.000000
3/11/2011	12:51:13 AM	PHl3 MFC set to  0.000000
3/11/2011	12:51:13 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:51:13 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:51:13 AM	Tube furnace set to 0
3/11/2011	12:52:13 AM	Helium valve closed
3/11/2011	12:52:13 AM	H2 valve closed
3/11/2011	12:52:13 AM	BCl3 valve closed
3/11/2011	12:52:13 AM	PH3 valve closed
3/11/2011	12:52:13 AM	SiCl4 pre valve closed
3/11/2011	12:52:13 AM	SiCl4 post valve closed
3/11/2011	12:52:13 AM	Bubbler valve closed
3/11/2011	12:52:13 AM	Main Vac valve opened
3/11/2011	12:52:13 AM	Bypass valve opened
3/11/2011	12:52:13 AM	Helium MFC set to  0.000000
3/11/2011	12:52:13 AM	H2 MFC set to  0.000000
3/11/2011	12:52:13 AM	BCl3 MFC set to  0.000000
3/11/2011	12:52:13 AM	PHl3 MFC set to  0.000000
3/11/2011	12:52:13 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:52:13 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:52:13 AM	Tube furnace set to 0
3/11/2011	12:53:13 AM	H2 valve closed
3/11/2011	12:53:13 AM	BCl3 valve closed
3/11/2011	12:53:13 AM	PH3 valve closed
3/11/2011	12:53:13 AM	SiCl4 pre valve closed
3/11/2011	12:53:13 AM	SiCl4 post valve closed
3/11/2011	12:53:13 AM	Bubbler valve closed
3/11/2011	12:53:13 AM	Helium valve opened
3/11/2011	12:53:13 AM	Main Vac valve opened
3/11/2011	12:53:13 AM	Bypass valve opened
3/11/2011	12:53:13 AM	Helium MFC set to  100.000000
3/11/2011	12:53:13 AM	H2 MFC set to  0.000000
3/11/2011	12:53:13 AM	BCl3 MFC set to  0.000000
3/11/2011	12:53:13 AM	PHl3 MFC set to  0.000000
3/11/2011	12:53:13 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:53:13 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:53:13 AM	Tube furnace set to 0
3/11/2011	12:54:13 AM	Helium valve closed
3/11/2011	12:54:13 AM	H2 valve closed
3/11/2011	12:54:13 AM	BCl3 valve closed
3/11/2011	12:54:13 AM	PH3 valve closed
3/11/2011	12:54:13 AM	SiCl4 pre valve closed
3/11/2011	12:54:13 AM	SiCl4 post valve closed
3/11/2011	12:54:13 AM	Bubbler valve closed
3/11/2011	12:54:13 AM	Main Vac valve opened
3/11/2011	12:54:13 AM	Bypass valve opened
3/11/2011	12:54:13 AM	Helium MFC set to  0.000000
3/11/2011	12:54:13 AM	H2 MFC set to  0.000000
3/11/2011	12:54:13 AM	BCl3 MFC set to  0.000000
3/11/2011	12:54:13 AM	PHl3 MFC set to  0.000000
3/11/2011	12:54:13 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:54:13 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:54:14 AM	Tube furnace set to 0
3/11/2011	12:55:14 AM	H2 valve closed
3/11/2011	12:55:14 AM	BCl3 valve closed
3/11/2011	12:55:14 AM	PH3 valve closed
3/11/2011	12:55:14 AM	SiCl4 pre valve closed
3/11/2011	12:55:14 AM	SiCl4 post valve closed
3/11/2011	12:55:14 AM	Bubbler valve closed
3/11/2011	12:55:14 AM	Helium valve opened
3/11/2011	12:55:14 AM	Main Vac valve opened
3/11/2011	12:55:14 AM	Bypass valve opened
3/11/2011	12:55:14 AM	Helium MFC set to  100.000000
3/11/2011	12:55:14 AM	H2 MFC set to  0.000000
3/11/2011	12:55:14 AM	BCl3 MFC set to  0.000000
3/11/2011	12:55:14 AM	PHl3 MFC set to  0.000000
3/11/2011	12:55:14 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:55:14 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:55:14 AM	Tube furnace set to 0
3/11/2011	12:56:14 AM	Helium valve closed
3/11/2011	12:56:14 AM	H2 valve closed
3/11/2011	12:56:14 AM	BCl3 valve closed
3/11/2011	12:56:14 AM	PH3 valve closed
3/11/2011	12:56:14 AM	SiCl4 pre valve closed
3/11/2011	12:56:14 AM	SiCl4 post valve closed
3/11/2011	12:56:14 AM	Bubbler valve closed
3/11/2011	12:56:14 AM	Main Vac valve opened
3/11/2011	12:56:14 AM	Bypass valve opened
3/11/2011	12:56:14 AM	Helium MFC set to  0.000000
3/11/2011	12:56:14 AM	H2 MFC set to  0.000000
3/11/2011	12:56:14 AM	BCl3 MFC set to  0.000000
3/11/2011	12:56:14 AM	PHl3 MFC set to  0.000000
3/11/2011	12:56:14 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:56:14 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:56:14 AM	Tube furnace set to 0
3/11/2011	12:57:14 AM	H2 valve closed
3/11/2011	12:57:14 AM	BCl3 valve closed
3/11/2011	12:57:14 AM	PH3 valve closed
3/11/2011	12:57:14 AM	SiCl4 pre valve closed
3/11/2011	12:57:14 AM	SiCl4 post valve closed
3/11/2011	12:57:14 AM	Bubbler valve closed
3/11/2011	12:57:14 AM	Helium valve opened
3/11/2011	12:57:14 AM	Main Vac valve opened
3/11/2011	12:57:14 AM	Bypass valve opened
3/11/2011	12:57:14 AM	Helium MFC set to  100.000000
3/11/2011	12:57:14 AM	H2 MFC set to  0.000000
3/11/2011	12:57:14 AM	BCl3 MFC set to  0.000000
3/11/2011	12:57:14 AM	PHl3 MFC set to  0.000000
3/11/2011	12:57:14 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:57:14 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:57:14 AM	Tube furnace set to 0
3/11/2011	12:58:14 AM	Helium valve closed
3/11/2011	12:58:14 AM	H2 valve closed
3/11/2011	12:58:14 AM	BCl3 valve closed
3/11/2011	12:58:14 AM	PH3 valve closed
3/11/2011	12:58:14 AM	SiCl4 pre valve closed
3/11/2011	12:58:14 AM	SiCl4 post valve closed
3/11/2011	12:58:14 AM	Bubbler valve closed
3/11/2011	12:58:14 AM	Main Vac valve opened
3/11/2011	12:58:14 AM	Bypass valve opened
3/11/2011	12:58:14 AM	Helium MFC set to  0.000000
3/11/2011	12:58:14 AM	H2 MFC set to  0.000000
3/11/2011	12:58:14 AM	BCl3 MFC set to  0.000000
3/11/2011	12:58:14 AM	PHl3 MFC set to  0.000000
3/11/2011	12:58:14 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:58:14 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:58:14 AM	Tube furnace set to 0
3/11/2011	12:59:14 AM	H2 valve closed
3/11/2011	12:59:14 AM	BCl3 valve closed
3/11/2011	12:59:14 AM	PH3 valve closed
3/11/2011	12:59:14 AM	SiCl4 pre valve closed
3/11/2011	12:59:14 AM	SiCl4 post valve closed
3/11/2011	12:59:14 AM	Bubbler valve closed
3/11/2011	12:59:14 AM	Helium valve opened
3/11/2011	12:59:14 AM	Main Vac valve opened
3/11/2011	12:59:14 AM	Bypass valve opened
3/11/2011	12:59:14 AM	Helium MFC set to  100.000000
3/11/2011	12:59:14 AM	H2 MFC set to  0.000000
3/11/2011	12:59:14 AM	BCl3 MFC set to  0.000000
3/11/2011	12:59:14 AM	PHl3 MFC set to  0.000000
3/11/2011	12:59:14 AM	SiCl4 MFC set to  0.000000
3/11/2011	12:59:14 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:59:15 AM	Tube furnace set to 0
3/11/2011	1:00:15 AM	Helium valve closed
3/11/2011	1:00:15 AM	H2 valve closed
3/11/2011	1:00:15 AM	BCl3 valve closed
3/11/2011	1:00:15 AM	PH3 valve closed
3/11/2011	1:00:15 AM	SiCl4 pre valve closed
3/11/2011	1:00:15 AM	SiCl4 post valve closed
3/11/2011	1:00:15 AM	Bubbler valve closed
3/11/2011	1:00:15 AM	Main Vac valve opened
3/11/2011	1:00:15 AM	Bypass valve opened
3/11/2011	1:00:15 AM	Helium MFC set to  0.000000
3/11/2011	1:00:15 AM	H2 MFC set to  0.000000
3/11/2011	1:00:15 AM	BCl3 MFC set to  0.000000
3/11/2011	1:00:15 AM	PHl3 MFC set to  0.000000
3/11/2011	1:00:15 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:00:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:00:15 AM	Tube furnace set to 0
3/11/2011	1:01:15 AM	H2 valve closed
3/11/2011	1:01:15 AM	BCl3 valve closed
3/11/2011	1:01:15 AM	PH3 valve closed
3/11/2011	1:01:15 AM	SiCl4 pre valve closed
3/11/2011	1:01:15 AM	SiCl4 post valve closed
3/11/2011	1:01:15 AM	Bubbler valve closed
3/11/2011	1:01:15 AM	Helium valve opened
3/11/2011	1:01:15 AM	Main Vac valve opened
3/11/2011	1:01:15 AM	Bypass valve opened
3/11/2011	1:01:15 AM	Helium MFC set to  100.000000
3/11/2011	1:01:15 AM	H2 MFC set to  0.000000
3/11/2011	1:01:15 AM	BCl3 MFC set to  0.000000
3/11/2011	1:01:15 AM	PHl3 MFC set to  0.000000
3/11/2011	1:01:15 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:01:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:01:15 AM	Tube furnace set to 0
3/11/2011	1:02:15 AM	Helium valve closed
3/11/2011	1:02:15 AM	H2 valve closed
3/11/2011	1:02:15 AM	BCl3 valve closed
3/11/2011	1:02:15 AM	PH3 valve closed
3/11/2011	1:02:15 AM	SiCl4 pre valve closed
3/11/2011	1:02:15 AM	SiCl4 post valve closed
3/11/2011	1:02:15 AM	Bubbler valve closed
3/11/2011	1:02:15 AM	Main Vac valve opened
3/11/2011	1:02:15 AM	Bypass valve opened
3/11/2011	1:02:15 AM	Helium MFC set to  0.000000
3/11/2011	1:02:15 AM	H2 MFC set to  0.000000
3/11/2011	1:02:15 AM	BCl3 MFC set to  0.000000
3/11/2011	1:02:15 AM	PHl3 MFC set to  0.000000
3/11/2011	1:02:15 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:02:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:02:15 AM	Tube furnace set to 0
3/11/2011	1:03:15 AM	H2 valve closed
3/11/2011	1:03:15 AM	BCl3 valve closed
3/11/2011	1:03:15 AM	PH3 valve closed
3/11/2011	1:03:15 AM	SiCl4 pre valve closed
3/11/2011	1:03:15 AM	SiCl4 post valve closed
3/11/2011	1:03:15 AM	Bubbler valve closed
3/11/2011	1:03:15 AM	Helium valve opened
3/11/2011	1:03:15 AM	Main Vac valve opened
3/11/2011	1:03:15 AM	Bypass valve opened
3/11/2011	1:03:15 AM	Helium MFC set to  100.000000
3/11/2011	1:03:15 AM	H2 MFC set to  0.000000
3/11/2011	1:03:15 AM	BCl3 MFC set to  0.000000
3/11/2011	1:03:15 AM	PHl3 MFC set to  0.000000
3/11/2011	1:03:15 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:03:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:03:15 AM	Tube furnace set to 0
3/11/2011	1:04:15 AM	Helium valve closed
3/11/2011	1:04:15 AM	H2 valve closed
3/11/2011	1:04:15 AM	BCl3 valve closed
3/11/2011	1:04:15 AM	PH3 valve closed
3/11/2011	1:04:15 AM	SiCl4 pre valve closed
3/11/2011	1:04:15 AM	SiCl4 post valve closed
3/11/2011	1:04:15 AM	Bubbler valve closed
3/11/2011	1:04:15 AM	Main Vac valve opened
3/11/2011	1:04:15 AM	Bypass valve opened
3/11/2011	1:04:15 AM	Helium MFC set to  0.000000
3/11/2011	1:04:15 AM	H2 MFC set to  0.000000
3/11/2011	1:04:15 AM	BCl3 MFC set to  0.000000
3/11/2011	1:04:15 AM	PHl3 MFC set to  0.000000
3/11/2011	1:04:15 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:04:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:04:16 AM	Tube furnace set to 0
3/11/2011	1:04:39 AM	H2 valve closed
3/11/2011	1:04:39 AM	BCl3 valve closed
3/11/2011	1:04:39 AM	PH3 valve closed
3/11/2011	1:04:39 AM	SiCl4 pre valve closed
3/11/2011	1:04:39 AM	SiCl4 post valve closed
3/11/2011	1:04:39 AM	Bubbler valve closed
3/11/2011	1:04:39 AM	Helium valve opened
3/11/2011	1:04:39 AM	Main Vac valve opened
3/11/2011	1:04:39 AM	Bypass valve opened
3/11/2011	1:04:39 AM	Helium MFC set to  100.000000
3/11/2011	1:04:39 AM	H2 MFC set to  0.000000
3/11/2011	1:04:39 AM	BCl3 MFC set to  0.000000
3/11/2011	1:04:39 AM	PHl3 MFC set to  0.000000
3/11/2011	1:04:39 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:04:39 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:04:39 AM	Tube furnace set to 0
3/11/2011	1:04:39 AM	Helium valve closed
3/11/2011	1:04:39 AM	H2 valve closed
3/11/2011	1:04:39 AM	BCl3 valve closed
3/11/2011	1:04:39 AM	PH3 valve closed
3/11/2011	1:04:39 AM	SiCl4 pre valve closed
3/11/2011	1:04:39 AM	SiCl4 post valve closed
3/11/2011	1:04:39 AM	Bubbler valve closed
3/11/2011	1:04:39 AM	Main Vac valve opened
3/11/2011	1:04:39 AM	Bypass valve opened
3/11/2011	1:04:39 AM	Helium MFC set to  0.000000
3/11/2011	1:04:39 AM	H2 MFC set to  0.000000
3/11/2011	1:04:39 AM	BCl3 MFC set to  0.000000
3/11/2011	1:04:39 AM	PHl3 MFC set to  0.000000
3/11/2011	1:04:39 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:04:39 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:04:39 AM	Tube furnace set to 0
3/11/2011	1:04:40 AM	Run finished at 1:04 AM
3/11/2011	1:04:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	1:05:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	1:06:02 AM	Recipe started at 1:05 AM
3/11/2011	1:06:02 AM	Helium valve closed
3/11/2011	1:06:02 AM	H2 valve closed
3/11/2011	1:06:02 AM	BCl3 valve closed
3/11/2011	1:06:02 AM	PH3 valve closed
3/11/2011	1:06:02 AM	SiCl4 pre valve closed
3/11/2011	1:06:02 AM	SiCl4 post valve closed
3/11/2011	1:06:02 AM	Main Vac valve closed
3/11/2011	1:06:02 AM	Bubbler valve closed
3/11/2011	1:06:02 AM	Bypass valve opened
3/11/2011	1:06:02 AM	Helium MFC set to  0.000000
3/11/2011	1:06:02 AM	H2 MFC set to  0.000000
3/11/2011	1:06:02 AM	BCl3 MFC set to  0.000000
3/11/2011	1:06:02 AM	PHl3 MFC set to  0.000000
3/11/2011	1:06:02 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:06:02 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:06:02 AM	Tube furnace set to 0
3/11/2011	1:06:02 AM	Helium valve closed
3/11/2011	1:06:02 AM	H2 valve closed
3/11/2011	1:06:02 AM	BCl3 valve closed
3/11/2011	1:06:02 AM	PH3 valve closed
3/11/2011	1:06:02 AM	SiCl4 pre valve closed
3/11/2011	1:06:02 AM	SiCl4 post valve closed
3/11/2011	1:06:02 AM	Bubbler valve closed
3/11/2011	1:06:02 AM	Main Vac valve opened
3/11/2011	1:06:02 AM	Bypass valve opened
3/11/2011	1:06:02 AM	Helium MFC set to  0.000000
3/11/2011	1:06:02 AM	H2 MFC set to  0.000000
3/11/2011	1:06:02 AM	BCl3 MFC set to  0.000000
3/11/2011	1:06:02 AM	PHl3 MFC set to  0.000000
3/11/2011	1:06:02 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:06:02 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:06:02 AM	Tube furnace set to 0
3/11/2011	1:07:02 AM	H2 valve closed
3/11/2011	1:07:02 AM	BCl3 valve closed
3/11/2011	1:07:02 AM	PH3 valve closed
3/11/2011	1:07:02 AM	SiCl4 pre valve closed
3/11/2011	1:07:02 AM	SiCl4 post valve closed
3/11/2011	1:07:02 AM	Bubbler valve closed
3/11/2011	1:07:02 AM	Helium valve opened
3/11/2011	1:07:02 AM	Main Vac valve opened
3/11/2011	1:07:02 AM	Bypass valve opened
3/11/2011	1:07:02 AM	Helium MFC set to  100.000000
3/11/2011	1:07:02 AM	H2 MFC set to  0.000000
3/11/2011	1:07:02 AM	BCl3 MFC set to  0.000000
3/11/2011	1:07:02 AM	PHl3 MFC set to  0.000000
3/11/2011	1:07:02 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:07:02 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:07:03 AM	Tube furnace set to 0
3/11/2011	1:08:03 AM	Helium valve closed
3/11/2011	1:08:03 AM	H2 valve closed
3/11/2011	1:08:03 AM	BCl3 valve closed
3/11/2011	1:08:03 AM	PH3 valve closed
3/11/2011	1:08:03 AM	SiCl4 pre valve closed
3/11/2011	1:08:03 AM	SiCl4 post valve closed
3/11/2011	1:08:03 AM	Bubbler valve closed
3/11/2011	1:08:03 AM	Main Vac valve opened
3/11/2011	1:08:03 AM	Bypass valve opened
3/11/2011	1:08:03 AM	Helium MFC set to  0.000000
3/11/2011	1:08:03 AM	H2 MFC set to  0.000000
3/11/2011	1:08:03 AM	BCl3 MFC set to  0.000000
3/11/2011	1:08:03 AM	PHl3 MFC set to  0.000000
3/11/2011	1:08:03 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:08:03 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:08:03 AM	Tube furnace set to 0
3/11/2011	1:09:03 AM	H2 valve closed
3/11/2011	1:09:03 AM	BCl3 valve closed
3/11/2011	1:09:03 AM	PH3 valve closed
3/11/2011	1:09:03 AM	SiCl4 pre valve closed
3/11/2011	1:09:03 AM	SiCl4 post valve closed
3/11/2011	1:09:03 AM	Bubbler valve closed
3/11/2011	1:09:03 AM	Helium valve opened
3/11/2011	1:09:03 AM	Main Vac valve opened
3/11/2011	1:09:03 AM	Bypass valve opened
3/11/2011	1:09:03 AM	Helium MFC set to  100.000000
3/11/2011	1:09:03 AM	H2 MFC set to  0.000000
3/11/2011	1:09:03 AM	BCl3 MFC set to  0.000000
3/11/2011	1:09:03 AM	PHl3 MFC set to  0.000000
3/11/2011	1:09:03 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:09:03 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:09:03 AM	Tube furnace set to 0
3/11/2011	1:10:03 AM	Helium valve closed
3/11/2011	1:10:03 AM	H2 valve closed
3/11/2011	1:10:03 AM	BCl3 valve closed
3/11/2011	1:10:03 AM	PH3 valve closed
3/11/2011	1:10:03 AM	SiCl4 pre valve closed
3/11/2011	1:10:03 AM	SiCl4 post valve closed
3/11/2011	1:10:03 AM	Bubbler valve closed
3/11/2011	1:10:03 AM	Main Vac valve opened
3/11/2011	1:10:03 AM	Bypass valve opened
3/11/2011	1:10:03 AM	Helium MFC set to  0.000000
3/11/2011	1:10:03 AM	H2 MFC set to  0.000000
3/11/2011	1:10:03 AM	BCl3 MFC set to  0.000000
3/11/2011	1:10:03 AM	PHl3 MFC set to  0.000000
3/11/2011	1:10:03 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:10:03 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:10:03 AM	Tube furnace set to 0
3/11/2011	1:11:03 AM	H2 valve closed
3/11/2011	1:11:03 AM	BCl3 valve closed
3/11/2011	1:11:03 AM	PH3 valve closed
3/11/2011	1:11:03 AM	SiCl4 pre valve closed
3/11/2011	1:11:03 AM	SiCl4 post valve closed
3/11/2011	1:11:03 AM	Bubbler valve closed
3/11/2011	1:11:03 AM	Helium valve opened
3/11/2011	1:11:03 AM	Main Vac valve opened
3/11/2011	1:11:03 AM	Bypass valve opened
3/11/2011	1:11:03 AM	Helium MFC set to  100.000000
3/11/2011	1:11:03 AM	H2 MFC set to  0.000000
3/11/2011	1:11:03 AM	BCl3 MFC set to  0.000000
3/11/2011	1:11:03 AM	PHl3 MFC set to  0.000000
3/11/2011	1:11:03 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:11:03 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:11:03 AM	Tube furnace set to 0
3/11/2011	1:12:03 AM	Helium valve closed
3/11/2011	1:12:03 AM	H2 valve closed
3/11/2011	1:12:03 AM	BCl3 valve closed
3/11/2011	1:12:03 AM	PH3 valve closed
3/11/2011	1:12:03 AM	SiCl4 pre valve closed
3/11/2011	1:12:03 AM	SiCl4 post valve closed
3/11/2011	1:12:03 AM	Bubbler valve closed
3/11/2011	1:12:03 AM	Main Vac valve opened
3/11/2011	1:12:03 AM	Bypass valve opened
3/11/2011	1:12:03 AM	Helium MFC set to  0.000000
3/11/2011	1:12:03 AM	H2 MFC set to  0.000000
3/11/2011	1:12:03 AM	BCl3 MFC set to  0.000000
3/11/2011	1:12:03 AM	PHl3 MFC set to  0.000000
3/11/2011	1:12:03 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:12:03 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:12:04 AM	Tube furnace set to 0
3/11/2011	1:13:04 AM	H2 valve closed
3/11/2011	1:13:04 AM	BCl3 valve closed
3/11/2011	1:13:04 AM	PH3 valve closed
3/11/2011	1:13:04 AM	SiCl4 pre valve closed
3/11/2011	1:13:04 AM	SiCl4 post valve closed
3/11/2011	1:13:04 AM	Bubbler valve closed
3/11/2011	1:13:04 AM	Helium valve opened
3/11/2011	1:13:04 AM	Main Vac valve opened
3/11/2011	1:13:04 AM	Bypass valve opened
3/11/2011	1:13:04 AM	Helium MFC set to  100.000000
3/11/2011	1:13:04 AM	H2 MFC set to  0.000000
3/11/2011	1:13:04 AM	BCl3 MFC set to  0.000000
3/11/2011	1:13:04 AM	PHl3 MFC set to  0.000000
3/11/2011	1:13:04 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:13:04 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:13:04 AM	Tube furnace set to 0
3/11/2011	1:14:04 AM	Helium valve closed
3/11/2011	1:14:04 AM	H2 valve closed
3/11/2011	1:14:04 AM	BCl3 valve closed
3/11/2011	1:14:04 AM	PH3 valve closed
3/11/2011	1:14:04 AM	SiCl4 pre valve closed
3/11/2011	1:14:04 AM	SiCl4 post valve closed
3/11/2011	1:14:04 AM	Bubbler valve closed
3/11/2011	1:14:04 AM	Main Vac valve opened
3/11/2011	1:14:04 AM	Bypass valve opened
3/11/2011	1:14:04 AM	Helium MFC set to  0.000000
3/11/2011	1:14:04 AM	H2 MFC set to  0.000000
3/11/2011	1:14:04 AM	BCl3 MFC set to  0.000000
3/11/2011	1:14:04 AM	PHl3 MFC set to  0.000000
3/11/2011	1:14:04 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:14:04 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:14:04 AM	Tube furnace set to 0
3/11/2011	1:15:04 AM	H2 valve closed
3/11/2011	1:15:04 AM	BCl3 valve closed
3/11/2011	1:15:04 AM	PH3 valve closed
3/11/2011	1:15:04 AM	SiCl4 pre valve closed
3/11/2011	1:15:04 AM	SiCl4 post valve closed
3/11/2011	1:15:04 AM	Bubbler valve closed
3/11/2011	1:15:04 AM	Helium valve opened
3/11/2011	1:15:04 AM	Main Vac valve opened
3/11/2011	1:15:04 AM	Bypass valve opened
3/11/2011	1:15:04 AM	Helium MFC set to  100.000000
3/11/2011	1:15:04 AM	H2 MFC set to  0.000000
3/11/2011	1:15:04 AM	BCl3 MFC set to  0.000000
3/11/2011	1:15:04 AM	PHl3 MFC set to  0.000000
3/11/2011	1:15:04 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:15:04 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:15:04 AM	Tube furnace set to 0
3/11/2011	1:16:04 AM	Helium valve closed
3/11/2011	1:16:04 AM	H2 valve closed
3/11/2011	1:16:04 AM	BCl3 valve closed
3/11/2011	1:16:04 AM	PH3 valve closed
3/11/2011	1:16:04 AM	SiCl4 pre valve closed
3/11/2011	1:16:04 AM	SiCl4 post valve closed
3/11/2011	1:16:04 AM	Bubbler valve closed
3/11/2011	1:16:04 AM	Main Vac valve opened
3/11/2011	1:16:04 AM	Bypass valve opened
3/11/2011	1:16:04 AM	Helium MFC set to  0.000000
3/11/2011	1:16:04 AM	H2 MFC set to  0.000000
3/11/2011	1:16:04 AM	BCl3 MFC set to  0.000000
3/11/2011	1:16:04 AM	PHl3 MFC set to  0.000000
3/11/2011	1:16:04 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:16:04 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:16:04 AM	Tube furnace set to 0
3/11/2011	1:17:04 AM	H2 valve closed
3/11/2011	1:17:04 AM	BCl3 valve closed
3/11/2011	1:17:04 AM	PH3 valve closed
3/11/2011	1:17:04 AM	SiCl4 pre valve closed
3/11/2011	1:17:04 AM	SiCl4 post valve closed
3/11/2011	1:17:04 AM	Bubbler valve closed
3/11/2011	1:17:04 AM	Helium valve opened
3/11/2011	1:17:04 AM	Main Vac valve opened
3/11/2011	1:17:04 AM	Bypass valve opened
3/11/2011	1:17:04 AM	Helium MFC set to  100.000000
3/11/2011	1:17:04 AM	H2 MFC set to  0.000000
3/11/2011	1:17:04 AM	BCl3 MFC set to  0.000000
3/11/2011	1:17:04 AM	PHl3 MFC set to  0.000000
3/11/2011	1:17:04 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:17:04 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:17:05 AM	Tube furnace set to 0
3/11/2011	1:18:05 AM	Helium valve closed
3/11/2011	1:18:05 AM	H2 valve closed
3/11/2011	1:18:05 AM	BCl3 valve closed
3/11/2011	1:18:05 AM	PH3 valve closed
3/11/2011	1:18:05 AM	SiCl4 pre valve closed
3/11/2011	1:18:05 AM	SiCl4 post valve closed
3/11/2011	1:18:05 AM	Bubbler valve closed
3/11/2011	1:18:05 AM	Main Vac valve opened
3/11/2011	1:18:05 AM	Bypass valve opened
3/11/2011	1:18:05 AM	Helium MFC set to  0.000000
3/11/2011	1:18:05 AM	H2 MFC set to  0.000000
3/11/2011	1:18:05 AM	BCl3 MFC set to  0.000000
3/11/2011	1:18:05 AM	PHl3 MFC set to  0.000000
3/11/2011	1:18:05 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:18:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:18:05 AM	Tube furnace set to 0
3/11/2011	1:19:05 AM	H2 valve closed
3/11/2011	1:19:05 AM	BCl3 valve closed
3/11/2011	1:19:05 AM	PH3 valve closed
3/11/2011	1:19:05 AM	SiCl4 pre valve closed
3/11/2011	1:19:05 AM	SiCl4 post valve closed
3/11/2011	1:19:05 AM	Bubbler valve closed
3/11/2011	1:19:05 AM	Helium valve opened
3/11/2011	1:19:05 AM	Main Vac valve opened
3/11/2011	1:19:05 AM	Bypass valve opened
3/11/2011	1:19:05 AM	Helium MFC set to  100.000000
3/11/2011	1:19:05 AM	H2 MFC set to  0.000000
3/11/2011	1:19:05 AM	BCl3 MFC set to  0.000000
3/11/2011	1:19:05 AM	PHl3 MFC set to  0.000000
3/11/2011	1:19:05 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:19:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:19:05 AM	Tube furnace set to 0
3/11/2011	1:20:05 AM	Helium valve closed
3/11/2011	1:20:05 AM	H2 valve closed
3/11/2011	1:20:05 AM	BCl3 valve closed
3/11/2011	1:20:05 AM	PH3 valve closed
3/11/2011	1:20:05 AM	SiCl4 pre valve closed
3/11/2011	1:20:05 AM	SiCl4 post valve closed
3/11/2011	1:20:05 AM	Bubbler valve closed
3/11/2011	1:20:05 AM	Main Vac valve opened
3/11/2011	1:20:05 AM	Bypass valve opened
3/11/2011	1:20:05 AM	Helium MFC set to  0.000000
3/11/2011	1:20:05 AM	H2 MFC set to  0.000000
3/11/2011	1:20:05 AM	BCl3 MFC set to  0.000000
3/11/2011	1:20:05 AM	PHl3 MFC set to  0.000000
3/11/2011	1:20:05 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:20:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:20:05 AM	Tube furnace set to 0
3/11/2011	1:21:05 AM	H2 valve closed
3/11/2011	1:21:05 AM	BCl3 valve closed
3/11/2011	1:21:05 AM	PH3 valve closed
3/11/2011	1:21:05 AM	SiCl4 pre valve closed
3/11/2011	1:21:05 AM	SiCl4 post valve closed
3/11/2011	1:21:05 AM	Bubbler valve closed
3/11/2011	1:21:05 AM	Helium valve opened
3/11/2011	1:21:05 AM	Main Vac valve opened
3/11/2011	1:21:05 AM	Bypass valve opened
3/11/2011	1:21:05 AM	Helium MFC set to  100.000000
3/11/2011	1:21:05 AM	H2 MFC set to  0.000000
3/11/2011	1:21:05 AM	BCl3 MFC set to  0.000000
3/11/2011	1:21:05 AM	PHl3 MFC set to  0.000000
3/11/2011	1:21:05 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:21:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:21:05 AM	Tube furnace set to 0
3/11/2011	1:22:05 AM	Helium valve closed
3/11/2011	1:22:05 AM	H2 valve closed
3/11/2011	1:22:05 AM	BCl3 valve closed
3/11/2011	1:22:05 AM	PH3 valve closed
3/11/2011	1:22:05 AM	SiCl4 pre valve closed
3/11/2011	1:22:05 AM	SiCl4 post valve closed
3/11/2011	1:22:05 AM	Bubbler valve closed
3/11/2011	1:22:05 AM	Main Vac valve opened
3/11/2011	1:22:05 AM	Bypass valve opened
3/11/2011	1:22:05 AM	Helium MFC set to  0.000000
3/11/2011	1:22:05 AM	H2 MFC set to  0.000000
3/11/2011	1:22:05 AM	BCl3 MFC set to  0.000000
3/11/2011	1:22:05 AM	PHl3 MFC set to  0.000000
3/11/2011	1:22:05 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:22:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:22:06 AM	Tube furnace set to 0
3/11/2011	1:23:06 AM	H2 valve closed
3/11/2011	1:23:06 AM	BCl3 valve closed
3/11/2011	1:23:06 AM	PH3 valve closed
3/11/2011	1:23:06 AM	SiCl4 pre valve closed
3/11/2011	1:23:06 AM	SiCl4 post valve closed
3/11/2011	1:23:06 AM	Bubbler valve closed
3/11/2011	1:23:06 AM	Helium valve opened
3/11/2011	1:23:06 AM	Main Vac valve opened
3/11/2011	1:23:06 AM	Bypass valve opened
3/11/2011	1:23:06 AM	Helium MFC set to  100.000000
3/11/2011	1:23:06 AM	H2 MFC set to  0.000000
3/11/2011	1:23:06 AM	BCl3 MFC set to  0.000000
3/11/2011	1:23:06 AM	PHl3 MFC set to  0.000000
3/11/2011	1:23:06 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:23:06 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:23:06 AM	Tube furnace set to 0
3/11/2011	1:24:06 AM	Helium valve closed
3/11/2011	1:24:06 AM	H2 valve closed
3/11/2011	1:24:06 AM	BCl3 valve closed
3/11/2011	1:24:06 AM	PH3 valve closed
3/11/2011	1:24:06 AM	SiCl4 pre valve closed
3/11/2011	1:24:06 AM	SiCl4 post valve closed
3/11/2011	1:24:06 AM	Bubbler valve closed
3/11/2011	1:24:06 AM	Main Vac valve opened
3/11/2011	1:24:06 AM	Bypass valve opened
3/11/2011	1:24:06 AM	Helium MFC set to  0.000000
3/11/2011	1:24:06 AM	H2 MFC set to  0.000000
3/11/2011	1:24:06 AM	BCl3 MFC set to  0.000000
3/11/2011	1:24:06 AM	PHl3 MFC set to  0.000000
3/11/2011	1:24:06 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:24:06 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:24:06 AM	Tube furnace set to 0
3/11/2011	1:25:06 AM	H2 valve closed
3/11/2011	1:25:06 AM	BCl3 valve closed
3/11/2011	1:25:06 AM	PH3 valve closed
3/11/2011	1:25:06 AM	SiCl4 pre valve closed
3/11/2011	1:25:06 AM	SiCl4 post valve closed
3/11/2011	1:25:06 AM	Bubbler valve closed
3/11/2011	1:25:06 AM	Helium valve opened
3/11/2011	1:25:06 AM	Main Vac valve opened
3/11/2011	1:25:06 AM	Bypass valve opened
3/11/2011	1:25:06 AM	Helium MFC set to  100.000000
3/11/2011	1:25:06 AM	H2 MFC set to  0.000000
3/11/2011	1:25:06 AM	BCl3 MFC set to  0.000000
3/11/2011	1:25:06 AM	PHl3 MFC set to  0.000000
3/11/2011	1:25:06 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:25:06 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:25:06 AM	Tube furnace set to 0
3/11/2011	1:26:06 AM	Helium valve closed
3/11/2011	1:26:06 AM	H2 valve closed
3/11/2011	1:26:06 AM	BCl3 valve closed
3/11/2011	1:26:06 AM	PH3 valve closed
3/11/2011	1:26:06 AM	SiCl4 pre valve closed
3/11/2011	1:26:06 AM	SiCl4 post valve closed
3/11/2011	1:26:06 AM	Bubbler valve closed
3/11/2011	1:26:06 AM	Main Vac valve opened
3/11/2011	1:26:06 AM	Bypass valve opened
3/11/2011	1:26:06 AM	Helium MFC set to  0.000000
3/11/2011	1:26:06 AM	H2 MFC set to  0.000000
3/11/2011	1:26:06 AM	BCl3 MFC set to  0.000000
3/11/2011	1:26:06 AM	PHl3 MFC set to  0.000000
3/11/2011	1:26:06 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:26:06 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:26:06 AM	Tube furnace set to 0
3/11/2011	1:26:07 AM	Run finished at 1:26 AM
3/11/2011	1:26:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	1:26:48 AM	Bypass valve closed
3/11/2011	1:26:49 AM	Main Vac valve closed
3/11/2011	1:26:57 AM	Bypass valve opened
3/11/2011	1:26:58 AM	Main Vac valve opened
3/11/2011	1:36:13 AM	Recipe started at 1:36 AM
3/11/2011	1:36:13 AM	Helium valve closed
3/11/2011	1:36:13 AM	BCl3 valve closed
3/11/2011	1:36:13 AM	PH3 valve closed
3/11/2011	1:36:13 AM	SiCl4 pre valve closed
3/11/2011	1:36:13 AM	SiCl4 post valve closed
3/11/2011	1:36:14 AM	Main Vac valve closed
3/11/2011	1:36:14 AM	Bypass valve closed
3/11/2011	1:36:14 AM	Bubbler valve closed
3/11/2011	1:36:14 AM	H2 valve opened
3/11/2011	1:36:14 AM	Helium MFC set to  0.000000
3/11/2011	1:36:14 AM	H2 MFC set to  500.000000
3/11/2011	1:36:14 AM	BCl3 MFC set to  0.000000
3/11/2011	1:36:14 AM	PHl3 MFC set to  0.000000
3/11/2011	1:36:14 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:36:14 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:36:14 AM	Tube furnace set to 0
3/11/2011	1:37:31 AM	Helium valve closed
3/11/2011	1:37:31 AM	BCl3 valve closed
3/11/2011	1:37:31 AM	PH3 valve closed
3/11/2011	1:37:31 AM	SiCl4 pre valve closed
3/11/2011	1:37:31 AM	SiCl4 post valve closed
3/11/2011	1:37:31 AM	Main Vac valve closed
3/11/2011	1:37:31 AM	Bypass valve closed
3/11/2011	1:37:31 AM	H2 valve opened
3/11/2011	1:37:31 AM	Bubbler valve opened
3/11/2011	1:37:31 AM	Helium MFC set to  0.000000
3/11/2011	1:37:31 AM	H2 MFC set to  500.000000
3/11/2011	1:37:31 AM	BCl3 MFC set to  0.000000
3/11/2011	1:37:31 AM	PHl3 MFC set to  0.000000
3/11/2011	1:37:31 AM	SiCl4 MFC set to  0.000000
3/11/2011	1:37:31 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:37:31 AM	Tube furnace set to 1000
3/11/2011	1:57:31 AM	Helium valve closed
3/11/2011	1:57:31 AM	BCl3 valve closed
3/11/2011	1:57:31 AM	Main Vac valve closed
3/11/2011	1:57:31 AM	Bypass valve closed
3/11/2011	1:57:31 AM	H2 valve opened
3/11/2011	1:57:31 AM	PH3 valve opened
3/11/2011	1:57:31 AM	SiCl4 pre valve opened
3/11/2011	1:57:31 AM	SiCl4 post valve opened
3/11/2011	1:57:31 AM	Bubbler valve opened
3/11/2011	1:57:31 AM	Helium MFC set to  0.000000
3/11/2011	1:57:31 AM	H2 MFC set to  500.000000
3/11/2011	1:57:31 AM	BCl3 MFC set to  0.000000
3/11/2011	1:57:31 AM	PHl3 MFC set to  3.000000
3/11/2011	1:57:31 AM	SiCl4 MFC set to  50.000000
3/11/2011	1:57:31 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:57:31 AM	Tube furnace set to 1000
3/11/2011	2:07:31 AM	H2 valve closed
3/11/2011	2:07:31 AM	BCl3 valve closed
3/11/2011	2:07:31 AM	PH3 valve closed
3/11/2011	2:07:31 AM	SiCl4 pre valve closed
3/11/2011	2:07:31 AM	SiCl4 post valve closed
3/11/2011	2:07:31 AM	Main Vac valve closed
3/11/2011	2:07:31 AM	Bypass valve closed
3/11/2011	2:07:31 AM	Helium valve opened
3/11/2011	2:07:31 AM	Bubbler valve opened
3/11/2011	2:07:31 AM	Helium MFC set to  500.000000
3/11/2011	2:07:31 AM	H2 MFC set to  0.000000
3/11/2011	2:07:31 AM	BCl3 MFC set to  0.000000
3/11/2011	2:07:31 AM	PHl3 MFC set to  0.000000
3/11/2011	2:07:31 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:07:31 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:07:32 AM	Tube furnace set to 0
3/11/2011	2:27:32 AM	Helium valve closed
3/11/2011	2:27:32 AM	H2 valve closed
3/11/2011	2:27:32 AM	BCl3 valve closed
3/11/2011	2:27:32 AM	PH3 valve closed
3/11/2011	2:27:32 AM	SiCl4 pre valve closed
3/11/2011	2:27:32 AM	SiCl4 post valve closed
3/11/2011	2:27:32 AM	Main Vac valve closed
3/11/2011	2:27:32 AM	Bypass valve closed
3/11/2011	2:27:32 AM	Bubbler valve closed
3/11/2011	2:27:32 AM	Helium MFC set to  0.000000
3/11/2011	2:27:32 AM	H2 MFC set to  0.000000
3/11/2011	2:27:32 AM	BCl3 MFC set to  0.000000
3/11/2011	2:27:32 AM	PHl3 MFC set to  0.000000
3/11/2011	2:27:32 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:27:32 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:27:32 AM	Tube furnace set to 0
3/11/2011	2:27:32 AM	Run finished at 2:27 AM
3/11/2011	2:32:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2011	2:32:05 AM	Recipe started at 2:32 AM
3/11/2011	2:32:05 AM	H2 valve closed
3/11/2011	2:32:05 AM	BCl3 valve closed
3/11/2011	2:32:05 AM	PH3 valve closed
3/11/2011	2:32:05 AM	SiCl4 pre valve closed
3/11/2011	2:32:05 AM	SiCl4 post valve closed
3/11/2011	2:32:05 AM	Main Vac valve closed
3/11/2011	2:32:05 AM	Bypass valve closed
3/11/2011	2:32:05 AM	Bubbler valve closed
3/11/2011	2:32:05 AM	Helium valve opened
3/11/2011	2:32:05 AM	Helium MFC set to  500.000000
3/11/2011	2:32:05 AM	H2 MFC set to  0.000000
3/11/2011	2:32:05 AM	BCl3 MFC set to  0.000000
3/11/2011	2:32:05 AM	PHl3 MFC set to  0.000000
3/11/2011	2:32:05 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:32:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:32:05 AM	Tube furnace set to 0
3/11/2011	2:32:08 AM	Helium valve closed
3/11/2011	2:32:08 AM	H2 valve closed
3/11/2011	2:32:08 AM	BCl3 valve closed
3/11/2011	2:32:08 AM	PH3 valve closed
3/11/2011	2:32:08 AM	SiCl4 pre valve closed
3/11/2011	2:32:08 AM	SiCl4 post valve closed
3/11/2011	2:32:08 AM	Main Vac valve closed
3/11/2011	2:32:08 AM	Bypass valve closed
3/11/2011	2:32:08 AM	Bubbler valve closed
3/11/2011	2:32:08 AM	Helium MFC set to  0.000000
3/11/2011	2:32:08 AM	H2 MFC set to  0.000000
3/11/2011	2:32:08 AM	BCl3 MFC set to  0.000000
3/11/2011	2:32:08 AM	PHl3 MFC set to  0.000000
3/11/2011	2:32:08 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:32:08 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:32:08 AM	Tube furnace set to 0
3/11/2011	2:32:08 AM	Run finished at 2:32 AM
3/11/2011	2:32:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2011	2:35:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2011	2:35:32 AM	Recipe started at 2:35 AM
3/11/2011	2:35:32 AM	Helium valve closed
3/11/2011	2:35:32 AM	H2 valve closed
3/11/2011	2:35:32 AM	BCl3 valve closed
3/11/2011	2:35:32 AM	PH3 valve closed
3/11/2011	2:35:32 AM	SiCl4 pre valve closed
3/11/2011	2:35:32 AM	SiCl4 post valve closed
3/11/2011	2:35:32 AM	Main Vac valve closed
3/11/2011	2:35:32 AM	Bubbler valve closed
3/11/2011	2:35:32 AM	Bypass valve opened
3/11/2011	2:35:32 AM	Helium MFC set to  0.000000
3/11/2011	2:35:32 AM	H2 MFC set to  0.000000
3/11/2011	2:35:32 AM	BCl3 MFC set to  0.000000
3/11/2011	2:35:32 AM	PHl3 MFC set to  0.000000
3/11/2011	2:35:32 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:35:32 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:35:32 AM	Tube furnace set to 0
3/11/2011	2:36:03 AM	Helium valve closed
3/11/2011	2:36:03 AM	H2 valve closed
3/11/2011	2:36:03 AM	BCl3 valve closed
3/11/2011	2:36:03 AM	PH3 valve closed
3/11/2011	2:36:03 AM	SiCl4 pre valve closed
3/11/2011	2:36:03 AM	SiCl4 post valve closed
3/11/2011	2:36:03 AM	Bubbler valve closed
3/11/2011	2:36:03 AM	Main Vac valve opened
3/11/2011	2:36:03 AM	Bypass valve opened
3/11/2011	2:36:03 AM	Helium MFC set to  0.000000
3/11/2011	2:36:03 AM	H2 MFC set to  0.000000
3/11/2011	2:36:03 AM	BCl3 MFC set to  0.000000
3/11/2011	2:36:03 AM	PHl3 MFC set to  0.000000
3/11/2011	2:36:03 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:36:03 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:36:03 AM	Tube furnace set to 0
3/11/2011	2:36:03 AM	Run finished at 2:36 AM
3/11/2011	2:36:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2011	2:36:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	2:36:42 AM	Recipe started at 2:36 AM
3/11/2011	2:36:42 AM	Helium valve closed
3/11/2011	2:36:42 AM	H2 valve closed
3/11/2011	2:36:42 AM	BCl3 valve closed
3/11/2011	2:36:42 AM	PH3 valve closed
3/11/2011	2:36:42 AM	SiCl4 pre valve closed
3/11/2011	2:36:42 AM	SiCl4 post valve closed
3/11/2011	2:36:42 AM	Main Vac valve closed
3/11/2011	2:36:42 AM	Bubbler valve closed
3/11/2011	2:36:42 AM	Bypass valve opened
3/11/2011	2:36:42 AM	Helium MFC set to  0.000000
3/11/2011	2:36:42 AM	H2 MFC set to  0.000000
3/11/2011	2:36:42 AM	BCl3 MFC set to  0.000000
3/11/2011	2:36:42 AM	PHl3 MFC set to  0.000000
3/11/2011	2:36:42 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:36:42 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:36:42 AM	Tube furnace set to 0
3/11/2011	2:36:43 AM	Helium valve closed
3/11/2011	2:36:43 AM	H2 valve closed
3/11/2011	2:36:43 AM	BCl3 valve closed
3/11/2011	2:36:43 AM	PH3 valve closed
3/11/2011	2:36:43 AM	SiCl4 pre valve closed
3/11/2011	2:36:43 AM	SiCl4 post valve closed
3/11/2011	2:36:43 AM	Bubbler valve closed
3/11/2011	2:36:43 AM	Main Vac valve opened
3/11/2011	2:36:43 AM	Bypass valve opened
3/11/2011	2:36:43 AM	Helium MFC set to  0.000000
3/11/2011	2:36:43 AM	H2 MFC set to  0.000000
3/11/2011	2:36:43 AM	BCl3 MFC set to  0.000000
3/11/2011	2:36:43 AM	PHl3 MFC set to  0.000000
3/11/2011	2:36:43 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:36:43 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:36:43 AM	Tube furnace set to 0
3/11/2011	2:37:43 AM	H2 valve closed
3/11/2011	2:37:43 AM	BCl3 valve closed
3/11/2011	2:37:43 AM	PH3 valve closed
3/11/2011	2:37:43 AM	SiCl4 pre valve closed
3/11/2011	2:37:43 AM	SiCl4 post valve closed
3/11/2011	2:37:43 AM	Bubbler valve closed
3/11/2011	2:37:43 AM	Helium valve opened
3/11/2011	2:37:43 AM	Main Vac valve opened
3/11/2011	2:37:43 AM	Bypass valve opened
3/11/2011	2:37:43 AM	Helium MFC set to  100.000000
3/11/2011	2:37:43 AM	H2 MFC set to  0.000000
3/11/2011	2:37:43 AM	BCl3 MFC set to  0.000000
3/11/2011	2:37:43 AM	PHl3 MFC set to  0.000000
3/11/2011	2:37:43 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:37:43 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:37:43 AM	Tube furnace set to 0
3/11/2011	2:38:43 AM	Helium valve closed
3/11/2011	2:38:43 AM	H2 valve closed
3/11/2011	2:38:43 AM	BCl3 valve closed
3/11/2011	2:38:43 AM	PH3 valve closed
3/11/2011	2:38:43 AM	SiCl4 pre valve closed
3/11/2011	2:38:43 AM	SiCl4 post valve closed
3/11/2011	2:38:43 AM	Bubbler valve closed
3/11/2011	2:38:43 AM	Main Vac valve opened
3/11/2011	2:38:43 AM	Bypass valve opened
3/11/2011	2:38:43 AM	Helium MFC set to  0.000000
3/11/2011	2:38:43 AM	H2 MFC set to  0.000000
3/11/2011	2:38:43 AM	BCl3 MFC set to  0.000000
3/11/2011	2:38:43 AM	PHl3 MFC set to  0.000000
3/11/2011	2:38:43 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:38:43 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:38:43 AM	Tube furnace set to 0
3/11/2011	2:39:43 AM	H2 valve closed
3/11/2011	2:39:43 AM	BCl3 valve closed
3/11/2011	2:39:43 AM	PH3 valve closed
3/11/2011	2:39:43 AM	SiCl4 pre valve closed
3/11/2011	2:39:43 AM	SiCl4 post valve closed
3/11/2011	2:39:43 AM	Bubbler valve closed
3/11/2011	2:39:43 AM	Helium valve opened
3/11/2011	2:39:43 AM	Main Vac valve opened
3/11/2011	2:39:43 AM	Bypass valve opened
3/11/2011	2:39:43 AM	Helium MFC set to  100.000000
3/11/2011	2:39:43 AM	H2 MFC set to  0.000000
3/11/2011	2:39:43 AM	BCl3 MFC set to  0.000000
3/11/2011	2:39:43 AM	PHl3 MFC set to  0.000000
3/11/2011	2:39:43 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:39:43 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:39:44 AM	Tube furnace set to 0
3/11/2011	2:40:44 AM	Helium valve closed
3/11/2011	2:40:44 AM	H2 valve closed
3/11/2011	2:40:44 AM	BCl3 valve closed
3/11/2011	2:40:44 AM	PH3 valve closed
3/11/2011	2:40:44 AM	SiCl4 pre valve closed
3/11/2011	2:40:44 AM	SiCl4 post valve closed
3/11/2011	2:40:44 AM	Bubbler valve closed
3/11/2011	2:40:44 AM	Main Vac valve opened
3/11/2011	2:40:44 AM	Bypass valve opened
3/11/2011	2:40:44 AM	Helium MFC set to  0.000000
3/11/2011	2:40:44 AM	H2 MFC set to  0.000000
3/11/2011	2:40:44 AM	BCl3 MFC set to  0.000000
3/11/2011	2:40:44 AM	PHl3 MFC set to  0.000000
3/11/2011	2:40:44 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:40:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:40:44 AM	Tube furnace set to 0
3/11/2011	2:41:44 AM	H2 valve closed
3/11/2011	2:41:44 AM	BCl3 valve closed
3/11/2011	2:41:44 AM	PH3 valve closed
3/11/2011	2:41:44 AM	SiCl4 pre valve closed
3/11/2011	2:41:44 AM	SiCl4 post valve closed
3/11/2011	2:41:44 AM	Bubbler valve closed
3/11/2011	2:41:44 AM	Helium valve opened
3/11/2011	2:41:44 AM	Main Vac valve opened
3/11/2011	2:41:44 AM	Bypass valve opened
3/11/2011	2:41:44 AM	Helium MFC set to  100.000000
3/11/2011	2:41:44 AM	H2 MFC set to  0.000000
3/11/2011	2:41:44 AM	BCl3 MFC set to  0.000000
3/11/2011	2:41:44 AM	PHl3 MFC set to  0.000000
3/11/2011	2:41:44 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:41:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:41:44 AM	Tube furnace set to 0
3/11/2011	2:42:44 AM	Helium valve closed
3/11/2011	2:42:44 AM	H2 valve closed
3/11/2011	2:42:44 AM	BCl3 valve closed
3/11/2011	2:42:44 AM	PH3 valve closed
3/11/2011	2:42:44 AM	SiCl4 pre valve closed
3/11/2011	2:42:44 AM	SiCl4 post valve closed
3/11/2011	2:42:44 AM	Bubbler valve closed
3/11/2011	2:42:44 AM	Main Vac valve opened
3/11/2011	2:42:44 AM	Bypass valve opened
3/11/2011	2:42:44 AM	Helium MFC set to  0.000000
3/11/2011	2:42:44 AM	H2 MFC set to  0.000000
3/11/2011	2:42:44 AM	BCl3 MFC set to  0.000000
3/11/2011	2:42:44 AM	PHl3 MFC set to  0.000000
3/11/2011	2:42:44 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:42:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:42:44 AM	Tube furnace set to 0
3/11/2011	2:43:44 AM	H2 valve closed
3/11/2011	2:43:44 AM	BCl3 valve closed
3/11/2011	2:43:44 AM	PH3 valve closed
3/11/2011	2:43:44 AM	SiCl4 pre valve closed
3/11/2011	2:43:44 AM	SiCl4 post valve closed
3/11/2011	2:43:44 AM	Bubbler valve closed
3/11/2011	2:43:44 AM	Helium valve opened
3/11/2011	2:43:44 AM	Main Vac valve opened
3/11/2011	2:43:44 AM	Bypass valve opened
3/11/2011	2:43:44 AM	Helium MFC set to  100.000000
3/11/2011	2:43:44 AM	H2 MFC set to  0.000000
3/11/2011	2:43:44 AM	BCl3 MFC set to  0.000000
3/11/2011	2:43:44 AM	PHl3 MFC set to  0.000000
3/11/2011	2:43:44 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:43:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:43:44 AM	Tube furnace set to 0
3/11/2011	2:44:44 AM	Helium valve closed
3/11/2011	2:44:44 AM	H2 valve closed
3/11/2011	2:44:44 AM	BCl3 valve closed
3/11/2011	2:44:44 AM	PH3 valve closed
3/11/2011	2:44:44 AM	SiCl4 pre valve closed
3/11/2011	2:44:44 AM	SiCl4 post valve closed
3/11/2011	2:44:44 AM	Bubbler valve closed
3/11/2011	2:44:44 AM	Main Vac valve opened
3/11/2011	2:44:44 AM	Bypass valve opened
3/11/2011	2:44:44 AM	Helium MFC set to  0.000000
3/11/2011	2:44:44 AM	H2 MFC set to  0.000000
3/11/2011	2:44:44 AM	BCl3 MFC set to  0.000000
3/11/2011	2:44:44 AM	PHl3 MFC set to  0.000000
3/11/2011	2:44:44 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:44:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:44:44 AM	Tube furnace set to 0
3/11/2011	2:45:45 AM	H2 valve closed
3/11/2011	2:45:45 AM	BCl3 valve closed
3/11/2011	2:45:45 AM	PH3 valve closed
3/11/2011	2:45:45 AM	SiCl4 pre valve closed
3/11/2011	2:45:45 AM	SiCl4 post valve closed
3/11/2011	2:45:45 AM	Bubbler valve closed
3/11/2011	2:45:45 AM	Helium valve opened
3/11/2011	2:45:45 AM	Main Vac valve opened
3/11/2011	2:45:45 AM	Bypass valve opened
3/11/2011	2:45:45 AM	Helium MFC set to  100.000000
3/11/2011	2:45:45 AM	H2 MFC set to  0.000000
3/11/2011	2:45:45 AM	BCl3 MFC set to  0.000000
3/11/2011	2:45:45 AM	PHl3 MFC set to  0.000000
3/11/2011	2:45:45 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:45:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:45:45 AM	Tube furnace set to 0
3/11/2011	2:46:45 AM	Helium valve closed
3/11/2011	2:46:45 AM	H2 valve closed
3/11/2011	2:46:45 AM	BCl3 valve closed
3/11/2011	2:46:45 AM	PH3 valve closed
3/11/2011	2:46:45 AM	SiCl4 pre valve closed
3/11/2011	2:46:45 AM	SiCl4 post valve closed
3/11/2011	2:46:45 AM	Bubbler valve closed
3/11/2011	2:46:45 AM	Main Vac valve opened
3/11/2011	2:46:45 AM	Bypass valve opened
3/11/2011	2:46:45 AM	Helium MFC set to  0.000000
3/11/2011	2:46:45 AM	H2 MFC set to  0.000000
3/11/2011	2:46:45 AM	BCl3 MFC set to  0.000000
3/11/2011	2:46:45 AM	PHl3 MFC set to  0.000000
3/11/2011	2:46:45 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:46:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:46:45 AM	Tube furnace set to 0
3/11/2011	2:47:45 AM	H2 valve closed
3/11/2011	2:47:45 AM	BCl3 valve closed
3/11/2011	2:47:45 AM	PH3 valve closed
3/11/2011	2:47:45 AM	SiCl4 pre valve closed
3/11/2011	2:47:45 AM	SiCl4 post valve closed
3/11/2011	2:47:45 AM	Bubbler valve closed
3/11/2011	2:47:45 AM	Helium valve opened
3/11/2011	2:47:45 AM	Main Vac valve opened
3/11/2011	2:47:45 AM	Bypass valve opened
3/11/2011	2:47:45 AM	Helium MFC set to  100.000000
3/11/2011	2:47:45 AM	H2 MFC set to  0.000000
3/11/2011	2:47:45 AM	BCl3 MFC set to  0.000000
3/11/2011	2:47:45 AM	PHl3 MFC set to  0.000000
3/11/2011	2:47:45 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:47:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:47:45 AM	Tube furnace set to 0
3/11/2011	2:48:45 AM	Helium valve closed
3/11/2011	2:48:45 AM	H2 valve closed
3/11/2011	2:48:45 AM	BCl3 valve closed
3/11/2011	2:48:45 AM	PH3 valve closed
3/11/2011	2:48:45 AM	SiCl4 pre valve closed
3/11/2011	2:48:45 AM	SiCl4 post valve closed
3/11/2011	2:48:45 AM	Bubbler valve closed
3/11/2011	2:48:45 AM	Main Vac valve opened
3/11/2011	2:48:45 AM	Bypass valve opened
3/11/2011	2:48:45 AM	Helium MFC set to  0.000000
3/11/2011	2:48:45 AM	H2 MFC set to  0.000000
3/11/2011	2:48:45 AM	BCl3 MFC set to  0.000000
3/11/2011	2:48:45 AM	PHl3 MFC set to  0.000000
3/11/2011	2:48:45 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:48:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:48:45 AM	Tube furnace set to 0
3/11/2011	2:49:45 AM	H2 valve closed
3/11/2011	2:49:45 AM	BCl3 valve closed
3/11/2011	2:49:45 AM	PH3 valve closed
3/11/2011	2:49:45 AM	SiCl4 pre valve closed
3/11/2011	2:49:45 AM	SiCl4 post valve closed
3/11/2011	2:49:45 AM	Bubbler valve closed
3/11/2011	2:49:45 AM	Helium valve opened
3/11/2011	2:49:45 AM	Main Vac valve opened
3/11/2011	2:49:45 AM	Bypass valve opened
3/11/2011	2:49:45 AM	Helium MFC set to  100.000000
3/11/2011	2:49:45 AM	H2 MFC set to  0.000000
3/11/2011	2:49:45 AM	BCl3 MFC set to  0.000000
3/11/2011	2:49:45 AM	PHl3 MFC set to  0.000000
3/11/2011	2:49:45 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:49:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:49:46 AM	Tube furnace set to 0
3/11/2011	2:50:46 AM	Helium valve closed
3/11/2011	2:50:46 AM	H2 valve closed
3/11/2011	2:50:46 AM	BCl3 valve closed
3/11/2011	2:50:46 AM	PH3 valve closed
3/11/2011	2:50:46 AM	SiCl4 pre valve closed
3/11/2011	2:50:46 AM	SiCl4 post valve closed
3/11/2011	2:50:46 AM	Bubbler valve closed
3/11/2011	2:50:46 AM	Main Vac valve opened
3/11/2011	2:50:46 AM	Bypass valve opened
3/11/2011	2:50:46 AM	Helium MFC set to  0.000000
3/11/2011	2:50:46 AM	H2 MFC set to  0.000000
3/11/2011	2:50:46 AM	BCl3 MFC set to  0.000000
3/11/2011	2:50:46 AM	PHl3 MFC set to  0.000000
3/11/2011	2:50:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:50:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:50:46 AM	Tube furnace set to 0
3/11/2011	2:51:46 AM	H2 valve closed
3/11/2011	2:51:46 AM	BCl3 valve closed
3/11/2011	2:51:46 AM	PH3 valve closed
3/11/2011	2:51:46 AM	SiCl4 pre valve closed
3/11/2011	2:51:46 AM	SiCl4 post valve closed
3/11/2011	2:51:46 AM	Bubbler valve closed
3/11/2011	2:51:46 AM	Helium valve opened
3/11/2011	2:51:46 AM	Main Vac valve opened
3/11/2011	2:51:46 AM	Bypass valve opened
3/11/2011	2:51:46 AM	Helium MFC set to  100.000000
3/11/2011	2:51:46 AM	H2 MFC set to  0.000000
3/11/2011	2:51:46 AM	BCl3 MFC set to  0.000000
3/11/2011	2:51:46 AM	PHl3 MFC set to  0.000000
3/11/2011	2:51:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:51:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:51:46 AM	Tube furnace set to 0
3/11/2011	2:52:46 AM	Helium valve closed
3/11/2011	2:52:46 AM	H2 valve closed
3/11/2011	2:52:46 AM	BCl3 valve closed
3/11/2011	2:52:46 AM	PH3 valve closed
3/11/2011	2:52:46 AM	SiCl4 pre valve closed
3/11/2011	2:52:46 AM	SiCl4 post valve closed
3/11/2011	2:52:46 AM	Bubbler valve closed
3/11/2011	2:52:46 AM	Main Vac valve opened
3/11/2011	2:52:46 AM	Bypass valve opened
3/11/2011	2:52:46 AM	Helium MFC set to  0.000000
3/11/2011	2:52:46 AM	H2 MFC set to  0.000000
3/11/2011	2:52:46 AM	BCl3 MFC set to  0.000000
3/11/2011	2:52:46 AM	PHl3 MFC set to  0.000000
3/11/2011	2:52:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:52:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:52:46 AM	Tube furnace set to 0
3/11/2011	2:53:46 AM	H2 valve closed
3/11/2011	2:53:46 AM	BCl3 valve closed
3/11/2011	2:53:46 AM	PH3 valve closed
3/11/2011	2:53:46 AM	SiCl4 pre valve closed
3/11/2011	2:53:46 AM	SiCl4 post valve closed
3/11/2011	2:53:46 AM	Bubbler valve closed
3/11/2011	2:53:46 AM	Helium valve opened
3/11/2011	2:53:46 AM	Main Vac valve opened
3/11/2011	2:53:46 AM	Bypass valve opened
3/11/2011	2:53:46 AM	Helium MFC set to  100.000000
3/11/2011	2:53:46 AM	H2 MFC set to  0.000000
3/11/2011	2:53:46 AM	BCl3 MFC set to  0.000000
3/11/2011	2:53:46 AM	PHl3 MFC set to  0.000000
3/11/2011	2:53:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:53:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:53:46 AM	Tube furnace set to 0
3/11/2011	2:54:46 AM	Helium valve closed
3/11/2011	2:54:46 AM	H2 valve closed
3/11/2011	2:54:46 AM	BCl3 valve closed
3/11/2011	2:54:46 AM	PH3 valve closed
3/11/2011	2:54:46 AM	SiCl4 pre valve closed
3/11/2011	2:54:46 AM	SiCl4 post valve closed
3/11/2011	2:54:46 AM	Bubbler valve closed
3/11/2011	2:54:46 AM	Main Vac valve opened
3/11/2011	2:54:46 AM	Bypass valve opened
3/11/2011	2:54:46 AM	Helium MFC set to  0.000000
3/11/2011	2:54:46 AM	H2 MFC set to  0.000000
3/11/2011	2:54:46 AM	BCl3 MFC set to  0.000000
3/11/2011	2:54:46 AM	PHl3 MFC set to  0.000000
3/11/2011	2:54:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:54:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:54:47 AM	Tube furnace set to 0
3/11/2011	2:55:15 AM	H2 valve closed
3/11/2011	2:55:15 AM	BCl3 valve closed
3/11/2011	2:55:15 AM	PH3 valve closed
3/11/2011	2:55:15 AM	SiCl4 pre valve closed
3/11/2011	2:55:15 AM	SiCl4 post valve closed
3/11/2011	2:55:15 AM	Bubbler valve closed
3/11/2011	2:55:15 AM	Helium valve opened
3/11/2011	2:55:15 AM	Main Vac valve opened
3/11/2011	2:55:15 AM	Bypass valve opened
3/11/2011	2:55:15 AM	Helium MFC set to  100.000000
3/11/2011	2:55:15 AM	H2 MFC set to  0.000000
3/11/2011	2:55:15 AM	BCl3 MFC set to  0.000000
3/11/2011	2:55:15 AM	PHl3 MFC set to  0.000000
3/11/2011	2:55:15 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:55:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:55:15 AM	Tube furnace set to 0
3/11/2011	2:55:15 AM	Helium valve closed
3/11/2011	2:55:15 AM	H2 valve closed
3/11/2011	2:55:15 AM	BCl3 valve closed
3/11/2011	2:55:15 AM	PH3 valve closed
3/11/2011	2:55:15 AM	SiCl4 pre valve closed
3/11/2011	2:55:15 AM	SiCl4 post valve closed
3/11/2011	2:55:15 AM	Bubbler valve closed
3/11/2011	2:55:15 AM	Main Vac valve opened
3/11/2011	2:55:15 AM	Bypass valve opened
3/11/2011	2:55:15 AM	Helium MFC set to  0.000000
3/11/2011	2:55:15 AM	H2 MFC set to  0.000000
3/11/2011	2:55:15 AM	BCl3 MFC set to  0.000000
3/11/2011	2:55:15 AM	PHl3 MFC set to  0.000000
3/11/2011	2:55:15 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:55:15 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:55:15 AM	Tube furnace set to 0
3/11/2011	2:55:16 AM	Run finished at 2:55 AM
3/11/2011	2:55:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	2:57:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	2:57:43 AM	Recipe started at 2:57 AM
3/11/2011	2:57:43 AM	Helium valve closed
3/11/2011	2:57:43 AM	H2 valve closed
3/11/2011	2:57:43 AM	BCl3 valve closed
3/11/2011	2:57:43 AM	PH3 valve closed
3/11/2011	2:57:43 AM	SiCl4 pre valve closed
3/11/2011	2:57:43 AM	SiCl4 post valve closed
3/11/2011	2:57:43 AM	Main Vac valve closed
3/11/2011	2:57:43 AM	Bubbler valve closed
3/11/2011	2:57:43 AM	Bypass valve opened
3/11/2011	2:57:43 AM	Helium MFC set to  0.000000
3/11/2011	2:57:43 AM	H2 MFC set to  0.000000
3/11/2011	2:57:43 AM	BCl3 MFC set to  0.000000
3/11/2011	2:57:43 AM	PHl3 MFC set to  0.000000
3/11/2011	2:57:43 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:57:43 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:57:43 AM	Tube furnace set to 0
3/11/2011	2:57:44 AM	Helium valve closed
3/11/2011	2:57:44 AM	H2 valve closed
3/11/2011	2:57:44 AM	BCl3 valve closed
3/11/2011	2:57:44 AM	PH3 valve closed
3/11/2011	2:57:44 AM	SiCl4 pre valve closed
3/11/2011	2:57:44 AM	SiCl4 post valve closed
3/11/2011	2:57:44 AM	Bubbler valve closed
3/11/2011	2:57:44 AM	Main Vac valve opened
3/11/2011	2:57:44 AM	Bypass valve opened
3/11/2011	2:57:44 AM	Helium MFC set to  0.000000
3/11/2011	2:57:44 AM	H2 MFC set to  0.000000
3/11/2011	2:57:44 AM	BCl3 MFC set to  0.000000
3/11/2011	2:57:44 AM	PHl3 MFC set to  0.000000
3/11/2011	2:57:44 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:57:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:57:44 AM	Tube furnace set to 0
3/11/2011	2:58:44 AM	H2 valve closed
3/11/2011	2:58:44 AM	BCl3 valve closed
3/11/2011	2:58:44 AM	PH3 valve closed
3/11/2011	2:58:44 AM	SiCl4 pre valve closed
3/11/2011	2:58:44 AM	SiCl4 post valve closed
3/11/2011	2:58:44 AM	Bubbler valve closed
3/11/2011	2:58:44 AM	Helium valve opened
3/11/2011	2:58:44 AM	Main Vac valve opened
3/11/2011	2:58:44 AM	Bypass valve opened
3/11/2011	2:58:44 AM	Helium MFC set to  100.000000
3/11/2011	2:58:44 AM	H2 MFC set to  0.000000
3/11/2011	2:58:44 AM	BCl3 MFC set to  0.000000
3/11/2011	2:58:44 AM	PHl3 MFC set to  0.000000
3/11/2011	2:58:44 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:58:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:58:44 AM	Tube furnace set to 0
3/11/2011	2:59:44 AM	Helium valve closed
3/11/2011	2:59:44 AM	H2 valve closed
3/11/2011	2:59:44 AM	BCl3 valve closed
3/11/2011	2:59:44 AM	PH3 valve closed
3/11/2011	2:59:44 AM	SiCl4 pre valve closed
3/11/2011	2:59:44 AM	SiCl4 post valve closed
3/11/2011	2:59:44 AM	Bubbler valve closed
3/11/2011	2:59:44 AM	Main Vac valve opened
3/11/2011	2:59:44 AM	Bypass valve opened
3/11/2011	2:59:44 AM	Helium MFC set to  0.000000
3/11/2011	2:59:44 AM	H2 MFC set to  0.000000
3/11/2011	2:59:44 AM	BCl3 MFC set to  0.000000
3/11/2011	2:59:44 AM	PHl3 MFC set to  0.000000
3/11/2011	2:59:44 AM	SiCl4 MFC set to  0.000000
3/11/2011	2:59:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:59:44 AM	Tube furnace set to 0
3/11/2011	3:00:44 AM	H2 valve closed
3/11/2011	3:00:44 AM	BCl3 valve closed
3/11/2011	3:00:44 AM	PH3 valve closed
3/11/2011	3:00:44 AM	SiCl4 pre valve closed
3/11/2011	3:00:44 AM	SiCl4 post valve closed
3/11/2011	3:00:44 AM	Bubbler valve closed
3/11/2011	3:00:44 AM	Helium valve opened
3/11/2011	3:00:44 AM	Main Vac valve opened
3/11/2011	3:00:44 AM	Bypass valve opened
3/11/2011	3:00:44 AM	Helium MFC set to  100.000000
3/11/2011	3:00:44 AM	H2 MFC set to  0.000000
3/11/2011	3:00:44 AM	BCl3 MFC set to  0.000000
3/11/2011	3:00:44 AM	PHl3 MFC set to  0.000000
3/11/2011	3:00:44 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:00:44 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:00:45 AM	Tube furnace set to 0
3/11/2011	3:01:45 AM	Helium valve closed
3/11/2011	3:01:45 AM	H2 valve closed
3/11/2011	3:01:45 AM	BCl3 valve closed
3/11/2011	3:01:45 AM	PH3 valve closed
3/11/2011	3:01:45 AM	SiCl4 pre valve closed
3/11/2011	3:01:45 AM	SiCl4 post valve closed
3/11/2011	3:01:45 AM	Bubbler valve closed
3/11/2011	3:01:45 AM	Main Vac valve opened
3/11/2011	3:01:45 AM	Bypass valve opened
3/11/2011	3:01:45 AM	Helium MFC set to  0.000000
3/11/2011	3:01:45 AM	H2 MFC set to  0.000000
3/11/2011	3:01:45 AM	BCl3 MFC set to  0.000000
3/11/2011	3:01:45 AM	PHl3 MFC set to  0.000000
3/11/2011	3:01:45 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:01:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:01:45 AM	Tube furnace set to 0
3/11/2011	3:02:45 AM	H2 valve closed
3/11/2011	3:02:45 AM	BCl3 valve closed
3/11/2011	3:02:45 AM	PH3 valve closed
3/11/2011	3:02:45 AM	SiCl4 pre valve closed
3/11/2011	3:02:45 AM	SiCl4 post valve closed
3/11/2011	3:02:45 AM	Bubbler valve closed
3/11/2011	3:02:45 AM	Helium valve opened
3/11/2011	3:02:45 AM	Main Vac valve opened
3/11/2011	3:02:45 AM	Bypass valve opened
3/11/2011	3:02:45 AM	Helium MFC set to  100.000000
3/11/2011	3:02:45 AM	H2 MFC set to  0.000000
3/11/2011	3:02:45 AM	BCl3 MFC set to  0.000000
3/11/2011	3:02:45 AM	PHl3 MFC set to  0.000000
3/11/2011	3:02:45 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:02:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:02:45 AM	Tube furnace set to 0
3/11/2011	3:03:45 AM	Helium valve closed
3/11/2011	3:03:45 AM	H2 valve closed
3/11/2011	3:03:45 AM	BCl3 valve closed
3/11/2011	3:03:45 AM	PH3 valve closed
3/11/2011	3:03:45 AM	SiCl4 pre valve closed
3/11/2011	3:03:45 AM	SiCl4 post valve closed
3/11/2011	3:03:45 AM	Bubbler valve closed
3/11/2011	3:03:45 AM	Main Vac valve opened
3/11/2011	3:03:45 AM	Bypass valve opened
3/11/2011	3:03:45 AM	Helium MFC set to  0.000000
3/11/2011	3:03:45 AM	H2 MFC set to  0.000000
3/11/2011	3:03:45 AM	BCl3 MFC set to  0.000000
3/11/2011	3:03:45 AM	PHl3 MFC set to  0.000000
3/11/2011	3:03:45 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:03:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:03:45 AM	Tube furnace set to 0
3/11/2011	3:04:45 AM	H2 valve closed
3/11/2011	3:04:45 AM	BCl3 valve closed
3/11/2011	3:04:45 AM	PH3 valve closed
3/11/2011	3:04:45 AM	SiCl4 pre valve closed
3/11/2011	3:04:45 AM	SiCl4 post valve closed
3/11/2011	3:04:45 AM	Bubbler valve closed
3/11/2011	3:04:45 AM	Helium valve opened
3/11/2011	3:04:45 AM	Main Vac valve opened
3/11/2011	3:04:45 AM	Bypass valve opened
3/11/2011	3:04:45 AM	Helium MFC set to  100.000000
3/11/2011	3:04:45 AM	H2 MFC set to  0.000000
3/11/2011	3:04:45 AM	BCl3 MFC set to  0.000000
3/11/2011	3:04:45 AM	PHl3 MFC set to  0.000000
3/11/2011	3:04:45 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:04:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:04:45 AM	Tube furnace set to 0
3/11/2011	3:05:45 AM	Helium valve closed
3/11/2011	3:05:45 AM	H2 valve closed
3/11/2011	3:05:45 AM	BCl3 valve closed
3/11/2011	3:05:45 AM	PH3 valve closed
3/11/2011	3:05:45 AM	SiCl4 pre valve closed
3/11/2011	3:05:45 AM	SiCl4 post valve closed
3/11/2011	3:05:45 AM	Bubbler valve closed
3/11/2011	3:05:45 AM	Main Vac valve opened
3/11/2011	3:05:45 AM	Bypass valve opened
3/11/2011	3:05:45 AM	Helium MFC set to  0.000000
3/11/2011	3:05:45 AM	H2 MFC set to  0.000000
3/11/2011	3:05:45 AM	BCl3 MFC set to  0.000000
3/11/2011	3:05:45 AM	PHl3 MFC set to  0.000000
3/11/2011	3:05:45 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:05:45 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:05:46 AM	Tube furnace set to 0
3/11/2011	3:06:46 AM	H2 valve closed
3/11/2011	3:06:46 AM	BCl3 valve closed
3/11/2011	3:06:46 AM	PH3 valve closed
3/11/2011	3:06:46 AM	SiCl4 pre valve closed
3/11/2011	3:06:46 AM	SiCl4 post valve closed
3/11/2011	3:06:46 AM	Bubbler valve closed
3/11/2011	3:06:46 AM	Helium valve opened
3/11/2011	3:06:46 AM	Main Vac valve opened
3/11/2011	3:06:46 AM	Bypass valve opened
3/11/2011	3:06:46 AM	Helium MFC set to  100.000000
3/11/2011	3:06:46 AM	H2 MFC set to  0.000000
3/11/2011	3:06:46 AM	BCl3 MFC set to  0.000000
3/11/2011	3:06:46 AM	PHl3 MFC set to  0.000000
3/11/2011	3:06:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:06:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:06:46 AM	Tube furnace set to 0
3/11/2011	3:07:46 AM	Helium valve closed
3/11/2011	3:07:46 AM	H2 valve closed
3/11/2011	3:07:46 AM	BCl3 valve closed
3/11/2011	3:07:46 AM	PH3 valve closed
3/11/2011	3:07:46 AM	SiCl4 pre valve closed
3/11/2011	3:07:46 AM	SiCl4 post valve closed
3/11/2011	3:07:46 AM	Bubbler valve closed
3/11/2011	3:07:46 AM	Main Vac valve opened
3/11/2011	3:07:46 AM	Bypass valve opened
3/11/2011	3:07:46 AM	Helium MFC set to  0.000000
3/11/2011	3:07:46 AM	H2 MFC set to  0.000000
3/11/2011	3:07:46 AM	BCl3 MFC set to  0.000000
3/11/2011	3:07:46 AM	PHl3 MFC set to  0.000000
3/11/2011	3:07:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:07:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:07:46 AM	Tube furnace set to 0
3/11/2011	3:08:46 AM	H2 valve closed
3/11/2011	3:08:46 AM	BCl3 valve closed
3/11/2011	3:08:46 AM	PH3 valve closed
3/11/2011	3:08:46 AM	SiCl4 pre valve closed
3/11/2011	3:08:46 AM	SiCl4 post valve closed
3/11/2011	3:08:46 AM	Bubbler valve closed
3/11/2011	3:08:46 AM	Helium valve opened
3/11/2011	3:08:46 AM	Main Vac valve opened
3/11/2011	3:08:46 AM	Bypass valve opened
3/11/2011	3:08:46 AM	Helium MFC set to  100.000000
3/11/2011	3:08:46 AM	H2 MFC set to  0.000000
3/11/2011	3:08:46 AM	BCl3 MFC set to  0.000000
3/11/2011	3:08:46 AM	PHl3 MFC set to  0.000000
3/11/2011	3:08:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:08:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:08:46 AM	Tube furnace set to 0
3/11/2011	3:09:46 AM	Helium valve closed
3/11/2011	3:09:46 AM	H2 valve closed
3/11/2011	3:09:46 AM	BCl3 valve closed
3/11/2011	3:09:46 AM	PH3 valve closed
3/11/2011	3:09:46 AM	SiCl4 pre valve closed
3/11/2011	3:09:46 AM	SiCl4 post valve closed
3/11/2011	3:09:46 AM	Bubbler valve closed
3/11/2011	3:09:46 AM	Main Vac valve opened
3/11/2011	3:09:46 AM	Bypass valve opened
3/11/2011	3:09:46 AM	Helium MFC set to  0.000000
3/11/2011	3:09:46 AM	H2 MFC set to  0.000000
3/11/2011	3:09:46 AM	BCl3 MFC set to  0.000000
3/11/2011	3:09:46 AM	PHl3 MFC set to  0.000000
3/11/2011	3:09:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:09:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:09:46 AM	Tube furnace set to 0
3/11/2011	3:10:46 AM	H2 valve closed
3/11/2011	3:10:46 AM	BCl3 valve closed
3/11/2011	3:10:46 AM	PH3 valve closed
3/11/2011	3:10:46 AM	SiCl4 pre valve closed
3/11/2011	3:10:46 AM	SiCl4 post valve closed
3/11/2011	3:10:46 AM	Bubbler valve closed
3/11/2011	3:10:46 AM	Helium valve opened
3/11/2011	3:10:46 AM	Main Vac valve opened
3/11/2011	3:10:46 AM	Bypass valve opened
3/11/2011	3:10:46 AM	Helium MFC set to  100.000000
3/11/2011	3:10:46 AM	H2 MFC set to  0.000000
3/11/2011	3:10:46 AM	BCl3 MFC set to  0.000000
3/11/2011	3:10:46 AM	PHl3 MFC set to  0.000000
3/11/2011	3:10:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:10:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:10:47 AM	Tube furnace set to 0
3/11/2011	3:11:04 AM	Helium valve closed
3/11/2011	3:11:04 AM	H2 valve closed
3/11/2011	3:11:04 AM	BCl3 valve closed
3/11/2011	3:11:04 AM	PH3 valve closed
3/11/2011	3:11:04 AM	SiCl4 pre valve closed
3/11/2011	3:11:04 AM	SiCl4 post valve closed
3/11/2011	3:11:04 AM	Bubbler valve closed
3/11/2011	3:11:04 AM	Main Vac valve opened
3/11/2011	3:11:04 AM	Bypass valve opened
3/11/2011	3:11:04 AM	Helium MFC set to  0.000000
3/11/2011	3:11:04 AM	H2 MFC set to  0.000000
3/11/2011	3:11:04 AM	BCl3 MFC set to  0.000000
3/11/2011	3:11:04 AM	PHl3 MFC set to  0.000000
3/11/2011	3:11:04 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:11:04 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:11:05 AM	Tube furnace set to 0
3/11/2011	3:11:05 AM	H2 valve closed
3/11/2011	3:11:05 AM	BCl3 valve closed
3/11/2011	3:11:05 AM	PH3 valve closed
3/11/2011	3:11:05 AM	SiCl4 pre valve closed
3/11/2011	3:11:05 AM	SiCl4 post valve closed
3/11/2011	3:11:05 AM	Bubbler valve closed
3/11/2011	3:11:05 AM	Helium valve opened
3/11/2011	3:11:05 AM	Main Vac valve opened
3/11/2011	3:11:05 AM	Bypass valve opened
3/11/2011	3:11:05 AM	Helium MFC set to  100.000000
3/11/2011	3:11:05 AM	H2 MFC set to  0.000000
3/11/2011	3:11:05 AM	BCl3 MFC set to  0.000000
3/11/2011	3:11:05 AM	PHl3 MFC set to  0.000000
3/11/2011	3:11:05 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:11:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:11:05 AM	Tube furnace set to 0
3/11/2011	3:12:05 AM	Helium valve closed
3/11/2011	3:12:05 AM	H2 valve closed
3/11/2011	3:12:05 AM	BCl3 valve closed
3/11/2011	3:12:05 AM	PH3 valve closed
3/11/2011	3:12:05 AM	SiCl4 pre valve closed
3/11/2011	3:12:05 AM	SiCl4 post valve closed
3/11/2011	3:12:05 AM	Bubbler valve closed
3/11/2011	3:12:05 AM	Main Vac valve opened
3/11/2011	3:12:05 AM	Bypass valve opened
3/11/2011	3:12:05 AM	Helium MFC set to  0.000000
3/11/2011	3:12:05 AM	H2 MFC set to  0.000000
3/11/2011	3:12:05 AM	BCl3 MFC set to  0.000000
3/11/2011	3:12:05 AM	PHl3 MFC set to  0.000000
3/11/2011	3:12:05 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:12:05 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:12:06 AM	Tube furnace set to 0
3/11/2011	3:13:06 AM	H2 valve closed
3/11/2011	3:13:06 AM	BCl3 valve closed
3/11/2011	3:13:06 AM	PH3 valve closed
3/11/2011	3:13:06 AM	SiCl4 pre valve closed
3/11/2011	3:13:06 AM	SiCl4 post valve closed
3/11/2011	3:13:06 AM	Bubbler valve closed
3/11/2011	3:13:06 AM	Helium valve opened
3/11/2011	3:13:06 AM	Main Vac valve opened
3/11/2011	3:13:06 AM	Bypass valve opened
3/11/2011	3:13:06 AM	Helium MFC set to  100.000000
3/11/2011	3:13:06 AM	H2 MFC set to  0.000000
3/11/2011	3:13:06 AM	BCl3 MFC set to  0.000000
3/11/2011	3:13:06 AM	PHl3 MFC set to  0.000000
3/11/2011	3:13:06 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:13:06 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:13:06 AM	Tube furnace set to 0
3/11/2011	3:14:06 AM	Helium valve closed
3/11/2011	3:14:06 AM	H2 valve closed
3/11/2011	3:14:06 AM	BCl3 valve closed
3/11/2011	3:14:06 AM	PH3 valve closed
3/11/2011	3:14:06 AM	SiCl4 pre valve closed
3/11/2011	3:14:06 AM	SiCl4 post valve closed
3/11/2011	3:14:06 AM	Bubbler valve closed
3/11/2011	3:14:06 AM	Main Vac valve opened
3/11/2011	3:14:06 AM	Bypass valve opened
3/11/2011	3:14:06 AM	Helium MFC set to  0.000000
3/11/2011	3:14:06 AM	H2 MFC set to  0.000000
3/11/2011	3:14:06 AM	BCl3 MFC set to  0.000000
3/11/2011	3:14:06 AM	PHl3 MFC set to  0.000000
3/11/2011	3:14:06 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:14:06 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:14:06 AM	Tube furnace set to 0
3/11/2011	3:15:06 AM	H2 valve closed
3/11/2011	3:15:06 AM	BCl3 valve closed
3/11/2011	3:15:06 AM	PH3 valve closed
3/11/2011	3:15:06 AM	SiCl4 pre valve closed
3/11/2011	3:15:06 AM	SiCl4 post valve closed
3/11/2011	3:15:06 AM	Bubbler valve closed
3/11/2011	3:15:06 AM	Helium valve opened
3/11/2011	3:15:06 AM	Main Vac valve opened
3/11/2011	3:15:06 AM	Bypass valve opened
3/11/2011	3:15:06 AM	Helium MFC set to  100.000000
3/11/2011	3:15:06 AM	H2 MFC set to  0.000000
3/11/2011	3:15:06 AM	BCl3 MFC set to  0.000000
3/11/2011	3:15:06 AM	PHl3 MFC set to  0.000000
3/11/2011	3:15:06 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:15:06 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:15:06 AM	Tube furnace set to 0
3/11/2011	3:16:06 AM	Helium valve closed
3/11/2011	3:16:06 AM	H2 valve closed
3/11/2011	3:16:06 AM	BCl3 valve closed
3/11/2011	3:16:06 AM	PH3 valve closed
3/11/2011	3:16:06 AM	SiCl4 pre valve closed
3/11/2011	3:16:06 AM	SiCl4 post valve closed
3/11/2011	3:16:06 AM	Bubbler valve closed
3/11/2011	3:16:06 AM	Main Vac valve opened
3/11/2011	3:16:06 AM	Bypass valve opened
3/11/2011	3:16:06 AM	Helium MFC set to  0.000000
3/11/2011	3:16:06 AM	H2 MFC set to  0.000000
3/11/2011	3:16:06 AM	BCl3 MFC set to  0.000000
3/11/2011	3:16:06 AM	PHl3 MFC set to  0.000000
3/11/2011	3:16:06 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:16:06 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:16:06 AM	Tube furnace set to 0
3/11/2011	3:16:07 AM	Run finished at 3:16 AM
3/11/2011	3:16:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	3:17:28 AM	Bypass valve closed
3/11/2011	3:17:29 AM	Main Vac valve closed
3/11/2011	3:17:42 AM	Main Vac valve opened
3/11/2011	3:17:43 AM	Bypass valve opened
3/11/2011	3:18:11 AM	Recipe started at 3:18 AM
3/11/2011	3:18:11 AM	Helium valve closed
3/11/2011	3:18:11 AM	BCl3 valve closed
3/11/2011	3:18:11 AM	PH3 valve closed
3/11/2011	3:18:11 AM	SiCl4 pre valve closed
3/11/2011	3:18:11 AM	SiCl4 post valve closed
3/11/2011	3:18:11 AM	Main Vac valve closed
3/11/2011	3:18:11 AM	Bypass valve closed
3/11/2011	3:18:11 AM	Bubbler valve closed
3/11/2011	3:18:11 AM	H2 valve opened
3/11/2011	3:18:11 AM	Helium MFC set to  0.000000
3/11/2011	3:18:11 AM	H2 MFC set to  500.000000
3/11/2011	3:18:11 AM	BCl3 MFC set to  0.000000
3/11/2011	3:18:11 AM	PHl3 MFC set to  0.000000
3/11/2011	3:18:11 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:18:11 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:18:11 AM	Tube furnace set to 0
3/11/2011	3:19:28 AM	Helium valve closed
3/11/2011	3:19:28 AM	BCl3 valve closed
3/11/2011	3:19:28 AM	PH3 valve closed
3/11/2011	3:19:28 AM	SiCl4 pre valve closed
3/11/2011	3:19:28 AM	SiCl4 post valve closed
3/11/2011	3:19:28 AM	Main Vac valve closed
3/11/2011	3:19:28 AM	Bypass valve closed
3/11/2011	3:19:28 AM	H2 valve opened
3/11/2011	3:19:28 AM	Bubbler valve opened
3/11/2011	3:19:28 AM	Helium MFC set to  0.000000
3/11/2011	3:19:28 AM	H2 MFC set to  500.000000
3/11/2011	3:19:28 AM	BCl3 MFC set to  0.000000
3/11/2011	3:19:28 AM	PHl3 MFC set to  0.000000
3/11/2011	3:19:28 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:19:28 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:19:28 AM	Tube furnace set to 1000
3/11/2011	3:39:28 AM	Helium valve closed
3/11/2011	3:39:28 AM	BCl3 valve closed
3/11/2011	3:39:28 AM	Main Vac valve closed
3/11/2011	3:39:28 AM	Bypass valve closed
3/11/2011	3:39:28 AM	H2 valve opened
3/11/2011	3:39:28 AM	PH3 valve opened
3/11/2011	3:39:28 AM	SiCl4 pre valve opened
3/11/2011	3:39:28 AM	SiCl4 post valve opened
3/11/2011	3:39:28 AM	Bubbler valve opened
3/11/2011	3:39:28 AM	Helium MFC set to  0.000000
3/11/2011	3:39:28 AM	H2 MFC set to  500.000000
3/11/2011	3:39:28 AM	BCl3 MFC set to  0.000000
3/11/2011	3:39:28 AM	PHl3 MFC set to  3.000000
3/11/2011	3:39:28 AM	SiCl4 MFC set to  50.000000
3/11/2011	3:39:28 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:39:28 AM	Tube furnace set to 1000
3/11/2011	3:49:28 AM	Helium valve closed
3/11/2011	3:49:28 AM	BCl3 valve closed
3/11/2011	3:49:28 AM	PH3 valve closed
3/11/2011	3:49:28 AM	Main Vac valve closed
3/11/2011	3:49:28 AM	Bypass valve closed
3/11/2011	3:49:28 AM	H2 valve opened
3/11/2011	3:49:28 AM	SiCl4 pre valve opened
3/11/2011	3:49:28 AM	SiCl4 post valve opened
3/11/2011	3:49:28 AM	Bubbler valve opened
3/11/2011	3:49:28 AM	Helium MFC set to  0.000000
3/11/2011	3:49:28 AM	H2 MFC set to  500.000000
3/11/2011	3:49:28 AM	BCl3 MFC set to  0.000000
3/11/2011	3:49:28 AM	PHl3 MFC set to  0.000000
3/11/2011	3:49:28 AM	SiCl4 MFC set to  50.000000
3/11/2011	3:49:28 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:49:28 AM	Tube furnace set to 1000
3/11/2011	3:57:28 AM	H2 valve closed
3/11/2011	3:57:28 AM	BCl3 valve closed
3/11/2011	3:57:28 AM	PH3 valve closed
3/11/2011	3:57:28 AM	SiCl4 pre valve closed
3/11/2011	3:57:28 AM	SiCl4 post valve closed
3/11/2011	3:57:28 AM	Main Vac valve closed
3/11/2011	3:57:28 AM	Bypass valve closed
3/11/2011	3:57:28 AM	Helium valve opened
3/11/2011	3:57:28 AM	Bubbler valve opened
3/11/2011	3:57:28 AM	Helium MFC set to  500.000000
3/11/2011	3:57:28 AM	H2 MFC set to  0.000000
3/11/2011	3:57:28 AM	BCl3 MFC set to  0.000000
3/11/2011	3:57:28 AM	PHl3 MFC set to  0.000000
3/11/2011	3:57:28 AM	SiCl4 MFC set to  0.000000
3/11/2011	3:57:28 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:57:28 AM	Tube furnace set to 0
3/11/2011	4:17:28 AM	Helium valve closed
3/11/2011	4:17:28 AM	H2 valve closed
3/11/2011	4:17:28 AM	BCl3 valve closed
3/11/2011	4:17:28 AM	PH3 valve closed
3/11/2011	4:17:28 AM	SiCl4 pre valve closed
3/11/2011	4:17:28 AM	SiCl4 post valve closed
3/11/2011	4:17:28 AM	Main Vac valve closed
3/11/2011	4:17:28 AM	Bypass valve closed
3/11/2011	4:17:28 AM	Bubbler valve closed
3/11/2011	4:17:28 AM	Helium MFC set to  0.000000
3/11/2011	4:17:28 AM	H2 MFC set to  0.000000
3/11/2011	4:17:28 AM	BCl3 MFC set to  0.000000
3/11/2011	4:17:28 AM	PHl3 MFC set to  0.000000
3/11/2011	4:17:28 AM	SiCl4 MFC set to  0.000000
3/11/2011	4:17:28 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	4:17:29 AM	Tube furnace set to 0
3/11/2011	4:17:29 AM	Run finished at 4:17 AM
3/11/2011	4:19:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2011	4:19:38 AM	Recipe started at 4:19 AM
3/11/2011	4:19:38 AM	H2 valve closed
3/11/2011	4:19:38 AM	BCl3 valve closed
3/11/2011	4:19:38 AM	PH3 valve closed
3/11/2011	4:19:38 AM	SiCl4 pre valve closed
3/11/2011	4:19:38 AM	SiCl4 post valve closed
3/11/2011	4:19:38 AM	Main Vac valve closed
3/11/2011	4:19:38 AM	Bypass valve closed
3/11/2011	4:19:38 AM	Bubbler valve closed
3/11/2011	4:19:38 AM	Helium valve opened
3/11/2011	4:19:38 AM	Helium MFC set to  500.000000
3/11/2011	4:19:38 AM	H2 MFC set to  0.000000
3/11/2011	4:19:38 AM	BCl3 MFC set to  0.000000
3/11/2011	4:19:38 AM	PHl3 MFC set to  0.000000
3/11/2011	4:19:38 AM	SiCl4 MFC set to  0.000000
3/11/2011	4:19:38 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	4:19:38 AM	Tube furnace set to 0
3/11/2011	4:19:39 AM	Helium valve closed
3/11/2011	4:19:39 AM	H2 valve closed
3/11/2011	4:19:39 AM	BCl3 valve closed
3/11/2011	4:19:39 AM	PH3 valve closed
3/11/2011	4:19:39 AM	SiCl4 pre valve closed
3/11/2011	4:19:39 AM	SiCl4 post valve closed
3/11/2011	4:19:39 AM	Main Vac valve closed
3/11/2011	4:19:39 AM	Bypass valve closed
3/11/2011	4:19:39 AM	Bubbler valve closed
3/11/2011	4:19:39 AM	Helium MFC set to  0.000000
3/11/2011	4:19:39 AM	H2 MFC set to  0.000000
3/11/2011	4:19:39 AM	BCl3 MFC set to  0.000000
3/11/2011	4:19:39 AM	PHl3 MFC set to  0.000000
3/11/2011	4:19:39 AM	SiCl4 MFC set to  0.000000
3/11/2011	4:19:39 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	4:19:39 AM	Tube furnace set to 0
3/11/2011	4:19:39 AM	Run finished at 4:19 AM
3/11/2011	4:19:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2011	4:21:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2011	4:21:16 AM	Recipe started at 4:21 AM
3/11/2011	4:21:16 AM	Helium valve closed
3/11/2011	4:21:16 AM	H2 valve closed
3/11/2011	4:21:16 AM	BCl3 valve closed
3/11/2011	4:21:16 AM	PH3 valve closed
3/11/2011	4:21:16 AM	SiCl4 pre valve closed
3/11/2011	4:21:16 AM	SiCl4 post valve closed
3/11/2011	4:21:16 AM	Main Vac valve closed
3/11/2011	4:21:16 AM	Bubbler valve closed
3/11/2011	4:21:16 AM	Bypass valve opened
3/11/2011	4:21:16 AM	Helium MFC set to  0.000000
3/11/2011	4:21:16 AM	H2 MFC set to  0.000000
3/11/2011	4:21:16 AM	BCl3 MFC set to  0.000000
3/11/2011	4:21:16 AM	PHl3 MFC set to  0.000000
3/11/2011	4:21:16 AM	SiCl4 MFC set to  0.000000
3/11/2011	4:21:16 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	4:21:17 AM	Tube furnace set to 0
3/11/2011	4:21:46 AM	Helium valve closed
3/11/2011	4:21:46 AM	H2 valve closed
3/11/2011	4:21:46 AM	BCl3 valve closed
3/11/2011	4:21:46 AM	PH3 valve closed
3/11/2011	4:21:46 AM	SiCl4 pre valve closed
3/11/2011	4:21:46 AM	SiCl4 post valve closed
3/11/2011	4:21:46 AM	Bubbler valve closed
3/11/2011	4:21:46 AM	Main Vac valve opened
3/11/2011	4:21:46 AM	Bypass valve opened
3/11/2011	4:21:46 AM	Helium MFC set to  0.000000
3/11/2011	4:21:46 AM	H2 MFC set to  0.000000
3/11/2011	4:21:46 AM	BCl3 MFC set to  0.000000
3/11/2011	4:21:46 AM	PHl3 MFC set to  0.000000
3/11/2011	4:21:46 AM	SiCl4 MFC set to  0.000000
3/11/2011	4:21:46 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	4:21:46 AM	Tube furnace set to 0
3/11/2011	4:21:47 AM	Run finished at 4:21 AM
3/11/2011	4:21:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2011	4:22:26 AM	Bypass valve closed
3/11/2011	4:22:26 AM	Main Vac valve closed
3/11/2011	4:22:32 AM	Main Vac valve opened
3/11/2011	4:22:33 AM	Bypass valve opened
3/11/2011	8:55:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2011	8:55:09 AM	Recipe started at 8:55 AM
3/11/2011	8:55:09 AM	H2 valve closed
3/11/2011	8:55:09 AM	BCl3 valve closed
3/11/2011	8:55:09 AM	PH3 valve closed
3/11/2011	8:55:09 AM	SiCl4 pre valve closed
3/11/2011	8:55:09 AM	SiCl4 post valve closed
3/11/2011	8:55:09 AM	Main Vac valve closed
3/11/2011	8:55:09 AM	Bypass valve closed
3/11/2011	8:55:09 AM	Bubbler valve closed
3/11/2011	8:55:09 AM	Helium valve opened
3/11/2011	8:55:09 AM	Helium MFC set to  500.000000
3/11/2011	8:55:09 AM	H2 MFC set to  0.000000
3/11/2011	8:55:09 AM	BCl3 MFC set to  0.000000
3/11/2011	8:55:09 AM	PHl3 MFC set to  0.000000
3/11/2011	8:55:09 AM	SiCl4 MFC set to  0.000000
3/11/2011	8:55:09 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	8:55:09 AM	Tube furnace set to 0
3/11/2011	8:56:29 AM	Helium valve closed
3/11/2011	8:56:29 AM	H2 valve closed
3/11/2011	8:56:29 AM	BCl3 valve closed
3/11/2011	8:56:29 AM	PH3 valve closed
3/11/2011	8:56:29 AM	SiCl4 pre valve closed
3/11/2011	8:56:29 AM	SiCl4 post valve closed
3/11/2011	8:56:29 AM	Main Vac valve closed
3/11/2011	8:56:30 AM	Bypass valve closed
3/11/2011	8:56:30 AM	Bubbler valve closed
3/11/2011	8:56:30 AM	Helium MFC set to  0.000000
3/11/2011	8:56:30 AM	H2 MFC set to  0.000000
3/11/2011	8:56:30 AM	BCl3 MFC set to  0.000000
3/11/2011	8:56:30 AM	PHl3 MFC set to  0.000000
3/11/2011	8:56:30 AM	SiCl4 MFC set to  0.000000
3/11/2011	8:56:30 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	8:56:30 AM	Tube furnace set to 0
3/11/2011	8:56:30 AM	Run finished at 8:56 AM
3/11/2011	8:56:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2011	9:04:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2011	9:04:50 AM	Recipe started at 9:04 AM
3/11/2011	9:04:50 AM	Helium valve closed
3/11/2011	9:04:50 AM	H2 valve closed
3/11/2011	9:04:50 AM	BCl3 valve closed
3/11/2011	9:04:50 AM	PH3 valve closed
3/11/2011	9:04:50 AM	SiCl4 pre valve closed
3/11/2011	9:04:50 AM	SiCl4 post valve closed
3/11/2011	9:04:50 AM	Main Vac valve closed
3/11/2011	9:04:50 AM	Bubbler valve closed
3/11/2011	9:04:50 AM	Bypass valve opened
3/11/2011	9:04:50 AM	Helium MFC set to  0.000000
3/11/2011	9:04:50 AM	H2 MFC set to  0.000000
3/11/2011	9:04:50 AM	BCl3 MFC set to  0.000000
3/11/2011	9:04:50 AM	PHl3 MFC set to  0.000000
3/11/2011	9:04:50 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:04:50 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:04:50 AM	Tube furnace set to 0
3/11/2011	9:05:22 AM	Helium valve closed
3/11/2011	9:05:22 AM	H2 valve closed
3/11/2011	9:05:22 AM	BCl3 valve closed
3/11/2011	9:05:22 AM	PH3 valve closed
3/11/2011	9:05:22 AM	SiCl4 pre valve closed
3/11/2011	9:05:22 AM	SiCl4 post valve closed
3/11/2011	9:05:22 AM	Bubbler valve closed
3/11/2011	9:05:22 AM	Main Vac valve opened
3/11/2011	9:05:22 AM	Bypass valve opened
3/11/2011	9:05:22 AM	Helium MFC set to  0.000000
3/11/2011	9:05:22 AM	H2 MFC set to  0.000000
3/11/2011	9:05:22 AM	BCl3 MFC set to  0.000000
3/11/2011	9:05:22 AM	PHl3 MFC set to  0.000000
3/11/2011	9:05:22 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:05:22 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:05:22 AM	Tube furnace set to 0
3/11/2011	9:05:22 AM	Run finished at 9:05 AM
3/11/2011	9:05:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2011	9:06:04 AM	Main Vac valve closed
3/11/2011	9:06:13 AM	Main Vac valve opened
3/11/2011	9:06:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	9:06:31 AM	Recipe started at 9:06 AM
3/11/2011	9:06:31 AM	Helium valve closed
3/11/2011	9:06:31 AM	H2 valve closed
3/11/2011	9:06:31 AM	BCl3 valve closed
3/11/2011	9:06:31 AM	PH3 valve closed
3/11/2011	9:06:31 AM	SiCl4 pre valve closed
3/11/2011	9:06:31 AM	SiCl4 post valve closed
3/11/2011	9:06:31 AM	Main Vac valve closed
3/11/2011	9:06:31 AM	Bubbler valve closed
3/11/2011	9:06:31 AM	Bypass valve opened
3/11/2011	9:06:31 AM	Helium MFC set to  0.000000
3/11/2011	9:06:31 AM	H2 MFC set to  0.000000
3/11/2011	9:06:31 AM	BCl3 MFC set to  0.000000
3/11/2011	9:06:31 AM	PHl3 MFC set to  0.000000
3/11/2011	9:06:31 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:06:31 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:06:31 AM	Tube furnace set to 0
3/11/2011	9:06:31 AM	Helium valve closed
3/11/2011	9:06:31 AM	H2 valve closed
3/11/2011	9:06:31 AM	BCl3 valve closed
3/11/2011	9:06:31 AM	PH3 valve closed
3/11/2011	9:06:31 AM	SiCl4 pre valve closed
3/11/2011	9:06:31 AM	SiCl4 post valve closed
3/11/2011	9:06:31 AM	Bubbler valve closed
3/11/2011	9:06:31 AM	Main Vac valve opened
3/11/2011	9:06:31 AM	Bypass valve opened
3/11/2011	9:06:31 AM	Helium MFC set to  0.000000
3/11/2011	9:06:31 AM	H2 MFC set to  0.000000
3/11/2011	9:06:31 AM	BCl3 MFC set to  0.000000
3/11/2011	9:06:31 AM	PHl3 MFC set to  0.000000
3/11/2011	9:06:31 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:06:31 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:06:31 AM	Tube furnace set to 0
3/11/2011	9:07:31 AM	H2 valve closed
3/11/2011	9:07:31 AM	BCl3 valve closed
3/11/2011	9:07:31 AM	PH3 valve closed
3/11/2011	9:07:31 AM	SiCl4 pre valve closed
3/11/2011	9:07:31 AM	SiCl4 post valve closed
3/11/2011	9:07:31 AM	Bubbler valve closed
3/11/2011	9:07:32 AM	Helium valve opened
3/11/2011	9:07:32 AM	Main Vac valve opened
3/11/2011	9:07:32 AM	Bypass valve opened
3/11/2011	9:07:32 AM	Helium MFC set to  100.000000
3/11/2011	9:07:32 AM	H2 MFC set to  0.000000
3/11/2011	9:07:32 AM	BCl3 MFC set to  0.000000
3/11/2011	9:07:32 AM	PHl3 MFC set to  0.000000
3/11/2011	9:07:32 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:07:32 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:07:32 AM	Tube furnace set to 0
3/11/2011	9:08:32 AM	Helium valve closed
3/11/2011	9:08:32 AM	H2 valve closed
3/11/2011	9:08:32 AM	BCl3 valve closed
3/11/2011	9:08:32 AM	PH3 valve closed
3/11/2011	9:08:32 AM	SiCl4 pre valve closed
3/11/2011	9:08:32 AM	SiCl4 post valve closed
3/11/2011	9:08:32 AM	Bubbler valve closed
3/11/2011	9:08:32 AM	Main Vac valve opened
3/11/2011	9:08:32 AM	Bypass valve opened
3/11/2011	9:08:32 AM	Helium MFC set to  0.000000
3/11/2011	9:08:32 AM	H2 MFC set to  0.000000
3/11/2011	9:08:32 AM	BCl3 MFC set to  0.000000
3/11/2011	9:08:32 AM	PHl3 MFC set to  0.000000
3/11/2011	9:08:32 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:08:32 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:08:32 AM	Tube furnace set to 0
3/11/2011	9:09:32 AM	H2 valve closed
3/11/2011	9:09:32 AM	BCl3 valve closed
3/11/2011	9:09:32 AM	PH3 valve closed
3/11/2011	9:09:32 AM	SiCl4 pre valve closed
3/11/2011	9:09:32 AM	SiCl4 post valve closed
3/11/2011	9:09:32 AM	Bubbler valve closed
3/11/2011	9:09:32 AM	Helium valve opened
3/11/2011	9:09:32 AM	Main Vac valve opened
3/11/2011	9:09:32 AM	Bypass valve opened
3/11/2011	9:09:32 AM	Helium MFC set to  100.000000
3/11/2011	9:09:32 AM	H2 MFC set to  0.000000
3/11/2011	9:09:32 AM	BCl3 MFC set to  0.000000
3/11/2011	9:09:32 AM	PHl3 MFC set to  0.000000
3/11/2011	9:09:32 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:09:32 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:09:32 AM	Tube furnace set to 0
3/11/2011	9:10:32 AM	Helium valve closed
3/11/2011	9:10:32 AM	H2 valve closed
3/11/2011	9:10:32 AM	BCl3 valve closed
3/11/2011	9:10:32 AM	PH3 valve closed
3/11/2011	9:10:32 AM	SiCl4 pre valve closed
3/11/2011	9:10:32 AM	SiCl4 post valve closed
3/11/2011	9:10:32 AM	Bubbler valve closed
3/11/2011	9:10:32 AM	Main Vac valve opened
3/11/2011	9:10:32 AM	Bypass valve opened
3/11/2011	9:10:32 AM	Helium MFC set to  0.000000
3/11/2011	9:10:32 AM	H2 MFC set to  0.000000
3/11/2011	9:10:32 AM	BCl3 MFC set to  0.000000
3/11/2011	9:10:32 AM	PHl3 MFC set to  0.000000
3/11/2011	9:10:32 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:10:32 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:10:32 AM	Tube furnace set to 0
3/11/2011	9:11:32 AM	H2 valve closed
3/11/2011	9:11:32 AM	BCl3 valve closed
3/11/2011	9:11:32 AM	PH3 valve closed
3/11/2011	9:11:32 AM	SiCl4 pre valve closed
3/11/2011	9:11:32 AM	SiCl4 post valve closed
3/11/2011	9:11:32 AM	Bubbler valve closed
3/11/2011	9:11:32 AM	Helium valve opened
3/11/2011	9:11:32 AM	Main Vac valve opened
3/11/2011	9:11:32 AM	Bypass valve opened
3/11/2011	9:11:32 AM	Helium MFC set to  100.000000
3/11/2011	9:11:32 AM	H2 MFC set to  0.000000
3/11/2011	9:11:32 AM	BCl3 MFC set to  0.000000
3/11/2011	9:11:32 AM	PHl3 MFC set to  0.000000
3/11/2011	9:11:32 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:11:32 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:11:32 AM	Tube furnace set to 0
3/11/2011	9:12:32 AM	Helium valve closed
3/11/2011	9:12:32 AM	H2 valve closed
3/11/2011	9:12:32 AM	BCl3 valve closed
3/11/2011	9:12:32 AM	PH3 valve closed
3/11/2011	9:12:32 AM	SiCl4 pre valve closed
3/11/2011	9:12:32 AM	SiCl4 post valve closed
3/11/2011	9:12:32 AM	Bubbler valve closed
3/11/2011	9:12:32 AM	Main Vac valve opened
3/11/2011	9:12:32 AM	Bypass valve opened
3/11/2011	9:12:32 AM	Helium MFC set to  0.000000
3/11/2011	9:12:32 AM	H2 MFC set to  0.000000
3/11/2011	9:12:32 AM	BCl3 MFC set to  0.000000
3/11/2011	9:12:32 AM	PHl3 MFC set to  0.000000
3/11/2011	9:12:33 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:12:33 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:12:33 AM	Tube furnace set to 0
3/11/2011	9:13:33 AM	H2 valve closed
3/11/2011	9:13:33 AM	BCl3 valve closed
3/11/2011	9:13:33 AM	PH3 valve closed
3/11/2011	9:13:33 AM	SiCl4 pre valve closed
3/11/2011	9:13:33 AM	SiCl4 post valve closed
3/11/2011	9:13:33 AM	Bubbler valve closed
3/11/2011	9:13:33 AM	Helium valve opened
3/11/2011	9:13:33 AM	Main Vac valve opened
3/11/2011	9:13:33 AM	Bypass valve opened
3/11/2011	9:13:33 AM	Helium MFC set to  100.000000
3/11/2011	9:13:33 AM	H2 MFC set to  0.000000
3/11/2011	9:13:33 AM	BCl3 MFC set to  0.000000
3/11/2011	9:13:33 AM	PHl3 MFC set to  0.000000
3/11/2011	9:13:33 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:13:33 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:13:33 AM	Tube furnace set to 0
3/11/2011	9:14:33 AM	Helium valve closed
3/11/2011	9:14:33 AM	H2 valve closed
3/11/2011	9:14:33 AM	BCl3 valve closed
3/11/2011	9:14:33 AM	PH3 valve closed
3/11/2011	9:14:33 AM	SiCl4 pre valve closed
3/11/2011	9:14:33 AM	SiCl4 post valve closed
3/11/2011	9:14:33 AM	Bubbler valve closed
3/11/2011	9:14:33 AM	Main Vac valve opened
3/11/2011	9:14:33 AM	Bypass valve opened
3/11/2011	9:14:33 AM	Helium MFC set to  0.000000
3/11/2011	9:14:33 AM	H2 MFC set to  0.000000
3/11/2011	9:14:33 AM	BCl3 MFC set to  0.000000
3/11/2011	9:14:33 AM	PHl3 MFC set to  0.000000
3/11/2011	9:14:33 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:14:33 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:14:33 AM	Tube furnace set to 0
3/11/2011	9:15:33 AM	H2 valve closed
3/11/2011	9:15:33 AM	BCl3 valve closed
3/11/2011	9:15:33 AM	PH3 valve closed
3/11/2011	9:15:33 AM	SiCl4 pre valve closed
3/11/2011	9:15:33 AM	SiCl4 post valve closed
3/11/2011	9:15:33 AM	Bubbler valve closed
3/11/2011	9:15:33 AM	Helium valve opened
3/11/2011	9:15:33 AM	Main Vac valve opened
3/11/2011	9:15:33 AM	Bypass valve opened
3/11/2011	9:15:33 AM	Helium MFC set to  100.000000
3/11/2011	9:15:33 AM	H2 MFC set to  0.000000
3/11/2011	9:15:33 AM	BCl3 MFC set to  0.000000
3/11/2011	9:15:33 AM	PHl3 MFC set to  0.000000
3/11/2011	9:15:33 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:15:33 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:15:33 AM	Tube furnace set to 0
3/11/2011	9:16:33 AM	Helium valve closed
3/11/2011	9:16:33 AM	H2 valve closed
3/11/2011	9:16:33 AM	BCl3 valve closed
3/11/2011	9:16:33 AM	PH3 valve closed
3/11/2011	9:16:33 AM	SiCl4 pre valve closed
3/11/2011	9:16:33 AM	SiCl4 post valve closed
3/11/2011	9:16:33 AM	Bubbler valve closed
3/11/2011	9:16:33 AM	Main Vac valve opened
3/11/2011	9:16:33 AM	Bypass valve opened
3/11/2011	9:16:33 AM	Helium MFC set to  0.000000
3/11/2011	9:16:33 AM	H2 MFC set to  0.000000
3/11/2011	9:16:33 AM	BCl3 MFC set to  0.000000
3/11/2011	9:16:33 AM	PHl3 MFC set to  0.000000
3/11/2011	9:16:33 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:16:33 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:16:33 AM	Tube furnace set to 0
3/11/2011	9:17:33 AM	H2 valve closed
3/11/2011	9:17:33 AM	BCl3 valve closed
3/11/2011	9:17:33 AM	PH3 valve closed
3/11/2011	9:17:33 AM	SiCl4 pre valve closed
3/11/2011	9:17:33 AM	SiCl4 post valve closed
3/11/2011	9:17:33 AM	Bubbler valve closed
3/11/2011	9:17:33 AM	Helium valve opened
3/11/2011	9:17:33 AM	Main Vac valve opened
3/11/2011	9:17:33 AM	Bypass valve opened
3/11/2011	9:17:33 AM	Helium MFC set to  100.000000
3/11/2011	9:17:33 AM	H2 MFC set to  0.000000
3/11/2011	9:17:33 AM	BCl3 MFC set to  0.000000
3/11/2011	9:17:33 AM	PHl3 MFC set to  0.000000
3/11/2011	9:17:33 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:17:33 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:17:34 AM	Tube furnace set to 0
3/11/2011	9:18:34 AM	Helium valve closed
3/11/2011	9:18:34 AM	H2 valve closed
3/11/2011	9:18:34 AM	BCl3 valve closed
3/11/2011	9:18:34 AM	PH3 valve closed
3/11/2011	9:18:34 AM	SiCl4 pre valve closed
3/11/2011	9:18:34 AM	SiCl4 post valve closed
3/11/2011	9:18:34 AM	Bubbler valve closed
3/11/2011	9:18:34 AM	Main Vac valve opened
3/11/2011	9:18:34 AM	Bypass valve opened
3/11/2011	9:18:34 AM	Helium MFC set to  0.000000
3/11/2011	9:18:34 AM	H2 MFC set to  0.000000
3/11/2011	9:18:34 AM	BCl3 MFC set to  0.000000
3/11/2011	9:18:34 AM	PHl3 MFC set to  0.000000
3/11/2011	9:18:34 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:18:34 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:18:34 AM	Tube furnace set to 0
3/11/2011	9:19:34 AM	H2 valve closed
3/11/2011	9:19:34 AM	BCl3 valve closed
3/11/2011	9:19:34 AM	PH3 valve closed
3/11/2011	9:19:34 AM	SiCl4 pre valve closed
3/11/2011	9:19:34 AM	SiCl4 post valve closed
3/11/2011	9:19:34 AM	Bubbler valve closed
3/11/2011	9:19:34 AM	Helium valve opened
3/11/2011	9:19:34 AM	Main Vac valve opened
3/11/2011	9:19:34 AM	Bypass valve opened
3/11/2011	9:19:34 AM	Helium MFC set to  100.000000
3/11/2011	9:19:34 AM	H2 MFC set to  0.000000
3/11/2011	9:19:34 AM	BCl3 MFC set to  0.000000
3/11/2011	9:19:34 AM	PHl3 MFC set to  0.000000
3/11/2011	9:19:34 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:19:34 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:19:34 AM	Tube furnace set to 0
3/11/2011	9:20:34 AM	Helium valve closed
3/11/2011	9:20:34 AM	H2 valve closed
3/11/2011	9:20:34 AM	BCl3 valve closed
3/11/2011	9:20:34 AM	PH3 valve closed
3/11/2011	9:20:34 AM	SiCl4 pre valve closed
3/11/2011	9:20:34 AM	SiCl4 post valve closed
3/11/2011	9:20:34 AM	Bubbler valve closed
3/11/2011	9:20:34 AM	Main Vac valve opened
3/11/2011	9:20:34 AM	Bypass valve opened
3/11/2011	9:20:34 AM	Helium MFC set to  0.000000
3/11/2011	9:20:34 AM	H2 MFC set to  0.000000
3/11/2011	9:20:34 AM	BCl3 MFC set to  0.000000
3/11/2011	9:20:34 AM	PHl3 MFC set to  0.000000
3/11/2011	9:20:34 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:20:34 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:20:34 AM	Tube furnace set to 0
3/11/2011	9:21:34 AM	H2 valve closed
3/11/2011	9:21:34 AM	BCl3 valve closed
3/11/2011	9:21:34 AM	PH3 valve closed
3/11/2011	9:21:34 AM	SiCl4 pre valve closed
3/11/2011	9:21:34 AM	SiCl4 post valve closed
3/11/2011	9:21:34 AM	Bubbler valve closed
3/11/2011	9:21:34 AM	Helium valve opened
3/11/2011	9:21:34 AM	Main Vac valve opened
3/11/2011	9:21:34 AM	Bypass valve opened
3/11/2011	9:21:34 AM	Helium MFC set to  100.000000
3/11/2011	9:21:34 AM	H2 MFC set to  0.000000
3/11/2011	9:21:34 AM	BCl3 MFC set to  0.000000
3/11/2011	9:21:34 AM	PHl3 MFC set to  0.000000
3/11/2011	9:21:34 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:21:34 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:21:34 AM	Tube furnace set to 0
3/11/2011	9:22:34 AM	Helium valve closed
3/11/2011	9:22:34 AM	H2 valve closed
3/11/2011	9:22:34 AM	BCl3 valve closed
3/11/2011	9:22:34 AM	PH3 valve closed
3/11/2011	9:22:34 AM	SiCl4 pre valve closed
3/11/2011	9:22:34 AM	SiCl4 post valve closed
3/11/2011	9:22:34 AM	Bubbler valve closed
3/11/2011	9:22:34 AM	Main Vac valve opened
3/11/2011	9:22:34 AM	Bypass valve opened
3/11/2011	9:22:34 AM	Helium MFC set to  0.000000
3/11/2011	9:22:34 AM	H2 MFC set to  0.000000
3/11/2011	9:22:34 AM	BCl3 MFC set to  0.000000
3/11/2011	9:22:34 AM	PHl3 MFC set to  0.000000
3/11/2011	9:22:34 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:22:34 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:22:35 AM	Tube furnace set to 0
3/11/2011	9:23:35 AM	H2 valve closed
3/11/2011	9:23:35 AM	BCl3 valve closed
3/11/2011	9:23:35 AM	PH3 valve closed
3/11/2011	9:23:35 AM	SiCl4 pre valve closed
3/11/2011	9:23:35 AM	SiCl4 post valve closed
3/11/2011	9:23:35 AM	Bubbler valve closed
3/11/2011	9:23:35 AM	Helium valve opened
3/11/2011	9:23:35 AM	Main Vac valve opened
3/11/2011	9:23:35 AM	Bypass valve opened
3/11/2011	9:23:35 AM	Helium MFC set to  100.000000
3/11/2011	9:23:35 AM	H2 MFC set to  0.000000
3/11/2011	9:23:35 AM	BCl3 MFC set to  0.000000
3/11/2011	9:23:35 AM	PHl3 MFC set to  0.000000
3/11/2011	9:23:35 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:23:35 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:23:35 AM	Tube furnace set to 0
3/11/2011	9:24:35 AM	Helium valve closed
3/11/2011	9:24:35 AM	H2 valve closed
3/11/2011	9:24:35 AM	BCl3 valve closed
3/11/2011	9:24:35 AM	PH3 valve closed
3/11/2011	9:24:35 AM	SiCl4 pre valve closed
3/11/2011	9:24:35 AM	SiCl4 post valve closed
3/11/2011	9:24:35 AM	Bubbler valve closed
3/11/2011	9:24:35 AM	Main Vac valve opened
3/11/2011	9:24:35 AM	Bypass valve opened
3/11/2011	9:24:35 AM	Helium MFC set to  0.000000
3/11/2011	9:24:35 AM	H2 MFC set to  0.000000
3/11/2011	9:24:35 AM	BCl3 MFC set to  0.000000
3/11/2011	9:24:35 AM	PHl3 MFC set to  0.000000
3/11/2011	9:24:35 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:24:35 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:24:35 AM	Tube furnace set to 0
3/11/2011	9:25:35 AM	H2 valve closed
3/11/2011	9:25:35 AM	BCl3 valve closed
3/11/2011	9:25:35 AM	PH3 valve closed
3/11/2011	9:25:35 AM	SiCl4 pre valve closed
3/11/2011	9:25:35 AM	SiCl4 post valve closed
3/11/2011	9:25:35 AM	Bubbler valve closed
3/11/2011	9:25:35 AM	Helium valve opened
3/11/2011	9:25:35 AM	Main Vac valve opened
3/11/2011	9:25:35 AM	Bypass valve opened
3/11/2011	9:25:35 AM	Helium MFC set to  100.000000
3/11/2011	9:25:35 AM	H2 MFC set to  0.000000
3/11/2011	9:25:35 AM	BCl3 MFC set to  0.000000
3/11/2011	9:25:35 AM	PHl3 MFC set to  0.000000
3/11/2011	9:25:35 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:25:35 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:25:35 AM	Tube furnace set to 0
3/11/2011	9:26:35 AM	Helium valve closed
3/11/2011	9:26:35 AM	H2 valve closed
3/11/2011	9:26:35 AM	BCl3 valve closed
3/11/2011	9:26:35 AM	PH3 valve closed
3/11/2011	9:26:35 AM	SiCl4 pre valve closed
3/11/2011	9:26:35 AM	SiCl4 post valve closed
3/11/2011	9:26:35 AM	Bubbler valve closed
3/11/2011	9:26:35 AM	Main Vac valve opened
3/11/2011	9:26:35 AM	Bypass valve opened
3/11/2011	9:26:35 AM	Helium MFC set to  0.000000
3/11/2011	9:26:35 AM	H2 MFC set to  0.000000
3/11/2011	9:26:35 AM	BCl3 MFC set to  0.000000
3/11/2011	9:26:35 AM	PHl3 MFC set to  0.000000
3/11/2011	9:26:35 AM	SiCl4 MFC set to  0.000000
3/11/2011	9:26:35 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	9:26:35 AM	Tube furnace set to 0
3/11/2011	9:26:36 AM	Run finished at 9:26 AM
3/11/2011	9:26:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	10:31:55 AM	Recipe started at 10:31 AM
3/11/2011	10:31:55 AM	Helium valve closed
3/11/2011	10:31:55 AM	BCl3 valve closed
3/11/2011	10:31:55 AM	PH3 valve closed
3/11/2011	10:31:55 AM	SiCl4 pre valve closed
3/11/2011	10:31:55 AM	SiCl4 post valve closed
3/11/2011	10:31:55 AM	Main Vac valve closed
3/11/2011	10:31:55 AM	Bypass valve closed
3/11/2011	10:31:55 AM	Bubbler valve closed
3/11/2011	10:31:55 AM	H2 valve opened
3/11/2011	10:31:55 AM	Helium MFC set to  0.000000
3/11/2011	10:31:56 AM	H2 MFC set to  500.000000
3/11/2011	10:31:56 AM	BCl3 MFC set to  0.000000
3/11/2011	10:31:56 AM	PHl3 MFC set to  0.000000
3/11/2011	10:31:56 AM	SiCl4 MFC set to  0.000000
3/11/2011	10:31:56 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	10:31:56 AM	Tube furnace set to 0
3/11/2011	10:33:18 AM	Helium valve closed
3/11/2011	10:33:18 AM	BCl3 valve closed
3/11/2011	10:33:18 AM	PH3 valve closed
3/11/2011	10:33:18 AM	SiCl4 pre valve closed
3/11/2011	10:33:18 AM	SiCl4 post valve closed
3/11/2011	10:33:18 AM	Main Vac valve closed
3/11/2011	10:33:18 AM	Bypass valve closed
3/11/2011	10:33:18 AM	H2 valve opened
3/11/2011	10:33:18 AM	Bubbler valve opened
3/11/2011	10:33:18 AM	Helium MFC set to  0.000000
3/11/2011	10:33:18 AM	H2 MFC set to  500.000000
3/11/2011	10:33:18 AM	BCl3 MFC set to  0.000000
3/11/2011	10:33:18 AM	PHl3 MFC set to  0.000000
3/11/2011	10:33:18 AM	SiCl4 MFC set to  0.000000
3/11/2011	10:33:18 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	10:33:19 AM	Tube furnace set to 1000
3/11/2011	10:53:19 AM	Helium valve closed
3/11/2011	10:53:19 AM	PH3 valve closed
3/11/2011	10:53:19 AM	Main Vac valve closed
3/11/2011	10:53:19 AM	Bypass valve closed
3/11/2011	10:53:19 AM	H2 valve opened
3/11/2011	10:53:19 AM	BCl3 valve opened
3/11/2011	10:53:19 AM	SiCl4 pre valve opened
3/11/2011	10:53:19 AM	SiCl4 post valve opened
3/11/2011	10:53:19 AM	Bubbler valve opened
3/11/2011	10:53:19 AM	Helium MFC set to  0.000000
3/11/2011	10:53:19 AM	H2 MFC set to  500.000000
3/11/2011	10:53:19 AM	BCl3 MFC set to  3.000000
3/11/2011	10:53:19 AM	PHl3 MFC set to  0.000000
3/11/2011	10:53:19 AM	SiCl4 MFC set to  50.000000
3/11/2011	10:53:19 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	10:53:19 AM	Tube furnace set to 1000
3/11/2011	11:13:19 AM	H2 valve closed
3/11/2011	11:13:19 AM	BCl3 valve closed
3/11/2011	11:13:19 AM	PH3 valve closed
3/11/2011	11:13:19 AM	SiCl4 pre valve closed
3/11/2011	11:13:19 AM	SiCl4 post valve closed
3/11/2011	11:13:19 AM	Main Vac valve closed
3/11/2011	11:13:19 AM	Bypass valve closed
3/11/2011	11:13:19 AM	Helium valve opened
3/11/2011	11:13:19 AM	Bubbler valve opened
3/11/2011	11:13:19 AM	Helium MFC set to  500.000000
3/11/2011	11:13:19 AM	H2 MFC set to  0.000000
3/11/2011	11:13:19 AM	BCl3 MFC set to  0.000000
3/11/2011	11:13:19 AM	PHl3 MFC set to  0.000000
3/11/2011	11:13:19 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:13:19 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:13:19 AM	Tube furnace set to 0
3/11/2011	11:33:19 AM	Helium valve closed
3/11/2011	11:33:19 AM	H2 valve closed
3/11/2011	11:33:19 AM	BCl3 valve closed
3/11/2011	11:33:19 AM	PH3 valve closed
3/11/2011	11:33:19 AM	SiCl4 pre valve closed
3/11/2011	11:33:19 AM	SiCl4 post valve closed
3/11/2011	11:33:19 AM	Main Vac valve closed
3/11/2011	11:33:19 AM	Bypass valve closed
3/11/2011	11:33:19 AM	Bubbler valve closed
3/11/2011	11:33:19 AM	Helium MFC set to  0.000000
3/11/2011	11:33:19 AM	H2 MFC set to  0.000000
3/11/2011	11:33:19 AM	BCl3 MFC set to  0.000000
3/11/2011	11:33:19 AM	PHl3 MFC set to  0.000000
3/11/2011	11:33:19 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:33:19 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:33:19 AM	Tube furnace set to 0
3/11/2011	11:33:19 AM	Run finished at 11:33 AM
3/11/2011	11:48:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	11:48:22 AM	Recipe started at 11:48 AM
3/11/2011	11:48:22 AM	Helium valve closed
3/11/2011	11:48:22 AM	H2 valve closed
3/11/2011	11:48:22 AM	BCl3 valve closed
3/11/2011	11:48:22 AM	PH3 valve closed
3/11/2011	11:48:22 AM	SiCl4 pre valve closed
3/11/2011	11:48:22 AM	SiCl4 post valve closed
3/11/2011	11:48:22 AM	Main Vac valve closed
3/11/2011	11:48:22 AM	Bubbler valve closed
3/11/2011	11:48:22 AM	Bypass valve opened
3/11/2011	11:48:22 AM	Helium MFC set to  0.000000
3/11/2011	11:48:22 AM	H2 MFC set to  0.000000
3/11/2011	11:48:22 AM	BCl3 MFC set to  0.000000
3/11/2011	11:48:22 AM	PHl3 MFC set to  0.000000
3/11/2011	11:48:22 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:48:22 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:48:22 AM	Tube furnace set to 0
3/11/2011	11:48:54 AM	Helium valve closed
3/11/2011	11:48:54 AM	H2 valve closed
3/11/2011	11:48:54 AM	BCl3 valve closed
3/11/2011	11:48:54 AM	PH3 valve closed
3/11/2011	11:48:54 AM	SiCl4 pre valve closed
3/11/2011	11:48:54 AM	SiCl4 post valve closed
3/11/2011	11:48:54 AM	Bubbler valve closed
3/11/2011	11:48:54 AM	Main Vac valve opened
3/11/2011	11:48:54 AM	Bypass valve opened
3/11/2011	11:48:54 AM	Helium MFC set to  0.000000
3/11/2011	11:48:54 AM	H2 MFC set to  0.000000
3/11/2011	11:48:54 AM	BCl3 MFC set to  0.000000
3/11/2011	11:48:54 AM	PHl3 MFC set to  0.000000
3/11/2011	11:48:54 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:48:54 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:48:55 AM	Tube furnace set to 0
3/11/2011	11:49:55 AM	H2 valve closed
3/11/2011	11:49:55 AM	BCl3 valve closed
3/11/2011	11:49:55 AM	PH3 valve closed
3/11/2011	11:49:55 AM	SiCl4 pre valve closed
3/11/2011	11:49:55 AM	SiCl4 post valve closed
3/11/2011	11:49:55 AM	Bubbler valve closed
3/11/2011	11:49:55 AM	Helium valve opened
3/11/2011	11:49:55 AM	Main Vac valve opened
3/11/2011	11:49:55 AM	Bypass valve opened
3/11/2011	11:49:55 AM	Helium MFC set to  100.000000
3/11/2011	11:49:55 AM	H2 MFC set to  0.000000
3/11/2011	11:49:55 AM	BCl3 MFC set to  0.000000
3/11/2011	11:49:55 AM	PHl3 MFC set to  0.000000
3/11/2011	11:49:55 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:49:55 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:49:55 AM	Tube furnace set to 0
3/11/2011	11:50:55 AM	Helium valve closed
3/11/2011	11:50:55 AM	H2 valve closed
3/11/2011	11:50:55 AM	BCl3 valve closed
3/11/2011	11:50:55 AM	PH3 valve closed
3/11/2011	11:50:55 AM	SiCl4 pre valve closed
3/11/2011	11:50:55 AM	SiCl4 post valve closed
3/11/2011	11:50:55 AM	Bubbler valve closed
3/11/2011	11:50:55 AM	Main Vac valve opened
3/11/2011	11:50:55 AM	Bypass valve opened
3/11/2011	11:50:55 AM	Helium MFC set to  0.000000
3/11/2011	11:50:55 AM	H2 MFC set to  0.000000
3/11/2011	11:50:55 AM	BCl3 MFC set to  0.000000
3/11/2011	11:50:55 AM	PHl3 MFC set to  0.000000
3/11/2011	11:50:55 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:50:55 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:50:55 AM	Tube furnace set to 0
3/11/2011	11:51:55 AM	H2 valve closed
3/11/2011	11:51:55 AM	BCl3 valve closed
3/11/2011	11:51:55 AM	PH3 valve closed
3/11/2011	11:51:55 AM	SiCl4 pre valve closed
3/11/2011	11:51:55 AM	SiCl4 post valve closed
3/11/2011	11:51:55 AM	Bubbler valve closed
3/11/2011	11:51:55 AM	Helium valve opened
3/11/2011	11:51:55 AM	Main Vac valve opened
3/11/2011	11:51:55 AM	Bypass valve opened
3/11/2011	11:51:55 AM	Helium MFC set to  100.000000
3/11/2011	11:51:55 AM	H2 MFC set to  0.000000
3/11/2011	11:51:55 AM	BCl3 MFC set to  0.000000
3/11/2011	11:51:55 AM	PHl3 MFC set to  0.000000
3/11/2011	11:51:55 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:51:55 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:51:55 AM	Tube furnace set to 0
3/11/2011	11:52:55 AM	Helium valve closed
3/11/2011	11:52:55 AM	H2 valve closed
3/11/2011	11:52:55 AM	BCl3 valve closed
3/11/2011	11:52:55 AM	PH3 valve closed
3/11/2011	11:52:55 AM	SiCl4 pre valve closed
3/11/2011	11:52:55 AM	SiCl4 post valve closed
3/11/2011	11:52:55 AM	Bubbler valve closed
3/11/2011	11:52:55 AM	Main Vac valve opened
3/11/2011	11:52:55 AM	Bypass valve opened
3/11/2011	11:52:55 AM	Helium MFC set to  0.000000
3/11/2011	11:52:55 AM	H2 MFC set to  0.000000
3/11/2011	11:52:55 AM	BCl3 MFC set to  0.000000
3/11/2011	11:52:55 AM	PHl3 MFC set to  0.000000
3/11/2011	11:52:55 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:52:55 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:52:56 AM	Tube furnace set to 0
3/11/2011	11:53:56 AM	H2 valve closed
3/11/2011	11:53:56 AM	BCl3 valve closed
3/11/2011	11:53:56 AM	PH3 valve closed
3/11/2011	11:53:56 AM	SiCl4 pre valve closed
3/11/2011	11:53:56 AM	SiCl4 post valve closed
3/11/2011	11:53:56 AM	Bubbler valve closed
3/11/2011	11:53:56 AM	Helium valve opened
3/11/2011	11:53:56 AM	Main Vac valve opened
3/11/2011	11:53:56 AM	Bypass valve opened
3/11/2011	11:53:56 AM	Helium MFC set to  100.000000
3/11/2011	11:53:56 AM	H2 MFC set to  0.000000
3/11/2011	11:53:56 AM	BCl3 MFC set to  0.000000
3/11/2011	11:53:56 AM	PHl3 MFC set to  0.000000
3/11/2011	11:53:56 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:53:56 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:53:56 AM	Tube furnace set to 0
3/11/2011	11:54:56 AM	Helium valve closed
3/11/2011	11:54:56 AM	H2 valve closed
3/11/2011	11:54:56 AM	BCl3 valve closed
3/11/2011	11:54:56 AM	PH3 valve closed
3/11/2011	11:54:56 AM	SiCl4 pre valve closed
3/11/2011	11:54:56 AM	SiCl4 post valve closed
3/11/2011	11:54:56 AM	Bubbler valve closed
3/11/2011	11:54:56 AM	Main Vac valve opened
3/11/2011	11:54:56 AM	Bypass valve opened
3/11/2011	11:54:56 AM	Helium MFC set to  0.000000
3/11/2011	11:54:56 AM	H2 MFC set to  0.000000
3/11/2011	11:54:56 AM	BCl3 MFC set to  0.000000
3/11/2011	11:54:56 AM	PHl3 MFC set to  0.000000
3/11/2011	11:54:56 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:54:56 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:54:56 AM	Tube furnace set to 0
3/11/2011	11:55:56 AM	H2 valve closed
3/11/2011	11:55:56 AM	BCl3 valve closed
3/11/2011	11:55:56 AM	PH3 valve closed
3/11/2011	11:55:56 AM	SiCl4 pre valve closed
3/11/2011	11:55:56 AM	SiCl4 post valve closed
3/11/2011	11:55:56 AM	Bubbler valve closed
3/11/2011	11:55:56 AM	Helium valve opened
3/11/2011	11:55:56 AM	Main Vac valve opened
3/11/2011	11:55:56 AM	Bypass valve opened
3/11/2011	11:55:56 AM	Helium MFC set to  100.000000
3/11/2011	11:55:56 AM	H2 MFC set to  0.000000
3/11/2011	11:55:56 AM	BCl3 MFC set to  0.000000
3/11/2011	11:55:56 AM	PHl3 MFC set to  0.000000
3/11/2011	11:55:56 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:55:56 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:55:56 AM	Tube furnace set to 0
3/11/2011	11:56:56 AM	Helium valve closed
3/11/2011	11:56:56 AM	H2 valve closed
3/11/2011	11:56:56 AM	BCl3 valve closed
3/11/2011	11:56:56 AM	PH3 valve closed
3/11/2011	11:56:56 AM	SiCl4 pre valve closed
3/11/2011	11:56:56 AM	SiCl4 post valve closed
3/11/2011	11:56:56 AM	Bubbler valve closed
3/11/2011	11:56:56 AM	Main Vac valve opened
3/11/2011	11:56:56 AM	Bypass valve opened
3/11/2011	11:56:56 AM	Helium MFC set to  0.000000
3/11/2011	11:56:56 AM	H2 MFC set to  0.000000
3/11/2011	11:56:56 AM	BCl3 MFC set to  0.000000
3/11/2011	11:56:56 AM	PHl3 MFC set to  0.000000
3/11/2011	11:56:56 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:56:56 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:56:56 AM	Tube furnace set to 0
3/11/2011	11:57:56 AM	H2 valve closed
3/11/2011	11:57:56 AM	BCl3 valve closed
3/11/2011	11:57:56 AM	PH3 valve closed
3/11/2011	11:57:56 AM	SiCl4 pre valve closed
3/11/2011	11:57:56 AM	SiCl4 post valve closed
3/11/2011	11:57:56 AM	Bubbler valve closed
3/11/2011	11:57:56 AM	Helium valve opened
3/11/2011	11:57:56 AM	Main Vac valve opened
3/11/2011	11:57:56 AM	Bypass valve opened
3/11/2011	11:57:56 AM	Helium MFC set to  100.000000
3/11/2011	11:57:56 AM	H2 MFC set to  0.000000
3/11/2011	11:57:56 AM	BCl3 MFC set to  0.000000
3/11/2011	11:57:56 AM	PHl3 MFC set to  0.000000
3/11/2011	11:57:56 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:57:56 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:57:57 AM	Tube furnace set to 0
3/11/2011	11:58:57 AM	Helium valve closed
3/11/2011	11:58:57 AM	H2 valve closed
3/11/2011	11:58:57 AM	BCl3 valve closed
3/11/2011	11:58:57 AM	PH3 valve closed
3/11/2011	11:58:57 AM	SiCl4 pre valve closed
3/11/2011	11:58:57 AM	SiCl4 post valve closed
3/11/2011	11:58:57 AM	Bubbler valve closed
3/11/2011	11:58:57 AM	Main Vac valve opened
3/11/2011	11:58:57 AM	Bypass valve opened
3/11/2011	11:58:57 AM	Helium MFC set to  0.000000
3/11/2011	11:58:57 AM	H2 MFC set to  0.000000
3/11/2011	11:58:57 AM	BCl3 MFC set to  0.000000
3/11/2011	11:58:57 AM	PHl3 MFC set to  0.000000
3/11/2011	11:58:57 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:58:57 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:58:57 AM	Tube furnace set to 0
3/11/2011	11:59:57 AM	H2 valve closed
3/11/2011	11:59:57 AM	BCl3 valve closed
3/11/2011	11:59:57 AM	PH3 valve closed
3/11/2011	11:59:57 AM	SiCl4 pre valve closed
3/11/2011	11:59:57 AM	SiCl4 post valve closed
3/11/2011	11:59:57 AM	Bubbler valve closed
3/11/2011	11:59:57 AM	Helium valve opened
3/11/2011	11:59:57 AM	Main Vac valve opened
3/11/2011	11:59:57 AM	Bypass valve opened
3/11/2011	11:59:57 AM	Helium MFC set to  100.000000
3/11/2011	11:59:57 AM	H2 MFC set to  0.000000
3/11/2011	11:59:57 AM	BCl3 MFC set to  0.000000
3/11/2011	11:59:57 AM	PHl3 MFC set to  0.000000
3/11/2011	11:59:57 AM	SiCl4 MFC set to  0.000000
3/11/2011	11:59:57 AM	Bypass solenoid MFC set to  0.000000
3/11/2011	11:59:57 AM	Tube furnace set to 0
3/11/2011	12:00:57 PM	Helium valve closed
3/11/2011	12:00:57 PM	H2 valve closed
3/11/2011	12:00:57 PM	BCl3 valve closed
3/11/2011	12:00:57 PM	PH3 valve closed
3/11/2011	12:00:57 PM	SiCl4 pre valve closed
3/11/2011	12:00:57 PM	SiCl4 post valve closed
3/11/2011	12:00:57 PM	Bubbler valve closed
3/11/2011	12:00:57 PM	Main Vac valve opened
3/11/2011	12:00:57 PM	Bypass valve opened
3/11/2011	12:00:57 PM	Helium MFC set to  0.000000
3/11/2011	12:00:57 PM	H2 MFC set to  0.000000
3/11/2011	12:00:57 PM	BCl3 MFC set to  0.000000
3/11/2011	12:00:57 PM	PHl3 MFC set to  0.000000
3/11/2011	12:00:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:00:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:00:57 PM	Tube furnace set to 0
3/11/2011	12:01:57 PM	H2 valve closed
3/11/2011	12:01:57 PM	BCl3 valve closed
3/11/2011	12:01:57 PM	PH3 valve closed
3/11/2011	12:01:57 PM	SiCl4 pre valve closed
3/11/2011	12:01:57 PM	SiCl4 post valve closed
3/11/2011	12:01:57 PM	Bubbler valve closed
3/11/2011	12:01:57 PM	Helium valve opened
3/11/2011	12:01:57 PM	Main Vac valve opened
3/11/2011	12:01:57 PM	Bypass valve opened
3/11/2011	12:01:57 PM	Helium MFC set to  100.000000
3/11/2011	12:01:57 PM	H2 MFC set to  0.000000
3/11/2011	12:01:57 PM	BCl3 MFC set to  0.000000
3/11/2011	12:01:57 PM	PHl3 MFC set to  0.000000
3/11/2011	12:01:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:01:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:01:57 PM	Tube furnace set to 0
3/11/2011	12:02:57 PM	Helium valve closed
3/11/2011	12:02:57 PM	H2 valve closed
3/11/2011	12:02:57 PM	BCl3 valve closed
3/11/2011	12:02:57 PM	PH3 valve closed
3/11/2011	12:02:57 PM	SiCl4 pre valve closed
3/11/2011	12:02:57 PM	SiCl4 post valve closed
3/11/2011	12:02:57 PM	Bubbler valve closed
3/11/2011	12:02:57 PM	Main Vac valve opened
3/11/2011	12:02:57 PM	Bypass valve opened
3/11/2011	12:02:57 PM	Helium MFC set to  0.000000
3/11/2011	12:02:57 PM	H2 MFC set to  0.000000
3/11/2011	12:02:57 PM	BCl3 MFC set to  0.000000
3/11/2011	12:02:57 PM	PHl3 MFC set to  0.000000
3/11/2011	12:02:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:02:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:02:57 PM	Tube furnace set to 0
3/11/2011	12:03:58 PM	H2 valve closed
3/11/2011	12:03:58 PM	BCl3 valve closed
3/11/2011	12:03:58 PM	PH3 valve closed
3/11/2011	12:03:58 PM	SiCl4 pre valve closed
3/11/2011	12:03:58 PM	SiCl4 post valve closed
3/11/2011	12:03:58 PM	Bubbler valve closed
3/11/2011	12:03:58 PM	Helium valve opened
3/11/2011	12:03:58 PM	Main Vac valve opened
3/11/2011	12:03:58 PM	Bypass valve opened
3/11/2011	12:03:58 PM	Helium MFC set to  100.000000
3/11/2011	12:03:58 PM	H2 MFC set to  0.000000
3/11/2011	12:03:58 PM	BCl3 MFC set to  0.000000
3/11/2011	12:03:58 PM	PHl3 MFC set to  0.000000
3/11/2011	12:03:58 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:03:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:03:58 PM	Tube furnace set to 0
3/11/2011	12:04:58 PM	Helium valve closed
3/11/2011	12:04:58 PM	H2 valve closed
3/11/2011	12:04:58 PM	BCl3 valve closed
3/11/2011	12:04:58 PM	PH3 valve closed
3/11/2011	12:04:58 PM	SiCl4 pre valve closed
3/11/2011	12:04:58 PM	SiCl4 post valve closed
3/11/2011	12:04:58 PM	Bubbler valve closed
3/11/2011	12:04:58 PM	Main Vac valve opened
3/11/2011	12:04:58 PM	Bypass valve opened
3/11/2011	12:04:58 PM	Helium MFC set to  0.000000
3/11/2011	12:04:58 PM	H2 MFC set to  0.000000
3/11/2011	12:04:58 PM	BCl3 MFC set to  0.000000
3/11/2011	12:04:58 PM	PHl3 MFC set to  0.000000
3/11/2011	12:04:58 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:04:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:04:58 PM	Tube furnace set to 0
3/11/2011	12:05:58 PM	H2 valve closed
3/11/2011	12:05:58 PM	BCl3 valve closed
3/11/2011	12:05:58 PM	PH3 valve closed
3/11/2011	12:05:58 PM	SiCl4 pre valve closed
3/11/2011	12:05:58 PM	SiCl4 post valve closed
3/11/2011	12:05:58 PM	Bubbler valve closed
3/11/2011	12:05:58 PM	Helium valve opened
3/11/2011	12:05:58 PM	Main Vac valve opened
3/11/2011	12:05:58 PM	Bypass valve opened
3/11/2011	12:05:58 PM	Helium MFC set to  100.000000
3/11/2011	12:05:58 PM	H2 MFC set to  0.000000
3/11/2011	12:05:58 PM	BCl3 MFC set to  0.000000
3/11/2011	12:05:58 PM	PHl3 MFC set to  0.000000
3/11/2011	12:05:58 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:05:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:05:58 PM	Tube furnace set to 0
3/11/2011	12:06:58 PM	Helium valve closed
3/11/2011	12:06:58 PM	H2 valve closed
3/11/2011	12:06:58 PM	BCl3 valve closed
3/11/2011	12:06:58 PM	PH3 valve closed
3/11/2011	12:06:58 PM	SiCl4 pre valve closed
3/11/2011	12:06:58 PM	SiCl4 post valve closed
3/11/2011	12:06:58 PM	Bubbler valve closed
3/11/2011	12:06:58 PM	Main Vac valve opened
3/11/2011	12:06:58 PM	Bypass valve opened
3/11/2011	12:06:58 PM	Helium MFC set to  0.000000
3/11/2011	12:06:58 PM	H2 MFC set to  0.000000
3/11/2011	12:06:58 PM	BCl3 MFC set to  0.000000
3/11/2011	12:06:58 PM	PHl3 MFC set to  0.000000
3/11/2011	12:06:58 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:06:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:06:58 PM	Tube furnace set to 0
3/11/2011	12:07:58 PM	H2 valve closed
3/11/2011	12:07:58 PM	BCl3 valve closed
3/11/2011	12:07:58 PM	PH3 valve closed
3/11/2011	12:07:58 PM	SiCl4 pre valve closed
3/11/2011	12:07:58 PM	SiCl4 post valve closed
3/11/2011	12:07:58 PM	Bubbler valve closed
3/11/2011	12:07:58 PM	Helium valve opened
3/11/2011	12:07:58 PM	Main Vac valve opened
3/11/2011	12:07:58 PM	Bypass valve opened
3/11/2011	12:07:58 PM	Helium MFC set to  100.000000
3/11/2011	12:07:58 PM	H2 MFC set to  0.000000
3/11/2011	12:07:58 PM	BCl3 MFC set to  0.000000
3/11/2011	12:07:58 PM	PHl3 MFC set to  0.000000
3/11/2011	12:07:58 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:07:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:07:58 PM	Tube furnace set to 0
3/11/2011	12:08:59 PM	Helium valve closed
3/11/2011	12:08:59 PM	H2 valve closed
3/11/2011	12:08:59 PM	BCl3 valve closed
3/11/2011	12:08:59 PM	PH3 valve closed
3/11/2011	12:08:59 PM	SiCl4 pre valve closed
3/11/2011	12:08:59 PM	SiCl4 post valve closed
3/11/2011	12:08:59 PM	Bubbler valve closed
3/11/2011	12:08:59 PM	Main Vac valve opened
3/11/2011	12:08:59 PM	Bypass valve opened
3/11/2011	12:08:59 PM	Helium MFC set to  0.000000
3/11/2011	12:08:59 PM	H2 MFC set to  0.000000
3/11/2011	12:08:59 PM	BCl3 MFC set to  0.000000
3/11/2011	12:08:59 PM	PHl3 MFC set to  0.000000
3/11/2011	12:08:59 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:08:59 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:08:59 PM	Tube furnace set to 0
3/11/2011	12:09:00 PM	Run finished at 12:09 PM
3/11/2011	12:09:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	12:47:23 PM	Recipe started at 12:47 PM
3/11/2011	12:47:23 PM	Helium valve closed
3/11/2011	12:47:23 PM	BCl3 valve closed
3/11/2011	12:47:23 PM	PH3 valve closed
3/11/2011	12:47:23 PM	SiCl4 pre valve closed
3/11/2011	12:47:23 PM	SiCl4 post valve closed
3/11/2011	12:47:23 PM	Main Vac valve closed
3/11/2011	12:47:23 PM	Bypass valve closed
3/11/2011	12:47:23 PM	Bubbler valve closed
3/11/2011	12:47:23 PM	H2 valve opened
3/11/2011	12:47:23 PM	Helium MFC set to  0.000000
3/11/2011	12:47:23 PM	H2 MFC set to  500.000000
3/11/2011	12:47:23 PM	BCl3 MFC set to  0.000000
3/11/2011	12:47:23 PM	PHl3 MFC set to  0.000000
3/11/2011	12:47:23 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:47:23 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:47:23 PM	Tube furnace set to 0
3/11/2011	12:48:43 PM	Helium valve closed
3/11/2011	12:48:43 PM	BCl3 valve closed
3/11/2011	12:48:43 PM	PH3 valve closed
3/11/2011	12:48:43 PM	SiCl4 pre valve closed
3/11/2011	12:48:43 PM	SiCl4 post valve closed
3/11/2011	12:48:43 PM	Main Vac valve closed
3/11/2011	12:48:43 PM	Bypass valve closed
3/11/2011	12:48:43 PM	H2 valve opened
3/11/2011	12:48:43 PM	Bubbler valve opened
3/11/2011	12:48:43 PM	Helium MFC set to  0.000000
3/11/2011	12:48:43 PM	H2 MFC set to  500.000000
3/11/2011	12:48:43 PM	BCl3 MFC set to  0.000000
3/11/2011	12:48:43 PM	PHl3 MFC set to  0.000000
3/11/2011	12:48:43 PM	SiCl4 MFC set to  0.000000
3/11/2011	12:48:43 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	12:48:43 PM	Tube furnace set to 1000
3/11/2011	1:08:43 PM	Helium valve closed
3/11/2011	1:08:43 PM	PH3 valve closed
3/11/2011	1:08:43 PM	Main Vac valve closed
3/11/2011	1:08:43 PM	Bypass valve closed
3/11/2011	1:08:43 PM	H2 valve opened
3/11/2011	1:08:43 PM	BCl3 valve opened
3/11/2011	1:08:43 PM	SiCl4 pre valve opened
3/11/2011	1:08:43 PM	SiCl4 post valve opened
3/11/2011	1:08:43 PM	Bubbler valve opened
3/11/2011	1:08:43 PM	Helium MFC set to  0.000000
3/11/2011	1:08:43 PM	H2 MFC set to  500.000000
3/11/2011	1:08:43 PM	BCl3 MFC set to  3.000000
3/11/2011	1:08:43 PM	PHl3 MFC set to  0.000000
3/11/2011	1:08:43 PM	SiCl4 MFC set to  50.000000
3/11/2011	1:08:43 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:08:43 PM	Tube furnace set to 1000
3/11/2011	1:28:43 PM	H2 valve closed
3/11/2011	1:28:43 PM	BCl3 valve closed
3/11/2011	1:28:43 PM	PH3 valve closed
3/11/2011	1:28:43 PM	SiCl4 pre valve closed
3/11/2011	1:28:43 PM	SiCl4 post valve closed
3/11/2011	1:28:43 PM	Main Vac valve closed
3/11/2011	1:28:43 PM	Bypass valve closed
3/11/2011	1:28:43 PM	Helium valve opened
3/11/2011	1:28:43 PM	Bubbler valve opened
3/11/2011	1:28:43 PM	Helium MFC set to  500.000000
3/11/2011	1:28:43 PM	H2 MFC set to  0.000000
3/11/2011	1:28:43 PM	BCl3 MFC set to  0.000000
3/11/2011	1:28:43 PM	PHl3 MFC set to  0.000000
3/11/2011	1:28:43 PM	SiCl4 MFC set to  0.000000
3/11/2011	1:28:43 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:28:44 PM	Tube furnace set to 0
3/11/2011	1:48:44 PM	Helium valve closed
3/11/2011	1:48:44 PM	H2 valve closed
3/11/2011	1:48:44 PM	BCl3 valve closed
3/11/2011	1:48:44 PM	PH3 valve closed
3/11/2011	1:48:44 PM	SiCl4 pre valve closed
3/11/2011	1:48:44 PM	SiCl4 post valve closed
3/11/2011	1:48:44 PM	Main Vac valve closed
3/11/2011	1:48:44 PM	Bypass valve closed
3/11/2011	1:48:44 PM	Bubbler valve closed
3/11/2011	1:48:44 PM	Helium MFC set to  0.000000
3/11/2011	1:48:44 PM	H2 MFC set to  0.000000
3/11/2011	1:48:44 PM	BCl3 MFC set to  0.000000
3/11/2011	1:48:44 PM	PHl3 MFC set to  0.000000
3/11/2011	1:48:44 PM	SiCl4 MFC set to  0.000000
3/11/2011	1:48:44 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:48:44 PM	Tube furnace set to 0
3/11/2011	1:48:44 PM	Run finished at 1:48 PM
3/11/2011	1:58:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	1:58:15 PM	Recipe started at 1:58 PM
3/11/2011	1:58:15 PM	Helium valve closed
3/11/2011	1:58:15 PM	H2 valve closed
3/11/2011	1:58:15 PM	BCl3 valve closed
3/11/2011	1:58:15 PM	PH3 valve closed
3/11/2011	1:58:15 PM	SiCl4 pre valve closed
3/11/2011	1:58:15 PM	SiCl4 post valve closed
3/11/2011	1:58:15 PM	Main Vac valve closed
3/11/2011	1:58:15 PM	Bubbler valve closed
3/11/2011	1:58:15 PM	Bypass valve opened
3/11/2011	1:58:15 PM	Helium MFC set to  0.000000
3/11/2011	1:58:15 PM	H2 MFC set to  0.000000
3/11/2011	1:58:15 PM	BCl3 MFC set to  0.000000
3/11/2011	1:58:15 PM	PHl3 MFC set to  0.000000
3/11/2011	1:58:15 PM	SiCl4 MFC set to  0.000000
3/11/2011	1:58:15 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:58:15 PM	Tube furnace set to 0
3/11/2011	1:58:47 PM	Helium valve closed
3/11/2011	1:58:47 PM	H2 valve closed
3/11/2011	1:58:47 PM	BCl3 valve closed
3/11/2011	1:58:47 PM	PH3 valve closed
3/11/2011	1:58:47 PM	SiCl4 pre valve closed
3/11/2011	1:58:47 PM	SiCl4 post valve closed
3/11/2011	1:58:47 PM	Bubbler valve closed
3/11/2011	1:58:47 PM	Main Vac valve opened
3/11/2011	1:58:47 PM	Bypass valve opened
3/11/2011	1:58:47 PM	Helium MFC set to  0.000000
3/11/2011	1:58:47 PM	H2 MFC set to  0.000000
3/11/2011	1:58:47 PM	BCl3 MFC set to  0.000000
3/11/2011	1:58:47 PM	PHl3 MFC set to  0.000000
3/11/2011	1:58:47 PM	SiCl4 MFC set to  0.000000
3/11/2011	1:58:47 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:58:48 PM	Tube furnace set to 0
3/11/2011	1:59:48 PM	H2 valve closed
3/11/2011	1:59:48 PM	BCl3 valve closed
3/11/2011	1:59:48 PM	PH3 valve closed
3/11/2011	1:59:48 PM	SiCl4 pre valve closed
3/11/2011	1:59:48 PM	SiCl4 post valve closed
3/11/2011	1:59:48 PM	Bubbler valve closed
3/11/2011	1:59:48 PM	Helium valve opened
3/11/2011	1:59:48 PM	Main Vac valve opened
3/11/2011	1:59:48 PM	Bypass valve opened
3/11/2011	1:59:48 PM	Helium MFC set to  100.000000
3/11/2011	1:59:48 PM	H2 MFC set to  0.000000
3/11/2011	1:59:48 PM	BCl3 MFC set to  0.000000
3/11/2011	1:59:48 PM	PHl3 MFC set to  0.000000
3/11/2011	1:59:48 PM	SiCl4 MFC set to  0.000000
3/11/2011	1:59:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	1:59:48 PM	Tube furnace set to 0
3/11/2011	2:00:48 PM	Helium valve closed
3/11/2011	2:00:48 PM	H2 valve closed
3/11/2011	2:00:48 PM	BCl3 valve closed
3/11/2011	2:00:48 PM	PH3 valve closed
3/11/2011	2:00:48 PM	SiCl4 pre valve closed
3/11/2011	2:00:48 PM	SiCl4 post valve closed
3/11/2011	2:00:48 PM	Bubbler valve closed
3/11/2011	2:00:48 PM	Main Vac valve opened
3/11/2011	2:00:48 PM	Bypass valve opened
3/11/2011	2:00:48 PM	Helium MFC set to  0.000000
3/11/2011	2:00:48 PM	H2 MFC set to  0.000000
3/11/2011	2:00:48 PM	BCl3 MFC set to  0.000000
3/11/2011	2:00:48 PM	PHl3 MFC set to  0.000000
3/11/2011	2:00:48 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:00:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:00:48 PM	Tube furnace set to 0
3/11/2011	2:01:48 PM	H2 valve closed
3/11/2011	2:01:48 PM	BCl3 valve closed
3/11/2011	2:01:48 PM	PH3 valve closed
3/11/2011	2:01:48 PM	SiCl4 pre valve closed
3/11/2011	2:01:48 PM	SiCl4 post valve closed
3/11/2011	2:01:48 PM	Bubbler valve closed
3/11/2011	2:01:48 PM	Helium valve opened
3/11/2011	2:01:48 PM	Main Vac valve opened
3/11/2011	2:01:48 PM	Bypass valve opened
3/11/2011	2:01:48 PM	Helium MFC set to  100.000000
3/11/2011	2:01:48 PM	H2 MFC set to  0.000000
3/11/2011	2:01:48 PM	BCl3 MFC set to  0.000000
3/11/2011	2:01:48 PM	PHl3 MFC set to  0.000000
3/11/2011	2:01:48 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:01:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:01:48 PM	Tube furnace set to 0
3/11/2011	2:02:48 PM	Helium valve closed
3/11/2011	2:02:48 PM	H2 valve closed
3/11/2011	2:02:48 PM	BCl3 valve closed
3/11/2011	2:02:48 PM	PH3 valve closed
3/11/2011	2:02:48 PM	SiCl4 pre valve closed
3/11/2011	2:02:48 PM	SiCl4 post valve closed
3/11/2011	2:02:48 PM	Bubbler valve closed
3/11/2011	2:02:48 PM	Main Vac valve opened
3/11/2011	2:02:48 PM	Bypass valve opened
3/11/2011	2:02:48 PM	Helium MFC set to  0.000000
3/11/2011	2:02:48 PM	H2 MFC set to  0.000000
3/11/2011	2:02:48 PM	BCl3 MFC set to  0.000000
3/11/2011	2:02:48 PM	PHl3 MFC set to  0.000000
3/11/2011	2:02:48 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:02:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:02:48 PM	Tube furnace set to 0
3/11/2011	2:03:48 PM	H2 valve closed
3/11/2011	2:03:48 PM	BCl3 valve closed
3/11/2011	2:03:48 PM	PH3 valve closed
3/11/2011	2:03:48 PM	SiCl4 pre valve closed
3/11/2011	2:03:48 PM	SiCl4 post valve closed
3/11/2011	2:03:48 PM	Bubbler valve closed
3/11/2011	2:03:48 PM	Helium valve opened
3/11/2011	2:03:48 PM	Main Vac valve opened
3/11/2011	2:03:48 PM	Bypass valve opened
3/11/2011	2:03:48 PM	Helium MFC set to  100.000000
3/11/2011	2:03:48 PM	H2 MFC set to  0.000000
3/11/2011	2:03:48 PM	BCl3 MFC set to  0.000000
3/11/2011	2:03:48 PM	PHl3 MFC set to  0.000000
3/11/2011	2:03:48 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:03:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:03:49 PM	Tube furnace set to 0
3/11/2011	2:04:49 PM	Helium valve closed
3/11/2011	2:04:49 PM	H2 valve closed
3/11/2011	2:04:49 PM	BCl3 valve closed
3/11/2011	2:04:49 PM	PH3 valve closed
3/11/2011	2:04:49 PM	SiCl4 pre valve closed
3/11/2011	2:04:49 PM	SiCl4 post valve closed
3/11/2011	2:04:49 PM	Bubbler valve closed
3/11/2011	2:04:49 PM	Main Vac valve opened
3/11/2011	2:04:49 PM	Bypass valve opened
3/11/2011	2:04:49 PM	Helium MFC set to  0.000000
3/11/2011	2:04:49 PM	H2 MFC set to  0.000000
3/11/2011	2:04:49 PM	BCl3 MFC set to  0.000000
3/11/2011	2:04:49 PM	PHl3 MFC set to  0.000000
3/11/2011	2:04:49 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:04:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:04:49 PM	Tube furnace set to 0
3/11/2011	2:05:49 PM	H2 valve closed
3/11/2011	2:05:49 PM	BCl3 valve closed
3/11/2011	2:05:49 PM	PH3 valve closed
3/11/2011	2:05:49 PM	SiCl4 pre valve closed
3/11/2011	2:05:49 PM	SiCl4 post valve closed
3/11/2011	2:05:49 PM	Bubbler valve closed
3/11/2011	2:05:49 PM	Helium valve opened
3/11/2011	2:05:49 PM	Main Vac valve opened
3/11/2011	2:05:49 PM	Bypass valve opened
3/11/2011	2:05:49 PM	Helium MFC set to  100.000000
3/11/2011	2:05:49 PM	H2 MFC set to  0.000000
3/11/2011	2:05:49 PM	BCl3 MFC set to  0.000000
3/11/2011	2:05:49 PM	PHl3 MFC set to  0.000000
3/11/2011	2:05:49 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:05:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:05:49 PM	Tube furnace set to 0
3/11/2011	2:06:49 PM	Helium valve closed
3/11/2011	2:06:49 PM	H2 valve closed
3/11/2011	2:06:49 PM	BCl3 valve closed
3/11/2011	2:06:49 PM	PH3 valve closed
3/11/2011	2:06:49 PM	SiCl4 pre valve closed
3/11/2011	2:06:49 PM	SiCl4 post valve closed
3/11/2011	2:06:49 PM	Bubbler valve closed
3/11/2011	2:06:49 PM	Main Vac valve opened
3/11/2011	2:06:49 PM	Bypass valve opened
3/11/2011	2:06:49 PM	Helium MFC set to  0.000000
3/11/2011	2:06:49 PM	H2 MFC set to  0.000000
3/11/2011	2:06:49 PM	BCl3 MFC set to  0.000000
3/11/2011	2:06:49 PM	PHl3 MFC set to  0.000000
3/11/2011	2:06:49 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:06:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:06:49 PM	Tube furnace set to 0
3/11/2011	2:07:49 PM	H2 valve closed
3/11/2011	2:07:49 PM	BCl3 valve closed
3/11/2011	2:07:49 PM	PH3 valve closed
3/11/2011	2:07:49 PM	SiCl4 pre valve closed
3/11/2011	2:07:49 PM	SiCl4 post valve closed
3/11/2011	2:07:49 PM	Bubbler valve closed
3/11/2011	2:07:49 PM	Helium valve opened
3/11/2011	2:07:49 PM	Main Vac valve opened
3/11/2011	2:07:49 PM	Bypass valve opened
3/11/2011	2:07:49 PM	Helium MFC set to  100.000000
3/11/2011	2:07:49 PM	H2 MFC set to  0.000000
3/11/2011	2:07:49 PM	BCl3 MFC set to  0.000000
3/11/2011	2:07:49 PM	PHl3 MFC set to  0.000000
3/11/2011	2:07:49 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:07:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:07:49 PM	Tube furnace set to 0
3/11/2011	2:08:49 PM	Helium valve closed
3/11/2011	2:08:49 PM	H2 valve closed
3/11/2011	2:08:49 PM	BCl3 valve closed
3/11/2011	2:08:49 PM	PH3 valve closed
3/11/2011	2:08:49 PM	SiCl4 pre valve closed
3/11/2011	2:08:49 PM	SiCl4 post valve closed
3/11/2011	2:08:49 PM	Bubbler valve closed
3/11/2011	2:08:49 PM	Main Vac valve opened
3/11/2011	2:08:49 PM	Bypass valve opened
3/11/2011	2:08:49 PM	Helium MFC set to  0.000000
3/11/2011	2:08:49 PM	H2 MFC set to  0.000000
3/11/2011	2:08:49 PM	BCl3 MFC set to  0.000000
3/11/2011	2:08:49 PM	PHl3 MFC set to  0.000000
3/11/2011	2:08:49 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:08:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:08:50 PM	Tube furnace set to 0
3/11/2011	2:09:50 PM	H2 valve closed
3/11/2011	2:09:50 PM	BCl3 valve closed
3/11/2011	2:09:50 PM	PH3 valve closed
3/11/2011	2:09:50 PM	SiCl4 pre valve closed
3/11/2011	2:09:50 PM	SiCl4 post valve closed
3/11/2011	2:09:50 PM	Bubbler valve closed
3/11/2011	2:09:50 PM	Helium valve opened
3/11/2011	2:09:50 PM	Main Vac valve opened
3/11/2011	2:09:50 PM	Bypass valve opened
3/11/2011	2:09:50 PM	Helium MFC set to  100.000000
3/11/2011	2:09:50 PM	H2 MFC set to  0.000000
3/11/2011	2:09:50 PM	BCl3 MFC set to  0.000000
3/11/2011	2:09:50 PM	PHl3 MFC set to  0.000000
3/11/2011	2:09:50 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:09:50 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:09:50 PM	Tube furnace set to 0
3/11/2011	2:10:50 PM	Helium valve closed
3/11/2011	2:10:50 PM	H2 valve closed
3/11/2011	2:10:50 PM	BCl3 valve closed
3/11/2011	2:10:50 PM	PH3 valve closed
3/11/2011	2:10:50 PM	SiCl4 pre valve closed
3/11/2011	2:10:50 PM	SiCl4 post valve closed
3/11/2011	2:10:50 PM	Bubbler valve closed
3/11/2011	2:10:50 PM	Main Vac valve opened
3/11/2011	2:10:50 PM	Bypass valve opened
3/11/2011	2:10:50 PM	Helium MFC set to  0.000000
3/11/2011	2:10:50 PM	H2 MFC set to  0.000000
3/11/2011	2:10:50 PM	BCl3 MFC set to  0.000000
3/11/2011	2:10:50 PM	PHl3 MFC set to  0.000000
3/11/2011	2:10:50 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:10:50 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:10:50 PM	Tube furnace set to 0
3/11/2011	2:11:50 PM	H2 valve closed
3/11/2011	2:11:50 PM	BCl3 valve closed
3/11/2011	2:11:50 PM	PH3 valve closed
3/11/2011	2:11:50 PM	SiCl4 pre valve closed
3/11/2011	2:11:50 PM	SiCl4 post valve closed
3/11/2011	2:11:50 PM	Bubbler valve closed
3/11/2011	2:11:50 PM	Helium valve opened
3/11/2011	2:11:50 PM	Main Vac valve opened
3/11/2011	2:11:50 PM	Bypass valve opened
3/11/2011	2:11:50 PM	Helium MFC set to  100.000000
3/11/2011	2:11:50 PM	H2 MFC set to  0.000000
3/11/2011	2:11:50 PM	BCl3 MFC set to  0.000000
3/11/2011	2:11:50 PM	PHl3 MFC set to  0.000000
3/11/2011	2:11:50 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:11:50 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:11:50 PM	Tube furnace set to 0
3/11/2011	2:12:50 PM	Helium valve closed
3/11/2011	2:12:50 PM	H2 valve closed
3/11/2011	2:12:50 PM	BCl3 valve closed
3/11/2011	2:12:50 PM	PH3 valve closed
3/11/2011	2:12:50 PM	SiCl4 pre valve closed
3/11/2011	2:12:50 PM	SiCl4 post valve closed
3/11/2011	2:12:50 PM	Bubbler valve closed
3/11/2011	2:12:50 PM	Main Vac valve opened
3/11/2011	2:12:50 PM	Bypass valve opened
3/11/2011	2:12:50 PM	Helium MFC set to  0.000000
3/11/2011	2:12:50 PM	H2 MFC set to  0.000000
3/11/2011	2:12:50 PM	BCl3 MFC set to  0.000000
3/11/2011	2:12:50 PM	PHl3 MFC set to  0.000000
3/11/2011	2:12:50 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:12:50 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:12:50 PM	Tube furnace set to 0
3/11/2011	2:13:50 PM	H2 valve closed
3/11/2011	2:13:50 PM	BCl3 valve closed
3/11/2011	2:13:50 PM	PH3 valve closed
3/11/2011	2:13:50 PM	SiCl4 pre valve closed
3/11/2011	2:13:50 PM	SiCl4 post valve closed
3/11/2011	2:13:50 PM	Bubbler valve closed
3/11/2011	2:13:50 PM	Helium valve opened
3/11/2011	2:13:50 PM	Main Vac valve opened
3/11/2011	2:13:50 PM	Bypass valve opened
3/11/2011	2:13:50 PM	Helium MFC set to  100.000000
3/11/2011	2:13:50 PM	H2 MFC set to  0.000000
3/11/2011	2:13:50 PM	BCl3 MFC set to  0.000000
3/11/2011	2:13:50 PM	PHl3 MFC set to  0.000000
3/11/2011	2:13:50 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:13:50 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:13:51 PM	Tube furnace set to 0
3/11/2011	2:14:51 PM	Helium valve closed
3/11/2011	2:14:51 PM	H2 valve closed
3/11/2011	2:14:51 PM	BCl3 valve closed
3/11/2011	2:14:51 PM	PH3 valve closed
3/11/2011	2:14:51 PM	SiCl4 pre valve closed
3/11/2011	2:14:51 PM	SiCl4 post valve closed
3/11/2011	2:14:51 PM	Bubbler valve closed
3/11/2011	2:14:51 PM	Main Vac valve opened
3/11/2011	2:14:51 PM	Bypass valve opened
3/11/2011	2:14:51 PM	Helium MFC set to  0.000000
3/11/2011	2:14:51 PM	H2 MFC set to  0.000000
3/11/2011	2:14:51 PM	BCl3 MFC set to  0.000000
3/11/2011	2:14:51 PM	PHl3 MFC set to  0.000000
3/11/2011	2:14:51 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:14:51 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:14:51 PM	Tube furnace set to 0
3/11/2011	2:15:51 PM	H2 valve closed
3/11/2011	2:15:51 PM	BCl3 valve closed
3/11/2011	2:15:51 PM	PH3 valve closed
3/11/2011	2:15:51 PM	SiCl4 pre valve closed
3/11/2011	2:15:51 PM	SiCl4 post valve closed
3/11/2011	2:15:51 PM	Bubbler valve closed
3/11/2011	2:15:51 PM	Helium valve opened
3/11/2011	2:15:51 PM	Main Vac valve opened
3/11/2011	2:15:51 PM	Bypass valve opened
3/11/2011	2:15:51 PM	Helium MFC set to  100.000000
3/11/2011	2:15:51 PM	H2 MFC set to  0.000000
3/11/2011	2:15:51 PM	BCl3 MFC set to  0.000000
3/11/2011	2:15:51 PM	PHl3 MFC set to  0.000000
3/11/2011	2:15:51 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:15:51 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:15:51 PM	Tube furnace set to 0
3/11/2011	2:16:51 PM	Helium valve closed
3/11/2011	2:16:51 PM	H2 valve closed
3/11/2011	2:16:51 PM	BCl3 valve closed
3/11/2011	2:16:51 PM	PH3 valve closed
3/11/2011	2:16:51 PM	SiCl4 pre valve closed
3/11/2011	2:16:51 PM	SiCl4 post valve closed
3/11/2011	2:16:51 PM	Bubbler valve closed
3/11/2011	2:16:51 PM	Main Vac valve opened
3/11/2011	2:16:51 PM	Bypass valve opened
3/11/2011	2:16:51 PM	Helium MFC set to  0.000000
3/11/2011	2:16:51 PM	H2 MFC set to  0.000000
3/11/2011	2:16:51 PM	BCl3 MFC set to  0.000000
3/11/2011	2:16:51 PM	PHl3 MFC set to  0.000000
3/11/2011	2:16:51 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:16:51 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:16:51 PM	Tube furnace set to 0
3/11/2011	2:17:51 PM	H2 valve closed
3/11/2011	2:17:51 PM	BCl3 valve closed
3/11/2011	2:17:51 PM	PH3 valve closed
3/11/2011	2:17:51 PM	SiCl4 pre valve closed
3/11/2011	2:17:51 PM	SiCl4 post valve closed
3/11/2011	2:17:51 PM	Bubbler valve closed
3/11/2011	2:17:51 PM	Helium valve opened
3/11/2011	2:17:51 PM	Main Vac valve opened
3/11/2011	2:17:51 PM	Bypass valve opened
3/11/2011	2:17:51 PM	Helium MFC set to  100.000000
3/11/2011	2:17:51 PM	H2 MFC set to  0.000000
3/11/2011	2:17:51 PM	BCl3 MFC set to  0.000000
3/11/2011	2:17:51 PM	PHl3 MFC set to  0.000000
3/11/2011	2:17:51 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:17:51 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:17:51 PM	Tube furnace set to 0
3/11/2011	2:18:51 PM	Helium valve closed
3/11/2011	2:18:51 PM	H2 valve closed
3/11/2011	2:18:51 PM	BCl3 valve closed
3/11/2011	2:18:51 PM	PH3 valve closed
3/11/2011	2:18:51 PM	SiCl4 pre valve closed
3/11/2011	2:18:51 PM	SiCl4 post valve closed
3/11/2011	2:18:51 PM	Bubbler valve closed
3/11/2011	2:18:51 PM	Main Vac valve opened
3/11/2011	2:18:51 PM	Bypass valve opened
3/11/2011	2:18:51 PM	Helium MFC set to  0.000000
3/11/2011	2:18:51 PM	H2 MFC set to  0.000000
3/11/2011	2:18:51 PM	BCl3 MFC set to  0.000000
3/11/2011	2:18:51 PM	PHl3 MFC set to  0.000000
3/11/2011	2:18:51 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:18:51 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:18:52 PM	Tube furnace set to 0
3/11/2011	2:18:53 PM	Run finished at 2:18 PM
3/11/2011	2:18:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	2:23:14 PM	Recipe started at 2:23 PM
3/11/2011	2:23:14 PM	Helium valve closed
3/11/2011	2:23:14 PM	BCl3 valve closed
3/11/2011	2:23:14 PM	PH3 valve closed
3/11/2011	2:23:14 PM	SiCl4 pre valve closed
3/11/2011	2:23:14 PM	SiCl4 post valve closed
3/11/2011	2:23:14 PM	Main Vac valve closed
3/11/2011	2:23:14 PM	Bypass valve closed
3/11/2011	2:23:14 PM	Bubbler valve closed
3/11/2011	2:23:14 PM	H2 valve opened
3/11/2011	2:23:14 PM	Helium MFC set to  0.000000
3/11/2011	2:23:14 PM	H2 MFC set to  500.000000
3/11/2011	2:23:14 PM	BCl3 MFC set to  0.000000
3/11/2011	2:23:14 PM	PHl3 MFC set to  0.000000
3/11/2011	2:23:14 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:23:14 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:23:15 PM	Tube furnace set to 0
3/11/2011	2:24:33 PM	Helium valve closed
3/11/2011	2:24:33 PM	BCl3 valve closed
3/11/2011	2:24:33 PM	PH3 valve closed
3/11/2011	2:24:33 PM	SiCl4 pre valve closed
3/11/2011	2:24:33 PM	SiCl4 post valve closed
3/11/2011	2:24:33 PM	Main Vac valve closed
3/11/2011	2:24:33 PM	Bypass valve closed
3/11/2011	2:24:33 PM	H2 valve opened
3/11/2011	2:24:33 PM	Bubbler valve opened
3/11/2011	2:24:33 PM	Helium MFC set to  0.000000
3/11/2011	2:24:33 PM	H2 MFC set to  500.000000
3/11/2011	2:24:33 PM	BCl3 MFC set to  0.000000
3/11/2011	2:24:33 PM	PHl3 MFC set to  0.000000
3/11/2011	2:24:33 PM	SiCl4 MFC set to  0.000000
3/11/2011	2:24:33 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:24:33 PM	Tube furnace set to 1000
3/11/2011	2:44:33 PM	Helium valve closed
3/11/2011	2:44:33 PM	PH3 valve closed
3/11/2011	2:44:33 PM	Main Vac valve closed
3/11/2011	2:44:33 PM	Bypass valve closed
3/11/2011	2:44:33 PM	H2 valve opened
3/11/2011	2:44:33 PM	BCl3 valve opened
3/11/2011	2:44:33 PM	SiCl4 pre valve opened
3/11/2011	2:44:33 PM	SiCl4 post valve opened
3/11/2011	2:44:33 PM	Bubbler valve opened
3/11/2011	2:44:33 PM	Helium MFC set to  0.000000
3/11/2011	2:44:33 PM	H2 MFC set to  500.000000
3/11/2011	2:44:33 PM	BCl3 MFC set to  3.000000
3/11/2011	2:44:33 PM	PHl3 MFC set to  0.000000
3/11/2011	2:44:33 PM	SiCl4 MFC set to  50.000000
3/11/2011	2:44:33 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	2:44:33 PM	Tube furnace set to 1000
3/11/2011	3:04:33 PM	H2 valve closed
3/11/2011	3:04:33 PM	BCl3 valve closed
3/11/2011	3:04:33 PM	PH3 valve closed
3/11/2011	3:04:33 PM	SiCl4 pre valve closed
3/11/2011	3:04:33 PM	SiCl4 post valve closed
3/11/2011	3:04:33 PM	Main Vac valve closed
3/11/2011	3:04:33 PM	Bypass valve closed
3/11/2011	3:04:33 PM	Helium valve opened
3/11/2011	3:04:33 PM	Bubbler valve opened
3/11/2011	3:04:33 PM	Helium MFC set to  500.000000
3/11/2011	3:04:33 PM	H2 MFC set to  0.000000
3/11/2011	3:04:33 PM	BCl3 MFC set to  0.000000
3/11/2011	3:04:33 PM	PHl3 MFC set to  0.000000
3/11/2011	3:04:33 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:04:33 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:04:34 PM	Tube furnace set to 0
3/11/2011	3:24:34 PM	Helium valve closed
3/11/2011	3:24:34 PM	H2 valve closed
3/11/2011	3:24:34 PM	BCl3 valve closed
3/11/2011	3:24:34 PM	PH3 valve closed
3/11/2011	3:24:34 PM	SiCl4 pre valve closed
3/11/2011	3:24:34 PM	SiCl4 post valve closed
3/11/2011	3:24:34 PM	Main Vac valve closed
3/11/2011	3:24:34 PM	Bypass valve closed
3/11/2011	3:24:34 PM	Bubbler valve closed
3/11/2011	3:24:34 PM	Helium MFC set to  0.000000
3/11/2011	3:24:34 PM	H2 MFC set to  0.000000
3/11/2011	3:24:34 PM	BCl3 MFC set to  0.000000
3/11/2011	3:24:34 PM	PHl3 MFC set to  0.000000
3/11/2011	3:24:34 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:24:34 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:24:34 PM	Tube furnace set to 0
3/11/2011	3:24:34 PM	Run finished at 3:24 PM
3/11/2011	3:37:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	3:37:21 PM	Recipe started at 3:37 PM
3/11/2011	3:37:22 PM	Helium valve closed
3/11/2011	3:37:22 PM	H2 valve closed
3/11/2011	3:37:22 PM	BCl3 valve closed
3/11/2011	3:37:22 PM	PH3 valve closed
3/11/2011	3:37:22 PM	SiCl4 pre valve closed
3/11/2011	3:37:22 PM	SiCl4 post valve closed
3/11/2011	3:37:22 PM	Main Vac valve closed
3/11/2011	3:37:22 PM	Bubbler valve closed
3/11/2011	3:37:22 PM	Bypass valve opened
3/11/2011	3:37:22 PM	Helium MFC set to  0.000000
3/11/2011	3:37:22 PM	H2 MFC set to  0.000000
3/11/2011	3:37:22 PM	BCl3 MFC set to  0.000000
3/11/2011	3:37:22 PM	PHl3 MFC set to  0.000000
3/11/2011	3:37:22 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:37:22 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:37:22 PM	Tube furnace set to 0
3/11/2011	3:37:54 PM	Helium valve closed
3/11/2011	3:37:54 PM	H2 valve closed
3/11/2011	3:37:54 PM	BCl3 valve closed
3/11/2011	3:37:54 PM	PH3 valve closed
3/11/2011	3:37:54 PM	SiCl4 pre valve closed
3/11/2011	3:37:54 PM	SiCl4 post valve closed
3/11/2011	3:37:54 PM	Bubbler valve closed
3/11/2011	3:37:54 PM	Main Vac valve opened
3/11/2011	3:37:54 PM	Bypass valve opened
3/11/2011	3:37:54 PM	Helium MFC set to  0.000000
3/11/2011	3:37:54 PM	H2 MFC set to  0.000000
3/11/2011	3:37:54 PM	BCl3 MFC set to  0.000000
3/11/2011	3:37:54 PM	PHl3 MFC set to  0.000000
3/11/2011	3:37:54 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:37:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:37:55 PM	Tube furnace set to 0
3/11/2011	3:38:55 PM	H2 valve closed
3/11/2011	3:38:55 PM	BCl3 valve closed
3/11/2011	3:38:55 PM	PH3 valve closed
3/11/2011	3:38:55 PM	SiCl4 pre valve closed
3/11/2011	3:38:55 PM	SiCl4 post valve closed
3/11/2011	3:38:55 PM	Bubbler valve closed
3/11/2011	3:38:55 PM	Helium valve opened
3/11/2011	3:38:55 PM	Main Vac valve opened
3/11/2011	3:38:55 PM	Bypass valve opened
3/11/2011	3:38:55 PM	Helium MFC set to  100.000000
3/11/2011	3:38:55 PM	H2 MFC set to  0.000000
3/11/2011	3:38:55 PM	BCl3 MFC set to  0.000000
3/11/2011	3:38:55 PM	PHl3 MFC set to  0.000000
3/11/2011	3:38:55 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:38:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:38:55 PM	Tube furnace set to 0
3/11/2011	3:39:55 PM	Helium valve closed
3/11/2011	3:39:55 PM	H2 valve closed
3/11/2011	3:39:55 PM	BCl3 valve closed
3/11/2011	3:39:55 PM	PH3 valve closed
3/11/2011	3:39:55 PM	SiCl4 pre valve closed
3/11/2011	3:39:55 PM	SiCl4 post valve closed
3/11/2011	3:39:55 PM	Bubbler valve closed
3/11/2011	3:39:55 PM	Main Vac valve opened
3/11/2011	3:39:55 PM	Bypass valve opened
3/11/2011	3:39:55 PM	Helium MFC set to  0.000000
3/11/2011	3:39:55 PM	H2 MFC set to  0.000000
3/11/2011	3:39:55 PM	BCl3 MFC set to  0.000000
3/11/2011	3:39:55 PM	PHl3 MFC set to  0.000000
3/11/2011	3:39:55 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:39:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:39:55 PM	Tube furnace set to 0
3/11/2011	3:40:55 PM	H2 valve closed
3/11/2011	3:40:55 PM	BCl3 valve closed
3/11/2011	3:40:55 PM	PH3 valve closed
3/11/2011	3:40:55 PM	SiCl4 pre valve closed
3/11/2011	3:40:55 PM	SiCl4 post valve closed
3/11/2011	3:40:55 PM	Bubbler valve closed
3/11/2011	3:40:55 PM	Helium valve opened
3/11/2011	3:40:55 PM	Main Vac valve opened
3/11/2011	3:40:55 PM	Bypass valve opened
3/11/2011	3:40:55 PM	Helium MFC set to  100.000000
3/11/2011	3:40:55 PM	H2 MFC set to  0.000000
3/11/2011	3:40:55 PM	BCl3 MFC set to  0.000000
3/11/2011	3:40:55 PM	PHl3 MFC set to  0.000000
3/11/2011	3:40:55 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:40:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:40:55 PM	Tube furnace set to 0
3/11/2011	3:41:55 PM	Helium valve closed
3/11/2011	3:41:55 PM	H2 valve closed
3/11/2011	3:41:55 PM	BCl3 valve closed
3/11/2011	3:41:55 PM	PH3 valve closed
3/11/2011	3:41:55 PM	SiCl4 pre valve closed
3/11/2011	3:41:55 PM	SiCl4 post valve closed
3/11/2011	3:41:55 PM	Bubbler valve closed
3/11/2011	3:41:55 PM	Main Vac valve opened
3/11/2011	3:41:55 PM	Bypass valve opened
3/11/2011	3:41:55 PM	Helium MFC set to  0.000000
3/11/2011	3:41:55 PM	H2 MFC set to  0.000000
3/11/2011	3:41:55 PM	BCl3 MFC set to  0.000000
3/11/2011	3:41:55 PM	PHl3 MFC set to  0.000000
3/11/2011	3:41:55 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:41:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:41:55 PM	Tube furnace set to 0
3/11/2011	3:42:55 PM	H2 valve closed
3/11/2011	3:42:55 PM	BCl3 valve closed
3/11/2011	3:42:55 PM	PH3 valve closed
3/11/2011	3:42:55 PM	SiCl4 pre valve closed
3/11/2011	3:42:55 PM	SiCl4 post valve closed
3/11/2011	3:42:55 PM	Bubbler valve closed
3/11/2011	3:42:55 PM	Helium valve opened
3/11/2011	3:42:55 PM	Main Vac valve opened
3/11/2011	3:42:55 PM	Bypass valve opened
3/11/2011	3:42:55 PM	Helium MFC set to  100.000000
3/11/2011	3:42:55 PM	H2 MFC set to  0.000000
3/11/2011	3:42:55 PM	BCl3 MFC set to  0.000000
3/11/2011	3:42:55 PM	PHl3 MFC set to  0.000000
3/11/2011	3:42:55 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:42:55 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:42:56 PM	Tube furnace set to 0
3/11/2011	3:43:56 PM	Helium valve closed
3/11/2011	3:43:56 PM	H2 valve closed
3/11/2011	3:43:56 PM	BCl3 valve closed
3/11/2011	3:43:56 PM	PH3 valve closed
3/11/2011	3:43:56 PM	SiCl4 pre valve closed
3/11/2011	3:43:56 PM	SiCl4 post valve closed
3/11/2011	3:43:56 PM	Bubbler valve closed
3/11/2011	3:43:56 PM	Main Vac valve opened
3/11/2011	3:43:56 PM	Bypass valve opened
3/11/2011	3:43:56 PM	Helium MFC set to  0.000000
3/11/2011	3:43:56 PM	H2 MFC set to  0.000000
3/11/2011	3:43:56 PM	BCl3 MFC set to  0.000000
3/11/2011	3:43:56 PM	PHl3 MFC set to  0.000000
3/11/2011	3:43:56 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:43:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:43:56 PM	Tube furnace set to 0
3/11/2011	3:44:56 PM	H2 valve closed
3/11/2011	3:44:56 PM	BCl3 valve closed
3/11/2011	3:44:56 PM	PH3 valve closed
3/11/2011	3:44:56 PM	SiCl4 pre valve closed
3/11/2011	3:44:56 PM	SiCl4 post valve closed
3/11/2011	3:44:56 PM	Bubbler valve closed
3/11/2011	3:44:56 PM	Helium valve opened
3/11/2011	3:44:56 PM	Main Vac valve opened
3/11/2011	3:44:56 PM	Bypass valve opened
3/11/2011	3:44:56 PM	Helium MFC set to  100.000000
3/11/2011	3:44:56 PM	H2 MFC set to  0.000000
3/11/2011	3:44:56 PM	BCl3 MFC set to  0.000000
3/11/2011	3:44:56 PM	PHl3 MFC set to  0.000000
3/11/2011	3:44:56 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:44:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:44:56 PM	Tube furnace set to 0
3/11/2011	3:45:56 PM	Helium valve closed
3/11/2011	3:45:56 PM	H2 valve closed
3/11/2011	3:45:56 PM	BCl3 valve closed
3/11/2011	3:45:56 PM	PH3 valve closed
3/11/2011	3:45:56 PM	SiCl4 pre valve closed
3/11/2011	3:45:56 PM	SiCl4 post valve closed
3/11/2011	3:45:56 PM	Bubbler valve closed
3/11/2011	3:45:56 PM	Main Vac valve opened
3/11/2011	3:45:56 PM	Bypass valve opened
3/11/2011	3:45:56 PM	Helium MFC set to  0.000000
3/11/2011	3:45:56 PM	H2 MFC set to  0.000000
3/11/2011	3:45:56 PM	BCl3 MFC set to  0.000000
3/11/2011	3:45:56 PM	PHl3 MFC set to  0.000000
3/11/2011	3:45:56 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:45:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:45:56 PM	Tube furnace set to 0
3/11/2011	3:46:56 PM	H2 valve closed
3/11/2011	3:46:56 PM	BCl3 valve closed
3/11/2011	3:46:56 PM	PH3 valve closed
3/11/2011	3:46:56 PM	SiCl4 pre valve closed
3/11/2011	3:46:56 PM	SiCl4 post valve closed
3/11/2011	3:46:56 PM	Bubbler valve closed
3/11/2011	3:46:56 PM	Helium valve opened
3/11/2011	3:46:56 PM	Main Vac valve opened
3/11/2011	3:46:56 PM	Bypass valve opened
3/11/2011	3:46:56 PM	Helium MFC set to  100.000000
3/11/2011	3:46:56 PM	H2 MFC set to  0.000000
3/11/2011	3:46:56 PM	BCl3 MFC set to  0.000000
3/11/2011	3:46:56 PM	PHl3 MFC set to  0.000000
3/11/2011	3:46:56 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:46:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:46:56 PM	Tube furnace set to 0
3/11/2011	3:47:56 PM	Helium valve closed
3/11/2011	3:47:56 PM	H2 valve closed
3/11/2011	3:47:56 PM	BCl3 valve closed
3/11/2011	3:47:56 PM	PH3 valve closed
3/11/2011	3:47:56 PM	SiCl4 pre valve closed
3/11/2011	3:47:56 PM	SiCl4 post valve closed
3/11/2011	3:47:56 PM	Bubbler valve closed
3/11/2011	3:47:56 PM	Main Vac valve opened
3/11/2011	3:47:56 PM	Bypass valve opened
3/11/2011	3:47:56 PM	Helium MFC set to  0.000000
3/11/2011	3:47:56 PM	H2 MFC set to  0.000000
3/11/2011	3:47:56 PM	BCl3 MFC set to  0.000000
3/11/2011	3:47:56 PM	PHl3 MFC set to  0.000000
3/11/2011	3:47:56 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:47:56 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:47:57 PM	Tube furnace set to 0
3/11/2011	3:48:57 PM	H2 valve closed
3/11/2011	3:48:57 PM	BCl3 valve closed
3/11/2011	3:48:57 PM	PH3 valve closed
3/11/2011	3:48:57 PM	SiCl4 pre valve closed
3/11/2011	3:48:57 PM	SiCl4 post valve closed
3/11/2011	3:48:57 PM	Bubbler valve closed
3/11/2011	3:48:57 PM	Helium valve opened
3/11/2011	3:48:57 PM	Main Vac valve opened
3/11/2011	3:48:57 PM	Bypass valve opened
3/11/2011	3:48:57 PM	Helium MFC set to  100.000000
3/11/2011	3:48:57 PM	H2 MFC set to  0.000000
3/11/2011	3:48:57 PM	BCl3 MFC set to  0.000000
3/11/2011	3:48:57 PM	PHl3 MFC set to  0.000000
3/11/2011	3:48:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:48:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:48:57 PM	Tube furnace set to 0
3/11/2011	3:49:57 PM	Helium valve closed
3/11/2011	3:49:57 PM	H2 valve closed
3/11/2011	3:49:57 PM	BCl3 valve closed
3/11/2011	3:49:57 PM	PH3 valve closed
3/11/2011	3:49:57 PM	SiCl4 pre valve closed
3/11/2011	3:49:57 PM	SiCl4 post valve closed
3/11/2011	3:49:57 PM	Bubbler valve closed
3/11/2011	3:49:57 PM	Main Vac valve opened
3/11/2011	3:49:57 PM	Bypass valve opened
3/11/2011	3:49:57 PM	Helium MFC set to  0.000000
3/11/2011	3:49:57 PM	H2 MFC set to  0.000000
3/11/2011	3:49:57 PM	BCl3 MFC set to  0.000000
3/11/2011	3:49:57 PM	PHl3 MFC set to  0.000000
3/11/2011	3:49:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:49:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:49:57 PM	Tube furnace set to 0
3/11/2011	3:50:57 PM	H2 valve closed
3/11/2011	3:50:57 PM	BCl3 valve closed
3/11/2011	3:50:57 PM	PH3 valve closed
3/11/2011	3:50:57 PM	SiCl4 pre valve closed
3/11/2011	3:50:57 PM	SiCl4 post valve closed
3/11/2011	3:50:57 PM	Bubbler valve closed
3/11/2011	3:50:57 PM	Helium valve opened
3/11/2011	3:50:57 PM	Main Vac valve opened
3/11/2011	3:50:57 PM	Bypass valve opened
3/11/2011	3:50:57 PM	Helium MFC set to  100.000000
3/11/2011	3:50:57 PM	H2 MFC set to  0.000000
3/11/2011	3:50:57 PM	BCl3 MFC set to  0.000000
3/11/2011	3:50:57 PM	PHl3 MFC set to  0.000000
3/11/2011	3:50:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:50:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:50:57 PM	Tube furnace set to 0
3/11/2011	3:51:57 PM	Helium valve closed
3/11/2011	3:51:57 PM	H2 valve closed
3/11/2011	3:51:57 PM	BCl3 valve closed
3/11/2011	3:51:57 PM	PH3 valve closed
3/11/2011	3:51:57 PM	SiCl4 pre valve closed
3/11/2011	3:51:57 PM	SiCl4 post valve closed
3/11/2011	3:51:57 PM	Bubbler valve closed
3/11/2011	3:51:57 PM	Main Vac valve opened
3/11/2011	3:51:57 PM	Bypass valve opened
3/11/2011	3:51:57 PM	Helium MFC set to  0.000000
3/11/2011	3:51:57 PM	H2 MFC set to  0.000000
3/11/2011	3:51:57 PM	BCl3 MFC set to  0.000000
3/11/2011	3:51:57 PM	PHl3 MFC set to  0.000000
3/11/2011	3:51:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:51:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:51:57 PM	Tube furnace set to 0
3/11/2011	3:52:57 PM	H2 valve closed
3/11/2011	3:52:57 PM	BCl3 valve closed
3/11/2011	3:52:57 PM	PH3 valve closed
3/11/2011	3:52:57 PM	SiCl4 pre valve closed
3/11/2011	3:52:57 PM	SiCl4 post valve closed
3/11/2011	3:52:57 PM	Bubbler valve closed
3/11/2011	3:52:57 PM	Helium valve opened
3/11/2011	3:52:57 PM	Main Vac valve opened
3/11/2011	3:52:57 PM	Bypass valve opened
3/11/2011	3:52:57 PM	Helium MFC set to  100.000000
3/11/2011	3:52:57 PM	H2 MFC set to  0.000000
3/11/2011	3:52:57 PM	BCl3 MFC set to  0.000000
3/11/2011	3:52:57 PM	PHl3 MFC set to  0.000000
3/11/2011	3:52:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:52:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:52:58 PM	Tube furnace set to 0
3/11/2011	3:53:58 PM	Helium valve closed
3/11/2011	3:53:58 PM	H2 valve closed
3/11/2011	3:53:58 PM	BCl3 valve closed
3/11/2011	3:53:58 PM	PH3 valve closed
3/11/2011	3:53:58 PM	SiCl4 pre valve closed
3/11/2011	3:53:58 PM	SiCl4 post valve closed
3/11/2011	3:53:58 PM	Bubbler valve closed
3/11/2011	3:53:58 PM	Main Vac valve opened
3/11/2011	3:53:58 PM	Bypass valve opened
3/11/2011	3:53:58 PM	Helium MFC set to  0.000000
3/11/2011	3:53:58 PM	H2 MFC set to  0.000000
3/11/2011	3:53:58 PM	BCl3 MFC set to  0.000000
3/11/2011	3:53:58 PM	PHl3 MFC set to  0.000000
3/11/2011	3:53:58 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:53:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:53:58 PM	Tube furnace set to 0
3/11/2011	3:54:58 PM	H2 valve closed
3/11/2011	3:54:58 PM	BCl3 valve closed
3/11/2011	3:54:58 PM	PH3 valve closed
3/11/2011	3:54:58 PM	SiCl4 pre valve closed
3/11/2011	3:54:58 PM	SiCl4 post valve closed
3/11/2011	3:54:58 PM	Bubbler valve closed
3/11/2011	3:54:58 PM	Helium valve opened
3/11/2011	3:54:58 PM	Main Vac valve opened
3/11/2011	3:54:58 PM	Bypass valve opened
3/11/2011	3:54:58 PM	Helium MFC set to  100.000000
3/11/2011	3:54:58 PM	H2 MFC set to  0.000000
3/11/2011	3:54:58 PM	BCl3 MFC set to  0.000000
3/11/2011	3:54:58 PM	PHl3 MFC set to  0.000000
3/11/2011	3:54:58 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:54:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:54:58 PM	Tube furnace set to 0
3/11/2011	3:55:58 PM	Helium valve closed
3/11/2011	3:55:58 PM	H2 valve closed
3/11/2011	3:55:58 PM	BCl3 valve closed
3/11/2011	3:55:58 PM	PH3 valve closed
3/11/2011	3:55:58 PM	SiCl4 pre valve closed
3/11/2011	3:55:58 PM	SiCl4 post valve closed
3/11/2011	3:55:58 PM	Bubbler valve closed
3/11/2011	3:55:58 PM	Main Vac valve opened
3/11/2011	3:55:58 PM	Bypass valve opened
3/11/2011	3:55:58 PM	Helium MFC set to  0.000000
3/11/2011	3:55:58 PM	H2 MFC set to  0.000000
3/11/2011	3:55:58 PM	BCl3 MFC set to  0.000000
3/11/2011	3:55:58 PM	PHl3 MFC set to  0.000000
3/11/2011	3:55:58 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:55:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:55:58 PM	Tube furnace set to 0
3/11/2011	3:56:58 PM	H2 valve closed
3/11/2011	3:56:58 PM	BCl3 valve closed
3/11/2011	3:56:58 PM	PH3 valve closed
3/11/2011	3:56:58 PM	SiCl4 pre valve closed
3/11/2011	3:56:58 PM	SiCl4 post valve closed
3/11/2011	3:56:58 PM	Bubbler valve closed
3/11/2011	3:56:58 PM	Helium valve opened
3/11/2011	3:56:58 PM	Main Vac valve opened
3/11/2011	3:56:58 PM	Bypass valve opened
3/11/2011	3:56:58 PM	Helium MFC set to  100.000000
3/11/2011	3:56:58 PM	H2 MFC set to  0.000000
3/11/2011	3:56:58 PM	BCl3 MFC set to  0.000000
3/11/2011	3:56:58 PM	PHl3 MFC set to  0.000000
3/11/2011	3:56:58 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:56:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:56:58 PM	Tube furnace set to 0
3/11/2011	3:57:58 PM	Helium valve closed
3/11/2011	3:57:58 PM	H2 valve closed
3/11/2011	3:57:58 PM	BCl3 valve closed
3/11/2011	3:57:58 PM	PH3 valve closed
3/11/2011	3:57:58 PM	SiCl4 pre valve closed
3/11/2011	3:57:58 PM	SiCl4 post valve closed
3/11/2011	3:57:58 PM	Bubbler valve closed
3/11/2011	3:57:58 PM	Main Vac valve opened
3/11/2011	3:57:58 PM	Bypass valve opened
3/11/2011	3:57:58 PM	Helium MFC set to  0.000000
3/11/2011	3:57:58 PM	H2 MFC set to  0.000000
3/11/2011	3:57:58 PM	BCl3 MFC set to  0.000000
3/11/2011	3:57:58 PM	PHl3 MFC set to  0.000000
3/11/2011	3:57:58 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:57:58 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:57:59 PM	Tube furnace set to 0
3/11/2011	3:58:00 PM	Run finished at 3:58 PM
3/11/2011	3:58:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/11/2011	3:59:39 PM	Recipe started at 3:59 PM
3/11/2011	3:59:39 PM	Helium valve closed
3/11/2011	3:59:39 PM	BCl3 valve closed
3/11/2011	3:59:39 PM	PH3 valve closed
3/11/2011	3:59:39 PM	SiCl4 pre valve closed
3/11/2011	3:59:39 PM	SiCl4 post valve closed
3/11/2011	3:59:39 PM	Main Vac valve closed
3/11/2011	3:59:39 PM	Bypass valve closed
3/11/2011	3:59:39 PM	Bubbler valve closed
3/11/2011	3:59:39 PM	H2 valve opened
3/11/2011	3:59:39 PM	Helium MFC set to  0.000000
3/11/2011	3:59:39 PM	H2 MFC set to  500.000000
3/11/2011	3:59:39 PM	BCl3 MFC set to  0.000000
3/11/2011	3:59:39 PM	PHl3 MFC set to  0.000000
3/11/2011	3:59:39 PM	SiCl4 MFC set to  0.000000
3/11/2011	3:59:39 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	3:59:39 PM	Tube furnace set to 0
3/11/2011	4:00:57 PM	Helium valve closed
3/11/2011	4:00:57 PM	BCl3 valve closed
3/11/2011	4:00:57 PM	PH3 valve closed
3/11/2011	4:00:57 PM	SiCl4 pre valve closed
3/11/2011	4:00:57 PM	SiCl4 post valve closed
3/11/2011	4:00:57 PM	Main Vac valve closed
3/11/2011	4:00:57 PM	Bypass valve closed
3/11/2011	4:00:57 PM	H2 valve opened
3/11/2011	4:00:57 PM	Bubbler valve opened
3/11/2011	4:00:57 PM	Helium MFC set to  0.000000
3/11/2011	4:00:57 PM	H2 MFC set to  500.000000
3/11/2011	4:00:57 PM	BCl3 MFC set to  0.000000
3/11/2011	4:00:57 PM	PHl3 MFC set to  0.000000
3/11/2011	4:00:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	4:00:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	4:00:57 PM	Tube furnace set to 1000
3/11/2011	4:20:57 PM	Helium valve closed
3/11/2011	4:20:57 PM	PH3 valve closed
3/11/2011	4:20:57 PM	Main Vac valve closed
3/11/2011	4:20:57 PM	Bypass valve closed
3/11/2011	4:20:57 PM	H2 valve opened
3/11/2011	4:20:57 PM	BCl3 valve opened
3/11/2011	4:20:57 PM	SiCl4 pre valve opened
3/11/2011	4:20:57 PM	SiCl4 post valve opened
3/11/2011	4:20:57 PM	Bubbler valve opened
3/11/2011	4:20:57 PM	Helium MFC set to  0.000000
3/11/2011	4:20:57 PM	H2 MFC set to  500.000000
3/11/2011	4:20:57 PM	BCl3 MFC set to  3.000000
3/11/2011	4:20:57 PM	PHl3 MFC set to  0.000000
3/11/2011	4:20:57 PM	SiCl4 MFC set to  50.000000
3/11/2011	4:20:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	4:20:57 PM	Tube furnace set to 1000
3/11/2011	4:40:57 PM	H2 valve closed
3/11/2011	4:40:57 PM	BCl3 valve closed
3/11/2011	4:40:57 PM	PH3 valve closed
3/11/2011	4:40:57 PM	SiCl4 pre valve closed
3/11/2011	4:40:57 PM	SiCl4 post valve closed
3/11/2011	4:40:57 PM	Main Vac valve closed
3/11/2011	4:40:57 PM	Bypass valve closed
3/11/2011	4:40:57 PM	Helium valve opened
3/11/2011	4:40:57 PM	Bubbler valve opened
3/11/2011	4:40:57 PM	Helium MFC set to  500.000000
3/11/2011	4:40:57 PM	H2 MFC set to  0.000000
3/11/2011	4:40:57 PM	BCl3 MFC set to  0.000000
3/11/2011	4:40:57 PM	PHl3 MFC set to  0.000000
3/11/2011	4:40:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	4:40:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	4:40:57 PM	Tube furnace set to 0
3/11/2011	5:00:57 PM	Helium valve closed
3/11/2011	5:00:57 PM	H2 valve closed
3/11/2011	5:00:57 PM	BCl3 valve closed
3/11/2011	5:00:57 PM	PH3 valve closed
3/11/2011	5:00:57 PM	SiCl4 pre valve closed
3/11/2011	5:00:57 PM	SiCl4 post valve closed
3/11/2011	5:00:57 PM	Main Vac valve closed
3/11/2011	5:00:57 PM	Bypass valve closed
3/11/2011	5:00:57 PM	Bubbler valve closed
3/11/2011	5:00:57 PM	Helium MFC set to  0.000000
3/11/2011	5:00:57 PM	H2 MFC set to  0.000000
3/11/2011	5:00:57 PM	BCl3 MFC set to  0.000000
3/11/2011	5:00:57 PM	PHl3 MFC set to  0.000000
3/11/2011	5:00:57 PM	SiCl4 MFC set to  0.000000
3/11/2011	5:00:57 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	5:00:58 PM	Tube furnace set to 0
3/11/2011	5:00:58 PM	Run finished at 5:00 PM
3/11/2011	5:03:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2011	5:03:48 PM	Recipe started at 5:03 PM
3/11/2011	5:03:48 PM	H2 valve closed
3/11/2011	5:03:48 PM	BCl3 valve closed
3/11/2011	5:03:48 PM	PH3 valve closed
3/11/2011	5:03:48 PM	SiCl4 pre valve closed
3/11/2011	5:03:48 PM	SiCl4 post valve closed
3/11/2011	5:03:48 PM	Main Vac valve closed
3/11/2011	5:03:48 PM	Bypass valve closed
3/11/2011	5:03:48 PM	Bubbler valve closed
3/11/2011	5:03:48 PM	Helium valve opened
3/11/2011	5:03:48 PM	Helium MFC set to  500.000000
3/11/2011	5:03:48 PM	H2 MFC set to  0.000000
3/11/2011	5:03:48 PM	BCl3 MFC set to  0.000000
3/11/2011	5:03:48 PM	PHl3 MFC set to  0.000000
3/11/2011	5:03:48 PM	SiCl4 MFC set to  0.000000
3/11/2011	5:03:48 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	5:03:48 PM	Tube furnace set to 0
3/11/2011	5:03:49 PM	Helium valve closed
3/11/2011	5:03:49 PM	H2 valve closed
3/11/2011	5:03:49 PM	BCl3 valve closed
3/11/2011	5:03:49 PM	PH3 valve closed
3/11/2011	5:03:49 PM	SiCl4 pre valve closed
3/11/2011	5:03:49 PM	SiCl4 post valve closed
3/11/2011	5:03:49 PM	Main Vac valve closed
3/11/2011	5:03:49 PM	Bypass valve closed
3/11/2011	5:03:49 PM	Bubbler valve closed
3/11/2011	5:03:49 PM	Helium MFC set to  0.000000
3/11/2011	5:03:49 PM	H2 MFC set to  0.000000
3/11/2011	5:03:49 PM	BCl3 MFC set to  0.000000
3/11/2011	5:03:49 PM	PHl3 MFC set to  0.000000
3/11/2011	5:03:49 PM	SiCl4 MFC set to  0.000000
3/11/2011	5:03:49 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	5:03:49 PM	Tube furnace set to 0
3/11/2011	5:03:49 PM	Run finished at 5:03 PM
3/11/2011	5:03:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/11/2011	5:04:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/11/2011	5:04:39 PM	Recipe started at 5:04 PM
3/11/2011	5:04:39 PM	Helium valve closed
3/11/2011	5:04:39 PM	H2 valve closed
3/11/2011	5:04:39 PM	BCl3 valve closed
3/11/2011	5:04:39 PM	PH3 valve closed
3/11/2011	5:04:39 PM	SiCl4 pre valve closed
3/11/2011	5:04:39 PM	SiCl4 post valve closed
3/11/2011	5:04:39 PM	Main Vac valve closed
3/11/2011	5:04:39 PM	Bubbler valve closed
3/11/2011	5:04:39 PM	Bypass valve opened
3/11/2011	5:04:39 PM	Helium MFC set to  0.000000
3/11/2011	5:04:39 PM	H2 MFC set to  0.000000
3/11/2011	5:04:39 PM	BCl3 MFC set to  0.000000
3/11/2011	5:04:39 PM	PHl3 MFC set to  0.000000
3/11/2011	5:04:39 PM	SiCl4 MFC set to  0.000000
3/11/2011	5:04:39 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	5:04:39 PM	Tube furnace set to 0
3/11/2011	5:05:10 PM	Helium valve closed
3/11/2011	5:05:10 PM	H2 valve closed
3/11/2011	5:05:10 PM	BCl3 valve closed
3/11/2011	5:05:10 PM	PH3 valve closed
3/11/2011	5:05:10 PM	SiCl4 pre valve closed
3/11/2011	5:05:10 PM	SiCl4 post valve closed
3/11/2011	5:05:10 PM	Bubbler valve closed
3/11/2011	5:05:10 PM	Main Vac valve opened
3/11/2011	5:05:10 PM	Bypass valve opened
3/11/2011	5:05:10 PM	Helium MFC set to  0.000000
3/11/2011	5:05:10 PM	H2 MFC set to  0.000000
3/11/2011	5:05:10 PM	BCl3 MFC set to  0.000000
3/11/2011	5:05:10 PM	PHl3 MFC set to  0.000000
3/11/2011	5:05:10 PM	SiCl4 MFC set to  0.000000
3/11/2011	5:05:10 PM	Bypass solenoid MFC set to  0.000000
3/11/2011	5:05:10 PM	Tube furnace set to 0
3/11/2011	5:05:11 PM	Run finished at 5:05 PM
3/11/2011	5:05:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
